A Robust LPCVD Nitride Integrated Process for High Density Non-Volatile Eprom Memories

1993 ◽  
Vol 303 ◽  
Author(s):  
R. B. Sethi ◽  
R. P. Ciari ◽  
L. Anderson ◽  
U. S. Kim ◽  
A. Bergemont
Keyword(s):  
Silicon Carbide ◽  
Atomic Force Microscopy ◽  
Memory Cell ◽  
High Density ◽  
Optical Methods ◽  
Integrated Process ◽  
Force Microscopy ◽  
Atomic Force ◽  
Key Features ◽  
Gas Ratio

ABSTRACTA robust 6" hotwall flatzone nitride system is developed for scaled ONO interpoly. dielectric application in a high density EPROM memory cell. This system is designed to operate at low temperature (660° C) and gas ratio (4:1 NH3: DCS) with integrated silicon carbide components. The obtained key features are low defects (0.25 #/cm2 particles), smooth topography (measured by atomic force microscopy) and superior electrical interface as measured by electrical and optical methods.

Improved local oxidation of silicon carbide using atomic force microscopy

2010 ◽  
Vol 96 (8) ◽  
pp. 082105 ◽  
Author(s):  
Yeong-Deuk Jo ◽  
Soo-Hyung Seo ◽  
Wook Bahng ◽  
Sang-Cheol Kim ◽  
Nam-Kyun Kim ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Oxidation

scholarly journals Air–water interface of submerged superhydrophobic surfaces imaged by atomic force microscopy

2017 ◽  
Vol 8 ◽  
pp. 1671-1679 ◽  
Author(s):  
Markus Moosmann ◽  
Thomas Schimmel ◽  
Wilhelm Barthlott ◽  
Matthias Mail
Keyword(s):  
Atomic Force Microscopy ◽  
Current Knowledge ◽  
Biological Species ◽  
Optical Methods ◽  
Water Interface ◽  
Contact Mode ◽  
Structured Surfaces ◽  
Force Microscopy ◽  
Atomic Force ◽  
Air Water Interface

Underwater air retention of superhydrophobic hierarchically structured surfaces is of increasing interest for technical applications. Persistent air layers (the Salvinia effect) are known from biological species, for example, the floating fern Salvinia or the backswimmer Notonecta. The use of this concept opens up new possibilities for biomimetic technical applications in the fields of drag reduction, antifouling, anticorrosion and under water sensing. Current knowledge regarding the shape of the air–water interface is insufficient, although it plays a crucial role with regards to stability in terms of diffusion and dynamic conditions. Optical methods for imaging the interface have been limited to the micrometer regime. In this work, we utilized a nondynamic and nondestructive atomic force microscopy (AFM) method to image the interface of submerged superhydrophobic structures with nanometer resolution. Up to now, only the interfaces of nanobubbles (acting almost like solids) have been characterized by AFM at these dimensions. In this study, we show for the first time that it is possible to image the air–water interface of submerged hierarchically structured (micro-pillars) surfaces by AFM in contact mode. By scanning with zero resulting force applied, we were able to determine the shape of the interface and thereby the depth of the water penetrating into the underlying structures. This approach is complemented by a second method: the interface was scanned with different applied force loads and the height for zero force was determined by linear regression. These methods open new possibilities for the investigation of air-retaining surfaces, specifically in terms of measuring contact area and in comparing different coatings, and thus will lead to the development of new applications.

EX SITU ATOMIC FORCE MICROSCOPY STUDIES OF SURFACE MORPHOLOGY ON {001} FACES OF MMTWD CRYSTALS

2006 ◽  
Vol 13 (05) ◽  
pp. 607-611
Author(s):  
X. J. LIU ◽  
X. Q. WANG ◽  
Z. Y. WANG ◽  
D. XU ◽  
G. W. YU ◽  
...  
Keyword(s):  
Crystal Structure ◽  
Atomic Force Microscopy ◽  
Surface Morphology ◽  
Temperature Stress ◽  
Growth Rates ◽  
High Density ◽  
Ex Situ ◽  
Force Microscopy ◽  
Elementary Steps ◽  
Atomic Force

Surface morphology of the {001} faces of MMTWD crystals grown from by the temperature-lowering method has been studied. Monolayer and multilayer steps elongate along the a direction, which is determined by the crystal structure. Apart from that, the elementary steps have narrower terraces than the bunched ones, which may be resulting from the faster growth rates of the former than the latter. The formation of the protuberances at the step fronts is primarily associated with the uneven growth rates. The hollow cavities also elongate along the a direction, which demonstrates that the formation of them is also restricted by the crystal structure. Cracks are supposed to occur during harvesting, handling, or temperature stress afterwards. Growth of the 3D hillocks in high density can probably cause large stress and induce structure mismatch and serious cracks at the later stage.

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