Improved local oxidation of silicon carbide using atomic force microscopy

2010 ◽  
Vol 96 (8) ◽  
pp. 082105 ◽  
Author(s):  
Yeong-Deuk Jo ◽  
Soo-Hyung Seo ◽  
Wook Bahng ◽  
Sang-Cheol Kim ◽  
Nam-Kyun Kim ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Oxidation

Atomic Force Microscopy Local Oxidation of GeO Thin Films

2018 ◽  
Vol 52 (16) ◽  
pp. 2081-2084
Author(s):  
K. N. Astankova ◽  
A. S. Kozhukhov ◽  
E. B. Gorokhov ◽  
I. A. Azarov ◽  
A. V. Latyshev
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Oxidation

Local oxidation of titanium films by non-contact atomic force microscopy

2008 ◽  
Vol 85 (7) ◽  
pp. 1616-1623 ◽  
Author(s):  
Te-Hua Fang ◽  
Tong Hong Wang ◽  
Kuan-Te Wu
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Oxidation
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