Structural Equilibration in Pure and Hydrogenated Amorphous Silicon

1993 ◽  
Vol 297 ◽  
Author(s):  
Gerhard Müller ◽  
Gerhard KrÖtz

Chemically pure (a-Si) and hydrogenated amorphous silicon (a-Si:H) are metasta- ble materials which are thermodynamically unstable with respect to crystalline silicon (c-Si). In both materials, however, partial thermal equilibria can be established between certain structural, configurational and electronic degrees of freedom. The present paper discusses experiments on both amorphous (a-) materials showing that two kinds of structural change can take place within random Si networks: structural relaxation and configurational equilibration. The first process can be observed in both materials indicating that it is supported by intrinsic degrees of freedom of the random Si networks. During these changes partial thermal equilibria between distorted and broken bonds are established via irreversible and relatively long-range relaxation processes. The second kind of change can only be observed in a-Si:H, indicating that it is H-related. The H-related degrees of freedom support reversible valence alternation reactions in which the local bonding configuration of the dopant and defect sites is changed and in which their charge states are altered. These latter interactions establish a strong coupling between the electronic system and the configurational degrees of freedom of the random Si networks. Formally, these latter changes bear strong similarity to the electrochemical processes that take place in liquid electrolytes.

2011 ◽  
Vol 99 (20) ◽  
pp. 203503 ◽  
Author(s):  
Jan-Willem A. Schüttauf ◽  
Karine H. M. van der Werf ◽  
Inge M. Kielen ◽  
Wilfried G. J. H. M. van Sark ◽  
Jatindra K. Rath ◽  
...  

1994 ◽  
Vol 336 ◽  
Author(s):  
G. Lucovsky ◽  
M.J. Williams ◽  
S.S. He ◽  
S.M. Cho ◽  
Z. Jing ◽  
...  

ABSTRACTWe have incorporated N-atoms into hydrogenated amorphous silicon in the Si-rich alloy regime to ∼12 at.% N, and have observed a transition from n-type doping to alloying as the concentration of N-atoms is increased above about 5 at.%. By analogy with the local bonding arrangements of P-donors in n-doped a-Si:H, we attribute the doping to four-fold coordinated N-atoms with second neighbor H-atoms as in N+-Si-H linkages. The occurrence of these arrangements is supported by (i) IR studies which indicate a non-statistical association of N and H-atoms bonded to the same Si-atom, and (ii) a chemical bonding model in which the large effective electronegativies of four-fold coordinated N+ atoms and neutral O-atoms promote similar bonding properties with respect to their nearest-neighbor arrangements with Si and H atoms such as N+ (O) -Si-H linkages


1996 ◽  
Vol 420 ◽  
Author(s):  
C. E. Nebel ◽  
M. Rother ◽  
C. Summonte ◽  
M. Heintze ◽  
M. Stutzmann

AbstractHall experiments on a series of microcrystalline, microcrystalline-amorphous, amorphous and crystalline silicon samples with varying defect densities are presented and discussed. Normal Hall effect signatures on boron and phosphorus doped hydrogenated amorphous silicon are detected. We interpret these results to be due to a small volume fraction of nanocrystalline Si, which falls below the detection limits of Raman experiments. Hydrogenated amorphous silicon, prepared under conditions far away from microcrystalline growth, shows the known double sign anomaly, Sign reversals in c-Si, where the disorder is increased by Si implantation up to very high levels, could not be detected.


1984 ◽  
Vol 56 (6) ◽  
pp. 1874-1877 ◽  
Author(s):  
S. G. Greenbaum ◽  
W. E. Carlos ◽  
P. C. Taylor

1999 ◽  
Vol 557 ◽  
Author(s):  
J. D. Webb ◽  
L. M. Gedvilas ◽  
R. S. Crandall ◽  
E. Iwaniczko ◽  
B. P. Nelson ◽  
...  

AbstractWe used polarized attenuated total reflection (ATR) measurements together with Fourier transform infrared (FTIR) spectroscopy to investigate the vibrational spectra of hydrogenated amorphous silicon (a-SiHx) films 0.5-1.0 microns in thickness. We deposited the films using hot-wire or plasma-enhanced chemical vapor deposition methods (HWCVD or PECVD, respectively) on crystalline silicon and cadmium telluride substrates. Our ATR technique gave a spectral range from 2100-400 cm-1, although the Si-H wagging mode absorption band at 640 cm-1 was somewhat distorted in the a-SiHx/Si samples by impurity and lattice absorption in the silicon ATR substrates. We report the identification of a Si-O-C impurity band with maximum intensity at 1240-1230 cm-1. The assignment of this band to a Si-O-C vibration is supported by secondary-ion mass spectrometry (SIMS) measurements. Our polarized FTIR-ATR spectra of HWCVD and PECVD a-SiHx films on <111> Si ATR substrates show that the impurity dipoles are oriented strongly parallel to the film growth direction. The wagging mode absorbance band is more intense in the film plane. This trend is less pronounced for the Si-H stretching vibrations. These observations are consistent with some degree of anisotropy or medium-range order in the films. The anisotropy in the Si-H bands may be related to residual stress in the films. Our scanning electron microscopy (SEM) analyses of the samples offer additional evidence of bulk structural anisotropy in the a-SiHx/Si films. However, the Si-O-C impurity band was not observed in the polarized ATR-FTIR spectra of the a-SiHx/CdTe samples, thus indicating that the Si substrates influence formation of the impurity in the a-SiHx/Si films.


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