Laser Photochemical Etching of GaP in KOH Aqueous Solutions
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ABSTRACTGallium phosphide is an important III-V semiconductor material for fabricating strained layer superlattices and high-speed and high-temperature microelectronics. Etching of this compound semiconductor with conventional techniques presents problems which may be solved by photon-induced electro-chemistry. We have shown that rapid localized etching of n-GaP in KOH can be driven with the UV lines of an argon-ion laser. The level and type of doping and the laser intensity determine the etch rates, which are nearly 60 nm/sec at 3500 Wcm−2 for n-doped material.
1988 ◽
Vol 8
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pp. 66-71
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1982 ◽
Vol 30
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pp. 75-78
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2005 ◽
Vol 23
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pp. 43-46
1972 ◽
Vol 5
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pp. 1807-1814
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