Laser Photochemical Etching of GaP in KOH Aqueous Solutions

1983 ◽  
Vol 29 ◽  
Author(s):  
A. Wayne Johnson ◽  
Gary C. Tisone

ABSTRACTGallium phosphide is an important III-V semiconductor material for fabricating strained layer superlattices and high-speed and high-temperature microelectronics. Etching of this compound semiconductor with conventional techniques presents problems which may be solved by photon-induced electro-chemistry. We have shown that rapid localized etching of n-GaP in KOH can be driven with the UV lines of an argon-ion laser. The level and type of doping and the laser intensity determine the etch rates, which are nearly 60 nm/sec at 3500 Wcm−2 for n-doped material.

1988 ◽  
Vol 8 (1) ◽  
pp. 66-71 ◽  
Author(s):  
Sipke Strikwerda ◽  
Corinne Bott-Silverman ◽  
Norman B. Ratliff ◽  
Marlene Goormastic ◽  
Robert M. Cothren ◽  
...  

1982 ◽  
Vol 30 (3) ◽  
pp. 75-78 ◽  
Author(s):  
W. Hentschel ◽  
K.-D. Merboldt ◽  
K. J. Ebeling ◽  
W. Lauterborn

1982 ◽  
Vol 17 ◽  
Author(s):  
Gary C. Tisone ◽  
A. Wayne Johnson

ABSTRACTThe photochemical etching of chromium-doped and n-doped <100> GaAs in HNO3 and KOH is examined in the wavelength region of 334 to 514 nm from an argon-ion laser. The etching process is found to be not thermally controlled. The etch rates of chromium-doped GaAs agree with a diffusion-controlled model of the photochemically produced holes. For both types of GaAs, HNO3 is found to produce morphologically superior results.


Cytometry ◽  
1995 ◽  
Vol 19 (3) ◽  
pp. 209-216 ◽  
Author(s):  
Jan F. Keij ◽  
Ad C. Groenewegen ◽  
George B. J. Dubelaar ◽  
Jan W. M. Visser

Author(s):  
H.S. Mavi ◽  
S. Rath ◽  
Arun Shukla

Laser-induced etching of silicon is used to generate silicon nanocrystals. The pore structure depends on the substrate type and etching laser wavelength. Porous silicon (PS) samples prepared by Nd:YAG laser (1.16 eV) etching of n-type substrate showed a fairly uniform and highly interconnected network of nearly circular pores separated by thin columnar boundaries, while no circular pits were produced by argon- ion laser (2.41 eV) etching under similar conditions. The size and size distribution of the nanocrystals are investigated by Raman and photoluminescence spectroscopies and analyzed within the framework of quantum confinement models.


1972 ◽  
Vol 5 (10) ◽  
pp. 1807-1814 ◽  
Author(s):  
A Maitland ◽  
J C L Cornish
Keyword(s):  

1988 ◽  
Vol 8 (4) ◽  
pp. 3-9
Author(s):  
Norio MIYOSHI ◽  
Takahiro SEKI ◽  
Shuichi KINOSHITA ◽  
Takashi KUSHIDA ◽  
Tsuyoshi NISHIZAKA ◽  
...  

1982 ◽  
Vol 3 (1) ◽  
pp. 35-38
Author(s):  
Masatoshi Esaki ◽  
Hideo Hiratsuka ◽  
Mamoru Hiyama ◽  
Osamu Ueda ◽  
Yukio Toda ◽  
...  

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