Crystallinity Analysis of Amorphous-Crystalline Mixed Phase Silicon films Using Exafs Method
Keyword(s):
Si Films
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ABSTRACTThe crystalline phase fraction (Xc) of amorphous-crystalline mixed phase Si films prepared by thermal annealing of a-Si:H films and by plasma CVD and chemical annealing methods was investigated by the EXAFS method. The EXAFS spectra of these films were represented by linear-combination of a-Si:H and c-Si EXAFS spectra. The values of Xc were analyzed by least-square curve fitting. The crystallinity was also analyzed by a Raman scattering method measured from both sides of the films. Then, the Xc values analyzed by the Raman method were calibrated by the EXAFS analysis results.
Keyword(s):
2006 ◽
Vol 324-325
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pp. 275-278
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Keyword(s):
2013 ◽
Vol 299
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pp. 191-194
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1999 ◽
Vol 111
(12)
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pp. 723-728
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2016 ◽
Vol 303
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pp. 94-100
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