Characterization of Porous Silicon Layers by Reflectance Spectroscopy
Keyword(s):
ABSTRACTThe characterization of porous silicon layers by optical reflectance spectroscopy in the infrared, visible and UV is presented. A fit of simulated to measured spectra is used to interprete the experimental results. We stress that the microgeometry of the porous system determines the optical properties to a large extent and must be taken into account in a correct way in order to achieve reliable results.
2008 ◽
Vol 153
(1)
◽
pp. 199-202
◽
2017 ◽
Vol 7
◽
pp. 184798041773570
◽
Keyword(s):
2020 ◽