Laser-Chemical 3-D Micromachining
Keyword(s):
ABSTRACTThree-dimensional parts are machined in silicon using laser-induced chlorine etching reactions. Structures are created directly from solid-modeling computer-aided-design/computer-aided-manufacturing software. Removal rates exceeding 2×104 and 105μm3/s, several orders of magnitude faster than electrodischarge machining methods, are achieved at 1-μm, and 15-μm x-y resolution, respectively. Laser-induced metallization of resulting structures as well as replication through compression molding have been demonstrated.
2013 ◽
Vol 39
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pp. 197
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2018 ◽
Vol 29
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pp. 1963-1964
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2017 ◽
Vol 46
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pp. 184
2019 ◽
Vol 30
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pp. e413-e415
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2017 ◽
Vol 46
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pp. 325-326
2007 ◽
Vol 7
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pp. 339-346
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2016 ◽
Vol 8
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pp. 168781401668335
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2017 ◽
Vol 28
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pp. 764-767
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