Effect of the Crystallographic Orientation of Underlying Poly-Si on the Thermal Stability of the TiSi2 Film

1992 ◽  
Vol 280 ◽  
Author(s):  
Y. W. Kim ◽  
I. K. Kim ◽  
N. I. Lee ◽  
J. W. Ko ◽  
S. T. Ahn ◽  
...  

ABSTRACTThe effect of the crystallographic orientation of underlying poly-Si film on the thermal stability of the TiSi2 film was studied. Different preferred orientations of the poly-Si film were obtained by annealing poly-Si or amorphous Si films at various temperatures. The TiSi2 film was formed by the solid-state reaction of the Ti film sputtered on the poly-Si film. The thermal stability of the TiSi2 film was evaluated by changes in the sheet resistance and microstructural evolution during furnace anneals. The TiSi2 film on poly-Si with the <110> preferred orientation shows more stable conductivity during high temperature anneals than with the <111> orientation. The surface energy of underlying poly-Si is expected to influence the thermal stability of the TiSi2/poly-Si structure significantly. Better thermal stability of the TiSi2 film can be obtained by the higher surface energy of underlying poly-Si.

2012 ◽  
Vol 182-183 ◽  
pp. 122-125
Author(s):  
Li Li Wang ◽  
Xiu Feng Wang ◽  
Cheng Long Yu ◽  
Hong Tao Jiang

Hydroxyapatite (HA) was synthesized in presence of 20wt% m-ZrO2by solid state reaction between tricalcium phosphate(TCP) and Ca(OH)2at 1000 °C for 2h. Similarily, Fluorine hydroxyapatite(FA) was synthesized using tricalcium phosphate and calcium fluoride as raw materials at 1000 °Cfor 3h. The as-prepared HA was mixed with 10%,25%,45%,55%,70wt% FA and the mixture was sintered at 1000°C-1400°C for 2h. The main phase and bulk density was measured. The results show that when the relative amount of FA to HA increased, the decomposition of the composite is decreased gradually because of the formation of thermally stable FHA solid solutions. Low temperature would effect the exchange of ionic between FA and HA,while high temperature would impact synthesis of composites, because high temperature would lead to dissolution of HA ,which has to react with FA. Increase the content of HA would be advantage for synthesis FHA-ZrO2composite.


2014 ◽  
Vol 989-994 ◽  
pp. 437-440 ◽  
Author(s):  
Pan Li You

A series of Tb3+-doped Li2SrSiO4:Tb3+phosphors were prepared by high temperature solid state reaction. The morphology and the thermal stability of Li2SrSiO4:Tb3+phosphors were discussed by SEM and PL measurements, respectively. The results showed that the morphology of Li2SrSiO4:Tb3+was changed from flower-like to rod-like with increasing Tb3+-doped content. Moreover, the emission intensity measured at 3500C almost maintain with constant compared with that measured at room temperature. The results showed that Li2SrSiO4:Tb3+phosphor might be a potential phosphor for white light-emitting diodes.


1999 ◽  
Vol 564 ◽  
Author(s):  
R. A. Donaton ◽  
S. Jin ◽  
H. Bender ◽  
K. Maex ◽  
A. Vantomme ◽  
...  

AbstractThe effect of the thickness of the SiGe layers in the Co-SiGe/Si reaction is investigated. Formation of the disilicide phase is retarded when compared to the reaction of Co with pure Si substrates. This delay is dependent on the thickness of the SiGe layer, which determines the effective Ge concentration at the reaction front, changing the energetics of the reaction. Besides, Ge expelled from the Co(Si1-yGey) compound blocks the Co diffusion paths, slowing down the reaction. The thermal stability of the silicide layer is also affected by the Ge segregation, with the film agglomerating at lower temperatures when formed on thicker SiGe layers. The slow supply of Co atoms to the reaction front, due to the blocking of Co diffusion paths by the segregated Ge, is believed to be the reason for the presence of the preferential (h00) orientation of the disilicide phase observed in our samples.


2021 ◽  
Vol 8 (4) ◽  
pp. 20218402
Author(s):  
Alexey K. Subanakov ◽  
Evgeniy V. Kovtunets ◽  
Bair G. Bazarov ◽  
Jibzema G. Bazarova

Double borate Na3ErB2O6 was synthesized by the solid-state reaction. The crystal structure of Na3ErB2O6 was refined by the Rietveld method: P21/c, a = 6.49775(14) Å, b = 8.50424(17) Å, c = 12.0067(3) Å, β = 118.4797(9)°, Z = 4. The crystal structure of Na3ErB2O6 consists of –[ErO6]∞-chains along the "b" axis, which are linked by BO3 triangles in a three-dimensional framework. Sodium atoms occupy empty positions inside the channels. The thermal behavior of Na3ErB2O6 was studied in detail in the range of 25–1150 °C range by DSC and TG methods. Na3ErB2O6 congruently melts at 1116 °C. Based on the results of DSC measurements, three reversible phase transitions were found for Na3ErB2O6.


2020 ◽  
Vol MA2020-01 (2) ◽  
pp. 423-423
Author(s):  
Quentin Denoyelle ◽  
Lydie Bourgeois ◽  
Yann Tison ◽  
Hervé Martinez ◽  
Dany Carlier ◽  
...  

RSC Advances ◽  
2019 ◽  
Vol 9 (60) ◽  
pp. 34888-34895
Author(s):  
Vineetha P ◽  
Roshan Jose ◽  
K. Venkata Saravanan

This work investigates and reports the effect of ZnO addition on the ferroelectric properties of (K0.5Na0.5)(Nb0.7Ta0.3)O3 (KNNT) ceramics prepared by a solid state reaction method.


RSC Advances ◽  
2017 ◽  
Vol 7 (32) ◽  
pp. 19584-19592 ◽  
Author(s):  
Shuchao Xu ◽  
Zhijun Wang ◽  
Panlai Li ◽  
Ting Li ◽  
Qiongyu Bai ◽  
...  

A series of Ba3Ce(1−x−y)(PO4)3:xTb3+,yMn2+ and Ba3Ce(1−x−z)(PO4)3:xTb3+,zSm3+ phosphors were synthesized by a high temperature solid-state reaction.


2016 ◽  
Vol 18 (9) ◽  
pp. 1574-1580
Author(s):  
Jun Sae Han ◽  
Seung Sik Jang ◽  
Dong Yong Park ◽  
Yong Jun Oh ◽  
Seong Jin Park

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