Initial Growth of Metastable Titanium Disilicide at Amorphous Silicide/Crystalline Silicon Interface

1992 ◽  
Vol 280 ◽  
Author(s):  
Z. Ma ◽  
L. H. Allen ◽  
S. Lee
Keyword(s):  
Crystalline Silicon ◽  
Early Stage ◽  
Morphological Evolution ◽  
Growth Front ◽  
Scanning Transmission Electron Microscope ◽  
Initial Growth ◽  
Titanium Disilicide ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Scanning Transmission

ABSTRACTInitial stage of growth of metastable titanium disilicide (C49-TiSi2) was investigated by annealing Ti/doped polycrystalline Si bilayers deposited on oxidized Si wafers at 530°C and at a constant heating rate of 10°C/min. Morphological evolution of the C49-TiSi2 phase was studied by cross-sectional transmission electron microscopy (XTEM) and local chemistry was probed with a scanning transmission electron microscope (STEM) equipped with a nanoprobe. At the early stage, the C49-TiSi2 phase nucleates discontinuously along the amorphous silicide (a-TiSix )/crystalline Si (c-Si) interface and then exhibits simultaneous lateral growth and vertical growth. The results are interpretated using a model based upon preferential Si diffusion along interphase boundaries to the growth front.

Subnanometer electron probes and their capabilities for internal interface characterization

1997 ◽  
Vol 3 (S2) ◽  
pp. 643-644
Author(s):  
H. Lakner
Keyword(s):  
Chemical Composition ◽  
Analytical Techniques ◽  
Basic Research ◽  
Scanning Transmission Electron Microscope ◽  
Semiconductor Heterostructures ◽  
Contrast Imaging ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Z Contrast

Internal interfaces in materials like e.g. semiconductor heterostructures get more and more interest not only under aspects of basic research but as well under aspects of new electronic and optoelectronic devices. The interface properties often govern the device performance. Thus, the evaluation of individual heterointerfaces with respect to chemical composition and crystal structure requires characterisation techniques which offer the necessary high spatial resolution. The fine focused electron probe (< 0.3 nm at 100 keV) in a field-emission STEM (Scanning Transmission Electron Microscope) allows the application of special imaging and analytical techniques to cross-sectional specimens of semiconductor heterostructures. Qualitative information on the chemical composition is provided by atomic number (Z) contrast imaging with atomic resolution. The same fine probe can be used to analyse subnanometer areas by both spectroscopic and diffraction techniques. Quantitative compositional information is provided by electron energy-loss spectroscopy (EELS) which allows the detection of concentrations of specific elements.

The High Resolution Scanning Transmission Electron Microscope

1974 ◽  
Vol 32 ◽  
pp. 316-317
Author(s):  
A. V. Crewe
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
High Vacuum ◽  
Scanning Transmission Electron Microscope ◽  
Ultra High Vacuum ◽  
Resolving Power ◽  
Imaging Characteristics ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
The Moment

The high resolution STEM is now a fact of life. I think that we have, in the last few years, demonstrated that this instrument is capable of the same resolving power as a CEM but is sufficiently different in its imaging characteristics to offer some real advantages.It seems possible to prove in a quite general way that only a field emission source can give adequate intensity for the highest resolution^ and at the moment this means operating at ultra high vacuum levels. Our experience, however, is that neither the source nor the vacuum are difficult to manage and indeed are simpler than many other systems and substantially trouble-free.

Resolution Attainable With the Present Day STEM

1973 ◽  
Vol 31 ◽  
pp. 230-231 ◽  
Author(s):  
J. S. Wall ◽  
J. P. Langmore ◽  
H. Isaacson ◽  
A. V. Crewe
Keyword(s):  
Spherical Aberration ◽  
Focal Length ◽  
Incident Beam ◽  
Scanning Transmission Electron Microscope ◽  
Aperture Size ◽  
Magnetic Lens ◽  
Peak Intensity ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Half Angle

The scanning transmission electron microscope (STEM) constructed by the authors employs a field emission gun and a 1.15 mm focal length magnetic lens to produce a probe on the specimen. The aperture size is chosen to allow one wavelength of spherical aberration at the edge of the objective aperture. Under these conditions the profile of the focused spot is expected to be similar to an Airy intensity distribution with the first zero at the same point but with a peak intensity 80 per cent of that which would be obtained If the lens had no aberration. This condition is attained when the half angle that the incident beam subtends at the specimen, 𝛂 = (4𝛌/Cs)¼

Enhancement of Contrast in the CEM and STEM Using Bumpy Specimens and Employing the “Dappled Field” Mode of Operation

1974 ◽  
Vol 32 ◽  
pp. 552-553 ◽  
Author(s):  
L. Gandolfi ◽  
J. Reiffel
Keyword(s):  
Operating Mode ◽  
Scanning Transmission Electron Microscope ◽  
Dark Field ◽  
Specimen Preparation ◽  
Field Mode ◽  
Preparation Methods ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Mode Of Operation ◽  
Scanning Transmission

Calculations have been performed on the contrast obtainable, using the Scanning Transmission Electron Microscope, in the observation of thick specimens. Recent research indicates a revival of an earlier interest in the observation of thin specimens with the view of comparing the attainable contrast using both types of specimens.Potential for biological applications of scanning transmission electron microscopy has led to a proliferation of the literature concerning specimen preparation methods and the controversy over “to stain or not to stain” in combination with the use of the dark field operating mode and the same choice of technique using bright field mode of operation has not yet been resolved.

Development of 200 kV Scanning-Transmission Electron Microscope

1974 ◽  
Vol 32 ◽  
pp. 410-411
Author(s):  
H. Koike ◽  
S. Sakurai ◽  
K. Ueno ◽  
M. Watanabe
Keyword(s):  
Electron Microscopy ◽  
Electron Microscope ◽  
Scanning Transmission Electron Microscope ◽  
The Other ◽  
Morphological Observation ◽  
Magnetic Domains ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Backscattered Electron ◽  
Increasing Demand

In recent years, there has been increasing demand for higher voltage SEMs, in the field of surface observation, especially that of magnetic domains, dislocations, and electron channeling patterns by backscattered electron microscopy. On the other hand, the resolution of the CTEM has now reached 1 ∼ 2Å, and several reports have recently been made on the observation of atom images, indicating that the ultimate goal of morphological observation has beem nearly achieved.

A Magnetic Spectrometer for a Scanning Transmission Electron Microscope

1974 ◽  
Vol 32 ◽  
pp. 436-437
Author(s):  
A. Kosiara ◽  
J. W. Wiggins ◽  
M. Beer
Keyword(s):  
Scanning Transmission Electron Microscope ◽  
Magnetic Spectrometer ◽  
Fringe Field ◽  
Curvature Radius ◽  
Magnetic Pole ◽  
Quadrupole Field ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Under Construction ◽  
Image Position

A magnetic spectrometer to be attached to the Johns Hopkins S. T. E. M. is under construction. Its main purpose will be to investigate electron interactions with biological molecules in the energy range of 40 KeV to 100 KeV. The spectrometer is of the type described by Kerwin and by Crewe Its magnetic pole boundary is given by the equationwhere R is the electron curvature radius. In our case, R = 15 cm. The electron beam will be deflected by an angle of 90°. The distance between the electron source and the pole boundary will be 30 cm. A linear fringe field will be generated by a quadrupole field arrangement. This is accomplished by a grounded mirror plate and a 45° taper of the magnetic pole.

To What Extent are Inelastically Scattered Electrons Useful in the Stem?

1973 ◽  
Vol 31 ◽  
pp. 286-287 ◽  
Author(s):  
H. Rose
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Electron Correlation ◽  
Quantum Noise ◽  
Collection Efficiency ◽  
Scanning Transmission Electron Microscope ◽  
Electron Cloud ◽  
Scanning Time ◽  
Transmission Electron ◽  
Scanning Transmission

The scanning transmission electron microscope offers the possibility of utilizing inelastically scattered electrons. Use of these electrons in addition to the elastically scattered electrons should reduce the scanning time (dose) Which is necessary to keep the quantum noise below a certain level. Hence it should lower the radiation damage. For high resolution, Where the collection efficiency of elastically scattered electrons is small, the use of Inelastically scattered electrons should become more and more favorable because they can all be detected by means of a spectrometer. Unfortunately, the Inelastic scattering Is a non-localized interaction due to the electron-electron correlation, occurring predominantly at the circumference of the atomic electron cloud.

Description of a New High Resolution Scanning Transmission EM

1972 ◽  
Vol 30 ◽  
pp. 418-419
Author(s):  
Michael Beer ◽  
J. W. Wiggins ◽  
David Woodruff ◽  
Jon Zubin
Keyword(s):  
High Resolution ◽  
Field Emission ◽  
Energy Dispersive Spectrometer ◽  
Scanning Transmission Electron Microscope ◽  
Objective Lens ◽  
Condenser Lens ◽  
Transmission Electron ◽  
Pattern Size ◽  
Scanning Transmission ◽  
Under Construction

A high resolution scanning transmission electron microscope of the type developed by A. V. Crewe is under construction in this laboratory. The basic design is completed and construction is under way with completion expected by the end of this year.The optical column of the microscope will consist of a field emission electron source, an accelerating lens, condenser lens, objective lens, diffraction lens, an energy dispersive spectrometer, and three electron detectors. For any accelerating voltage the condenser lens function to provide a parallel beam at the entrance of the objective lens. The diffraction lens is weak and its current will be controlled by the objective lens current to give an electron diffraction pattern size which is independent of small changes in the objective lens current made to achieve focus at the specimen. The objective lens demagnifies the image of the field emission source so that its Gaussian size is small compared to the aberration limit.

A General Method for Spectrometer Design in the Scoff Approximation

1976 ◽  
Vol 34 ◽  
pp. 538-539
Author(s):  
J. R. Fields
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Energy Analysis ◽  
Incident Beam ◽  
Scanning Transmission Electron Microscope ◽  
Chemical Identification ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
General Method

The energy analysis of electrons scattered by a specimen in a scanning transmission electron microscope can improve contrast as well as aid in chemical identification. In so far as energy analysis is useful, one would like to be able to design a spectrometer which is tailored to his particular needs. In our own case, we require a spectrometer which will accept a parallel incident beam and which will focus the electrons in both the median and perpendicular planes. In addition, since we intend to follow the spectrometer by a detector array rather than a single energy selecting slit, we need as great a dispersion as possible. Therefore, we would like to follow our spectrometer by a magnifying lens. Consequently, the line along which electrons of varying energy are dispersed must be normal to the direction of the central ray at the spectrometer exit.

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