X-Ray Grazing Angle Scattering and Fluorescence Studies of Interfacial Microstructures in Si1-xGex/Si Multilayers

1992 ◽  
Vol 280 ◽  
Author(s):  
Z. H. Ming ◽  
A. Krol ◽  
Y. L. Soo ◽  
Y. H. Kao ◽  
J. S. Park ◽  
...  
Keyword(s):  
Angular Dependence ◽  
Grazing Angle ◽  
Grazing Incidence ◽  
Fluorescence Yield ◽  
Interfacial Roughness ◽  
Density Profiles ◽  
X Ray ◽  
Fluorescence Studies ◽  
X Ray Scattering ◽  
Angle Scattering

ABSTRACTAngular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si1-xGex/Si and the inverted bilayer Si/Si1-xGex as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.

Application of Grazing-Incidence Small-Angle X-Ray Scattering Technique to Semiconducting Composite Materials

2005 ◽  
Vol 475-479 ◽  
pp. 1097-1100 ◽  
Author(s):  
T. Ogawa ◽  
H. Niwa ◽  
Hiroshi Okuda ◽  
Shojiro Ochiai
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
Two Dimensional ◽  
Dimensional Model ◽  
X Ray ◽  
X Ray Scattering ◽  
Angle Scattering ◽  
Two Dimensional Model ◽  
Scattering Technique ◽  
Best Fitting

Grazing-incidence small-angle scattering (GI-SAXS) technique was applied to self-assembled Ge islands capped with Si. GI-SAXS has a merit over TEM and AFM that the structure of islands buried in a cap layer for stabilization can be evaluated nondestructively. By analyzing the scattering patterns, the size of Ge islands was estimated to be about 5 nm in height and 26 nm in diameter, with the islands density of 4.2×1014/m2. From the best fitting of two-dimensional model intensity to the experiments, the shape of the islands was deduced

Studies of Interfacial Roughness of GaAs/AlAs Superlattices by Grazing Incidence X-Ray Scattering

1997 ◽  
Vol 11 (24) ◽  
pp. 1057-1067 ◽  
Author(s):  
S. Huang ◽  
Z. H. Ming ◽  
Y. L. Soo ◽  
Y. H. Kao ◽  
T. Chang ◽  
...  
Keyword(s):  
Quantum Well ◽  
Imaging Techniques ◽  
Structural Parameters ◽  
Grazing Incidence ◽  
Type Ii ◽  
Interfacial Roughness ◽  
Correlation Lengths ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

A series of type-II GaAs/AlAs superlattices epitaxially grown with different interrupts have been investigated using the techniques of grazing incidence X-ray scattering and diffraction. The interrupts are specifically designed to alter the interfacial roughness in the superlattices for the present study. Various structural parameters including the layer thickness, interfacial roughness, and intra-layer correlation lengths of fluctuations in the quantum-well widths have been determined. These results are compared with measurements made on the same set of samples using photoluminescence and optical imaging techniques.

scholarly journals Comprehensive synchrotron grazing-incidence X-ray scattering analysis of nanostructures in porous polymethylsilsesquioxane dielectric thin films

2013 ◽  
Vol 46 (2) ◽  
pp. 466-475 ◽  
Author(s):  
Yecheol Rho ◽  
Byungcheol Ahn ◽  
Jinhwan Yoon ◽  
Moonhor Ree
Keyword(s):  
Thin Films ◽  
Grazing Angle ◽  
Grazing Incidence ◽  
Scattering Data ◽  
Small Contribution ◽  
Dielectric Thin Films ◽  
Dielectric Thin Film ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

A complete grazing-incidence X-ray scattering (GIXS) formula has been derived for nanopores buried in a polymer dielectric thin film supported by a substrate. Using the full power of the scattering formula, GIXS data from nanoporous polymethylsilsesquioxane dielectric thin films, a model nanoporous system, have successfully been analysed. The nanopores were found to be spherical and to have a certain degree of size distribution but were randomly dispersed in the film. In the film, GIXS was confirmed to arise predominantlyviathe first scattering process in which the incident X-ray beam scatters without reflection; the other scattering processes and their contributions were significantly dependent on the grazing angle. This study also confirmed that GIXS scattering can be analysed using only independent scattering terms, but this simple approach can only provide structural parameters. The cross terms were found to make a relatively small contribution to the intensity of the overall scattering but were required for the complete characterization of the measured two-dimensional scattering data, in particular the extracted out-of-plane scattering data, and their inclusion in the analysis enabled film properties such as film thickness, critical angle (i.e.electron density), refractive index and the absorption term to be determined.

scholarly journals Measurements of an Effective Longitudinal Coherence Length in Transmission Small Angle X-ray Scatterings

Nanomaterials ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 1549
Author(s):  
Chun-Ting Liu ◽  
Bo-Ching He ◽  
Guo-Dung Chen ◽  
Alice Chinghsuan Chang ◽  
Wen-Li Wu ◽  
...  
Keyword(s):  
Angular Dependence ◽  
Small Angle ◽  
Coherence Length ◽  
Small Angle Scattering ◽  
Incident Wavelength ◽  
X Ray ◽  
X Ray Scattering ◽  
Angle Scattering ◽  
Longitudinal Coherence ◽  
Ray Scattering

The notion of an effective longitudinal coherence length with its value much greater than λ2/(2Δλ) has been adopted in small-angle X-ray scattering communities for years, where λ and Δλ denote the incident wavelength and its spread, respectively. Often the implications of the effective longitudinal coherence length do not even enter considerations in the designing and data treatment of small-angle scattering experiments. In this work, conventional transmission small-angle X-ray scattering (tSAXS) was performed to reveal a clear angular dependence on effective longitudinal coherence length. The measured values of effective longitudinal coherence length can be as high as one millimeter, whereas the value of calculated λ2/(2Δλ) is in nanometers.

Variations of Interfacial Roughness with Epilayer Thickness and Scaling Behavior in Si1−x,Gex, Grown on Si(100) Substrates

1994 ◽  
Vol 367 ◽  
Author(s):  
Z. H. Ming ◽  
S. Huang ◽  
Y. L. Soo ◽  
Y. H. Kao ◽  
T. Carns ◽  
...  
Keyword(s):  
Scaling Law ◽  
Grazing Incidence ◽  
Sample Surface ◽  
Thin Layers ◽  
Roughness Parameters ◽  
X Ray Diffraction ◽  
Interfacial Roughness ◽  
X Ray ◽  
Buried Interfaces ◽  
X Ray Scattering

AbstractRoughness parameters of sample surface and buried interfaces in a series of thin layers of Si0.4 GeO.6 grown on Si(100) by molecular beam epitaxy (MBE) were measured by using the technique of grazing-incidence x-ray scattering (GIXS). The strain in the layer and the critical thickness of the film were determined from x-ray diffraction of the Si(004) peak. The roughness parameters can be described by a scaling-law with an exponent β = 0.71 for both the surface and interfacial roughness. Establishment of a scaling law thus allows a possibility of predicting the interfacial roughness as a function of the epilayer thickness.

New Structure of CTAB Templated Silica Films as revealed by GISAXS coupled to HRTEM

2000 ◽  
Vol 628 ◽  
Author(s):  
Sophie Besson ◽  
Catherine Jacquiod ◽  
Thierry Gacoin ◽  
André Naudon ◽  
Christian Ricolleau ◽  
...  
Keyword(s):  
Cetyltrimethylammonium Bromide ◽  
Grazing Incidence ◽  
Hexagonal Structure ◽  
X Ray Diffraction ◽  
Electronic Microscopy ◽  
Silica Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Hexagonal Arrangement ◽  
Spherical Micelles

ABSTRACTA microstructural study on surfactant templated silica films is performed by coupling traditional X-Ray Diffraction (XRD) and Transmission Electronic Microscopy (TEM) to Grazing Incidence Small Angle X-Ray Scattering (GISAXS). By this method it is shown that spin-coating of silicate solutions with cationic surfactant cetyltrimethylammonium bromide (CTAB) as a templating agent provides 3D hexagonal structure (space group P63/mmc) that is no longer compatible with the often described hexagonal arrangement of tubular micelles but rather with an hexagonal arrangement of spherical micelles. The extent of the hexagonal ordering and the texture can be optimized in films by varying the composition of the solution.

Quantifying Multiple Crystallite Orientations and Crystal Heterogeneities in Complex Thin Film Materials

2019 ◽  
Author(s):  
Jonathan Ogle ◽  
Daniel Powell ◽  
Eric Amerling ◽  
Detlef Matthias Smilgies ◽  
Luisa Whittaker-Brooks
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Structural Design ◽  
Grazing Incidence ◽  
Crystallite Orientation ◽  
Miller Index ◽  
X Ray ◽  
X Ray Scattering ◽  
Orientation Distributions ◽  
Orientation Information

<p>Thin film materials have become increasingly complex in morphological and structural design. When characterizing the structure of these films, a crucial field of study is the role that crystallite orientation plays in giving rise to unique electronic properties. It is therefore important to have a comparative tool for understanding differences in crystallite orientation within a thin film, and also the ability to compare the structural orientation between different thin films. Herein, we designed a new method dubbed the mosaicity factor (MF) to quantify crystallite orientation in thin films using grazing incidence wide-angle X-ray scattering (GIWAXS) patterns. This method for quantifying the orientation of thin films overcomes many limitations inherent in previous approaches such as noise sensitivity, the ability to compare orientation distributions along different axes, and the ability to quantify multiple crystallite orientations observed within the same Miller index. Following the presentation of MF, we proceed to discussing case studies to show the efficacy and range of application available for the use of MF. These studies show how using the MF approach yields quantitative orientation information for various materials assembled on a substrate.<b></b></p>

Mesoscopic structure of SiC fibers by neutron and x-ray scattering

1996 ◽  
Vol 11 (5) ◽  
pp. 1169-1178 ◽  
Author(s):  
Kentaro Suzuya ◽  
Michihiro Furusaka ◽  
Noboru Watanabe ◽  
Makoto Osawa ◽  
Kiyohito Okamura ◽  
...  
Keyword(s):  
Neutron Scattering ◽  
Volume Fraction ◽  
X Rays ◽  
X Ray ◽  
Sic Fibers ◽  
X Ray Scattering ◽  
Mesoscopic Structure ◽  
Angle Scattering ◽  
Momentum Transfer Range ◽  
First Time

Mesoscopic structures of SiC fibers produced from polycarbosilane by different methods were studied by diffraction and small-angle scattering of neutrons and x-rays. Microvoids of a size of 4–10 Å in diameter have been observed for the first time by neutron scattering in a medium momentum transfer range (Q = 0.1–1.0 Å−1). The size and the volume fraction of β–SiC particles were determined for fibers prepared at different heat-treatment temperatures. The results show that wide-angle neutron scattering measurements are especially useful for the study of the mesoscopic structure of multicomponent materials.

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