Submicron Scale Interface Roughness in Quantum Wells Observed by High-Resolution Cathodoluminescence Microscopy
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ABSTRACTA single quantum well (SQW) is grown at a high substrate temperature and low growth rate (HTLR growth) in order to reduce interface roughness. The lateral well thickness variation in the SQW is characterized by the cathodolumincscence microscopy. It is clarified that HTLR growth can be applied to make a smooth interface for advanced devices.