A Thin Barrier Technology for the Integration of YBa2Cu3O7−x Thin Films to Semiconductors

1992 ◽  
Vol 275 ◽  
Author(s):  
A. Mesarwi ◽  
N. J. Wu ◽  
H. Fredricksen ◽  
A. Ignatiev

ABSTRACTUltra-thin SiO2 barriers have been developed for application to the integration of thin films of YBa2Cu3O7−x (YBCO) superconductors to silicon. The SiO2 barriers are formed by the selective oxidation of Si with 2–5 ML yttrium overlayers. The Y-promoted SiO2, barrier formed by this technique is highly stoichiometric and is an effective buffer which prevents YBCO/substrate interdiffusion. The technique has been applied to YBCO on Si and has resulted in a YBCO transition temperature of TC=78°K for a 70Å Y-promoted SiO2 barrier.This technique has also been applied to the growth of multilayer YBCO films and fabrication of SIS junctions. For this purpose, a Y-promoted SiO2 barrier was prepared by the selective oxidation of a Y/Si/Y sandwich layer grown on thin fdm YBCO deposited on MgO by standard laser deposition. This resulted in a 20–40Å SiO2/Y2O3-, high quality barrier. Following barrier preparation, a second YBCO thin layer was deposited on the barrier yielding a YBa2Cu3O7−x-SiO2-YBa2Cu3O7−x (SIS) structure which was then patterned to yield 100μm diameter SIS junctions. Voltage-current measurements across the SIS junction have shown Joseph son junction behavior.

2019 ◽  
Vol 3 (9) ◽  
pp. 55-63 ◽  
Author(s):  
Antonello Tebano ◽  
Carmela Aruta ◽  
Pier Gianni Medaglia ◽  
Giuseppe Balestrino ◽  
Norberto G. Boggio ◽  
...  

1996 ◽  
Vol 14 (5) ◽  
pp. 2854-2858 ◽  
Author(s):  
A. Del Vecchio ◽  
L. Tapfer ◽  
D. Berling ◽  
B. Loegel ◽  
G. Leggieri ◽  
...  

2020 ◽  
Vol 31 (16) ◽  
pp. 165704 ◽  
Author(s):  
Yekai Song ◽  
Zhuojun Li ◽  
Hui Li ◽  
Shujie Tang ◽  
Gang Mu ◽  
...  

2019 ◽  
Vol 290 ◽  
pp. 163-167
Author(s):  
Nurhanna Badar ◽  
Norlida Kamarulzaman ◽  
Annie Maria Mahat ◽  
Nor Fadilah Chayed ◽  
Kelimah Elong

Pulsed laser deposition (PLD) method has the advantages of high quality mirror finish, good densification and uniform thickness. In this work, Al2O3 thin films with different thicknesses were fabricated via the PLD method. The characteristics of the thin film samples were investigated using Grazing Incidence Diffraction (GID) technique and Field Emission Scanning Electron Microscope (FESEM). For the band gap studies, measurements were done using a UV-Vis NIR spectrophotometer. The deposition was done in the presence of oxygen gas with partial pressure of 2.66 Pa. FESEM images showed high quality, smooth and dense films obtained using the PLD method. The Al2O3 thin films have thicknesses of between 71.2 nm to 176 nm. The band gap energies obtained were in the range of 6.29 eV to 6.49 eV. It was observed that the band gap of the thin films increases as the thickness decreases due to the defects in the films.


2008 ◽  
Vol 368-372 ◽  
pp. 308-311
Author(s):  
F.K. Shan ◽  
G.X. Liu ◽  
Byoung Chul Shin ◽  
Won Jae Lee ◽  
W.T. Oh

High-quality In2O3 powder and ZnO powder had been used to make the ceramic target and the atomic ratio of 1 to 1 of indium and zinc had been prepared in this study. The alloyed thin films had been deposited on sapphire (001) substrates at different temperatures (100–600°C) by using pulsed laser deposition (PLD) technique. An x-ray diffractometer and an atomic force microscope were used to investigate the structural and morphological properties of the alloyed thin films. It was observed that the alloyed thin films deposited at the temperatures lower than 300°C were amorphous, and the alloyed thin films deposited at high temperatures were crystallized. A spectrophotometer was used to investigate the transmittances of the alloyed thin films. It was found that the alloyed thin films were of high quality. The band gap energies of the alloys were calculated by linear fitting the sharp absorption edges of the transmittance spectra. The Hall measurements were also carried out to identify the electrical properties of the thin films.


2014 ◽  
Vol 104 (8) ◽  
pp. 082402 ◽  
Author(s):  
Qi I. Yang ◽  
Jinfeng Zhao ◽  
Li Zhang ◽  
Merav Dolev ◽  
Alexander D. Fried ◽  
...  

2010 ◽  
Vol 25 (10) ◽  
pp. 1886-1889 ◽  
Author(s):  
T. Ohnishi ◽  
B.T. Hang ◽  
X. Xu ◽  
M. Osada ◽  
K. Takada

Thin films of c-axis-oriented LiCoO2 were epitaxially grown by pulsed laser deposition (PLD). The ablation laser conditions greatly affect the crystal quality of the epitaxial LiCoO2 thin films. In addition, high-quality LiCoO2 thin films were found to grow without any impurity phases under relatively low oxygen partial pressure, although high pressure had been often selected to suppress the formation of Co3O4 with a lower valence state as an impurity. This result clearly indicates that the ablation laser conditions are an essential growth parameter, and that composition control is indispensable to grow high-quality complex compound thin films by PLD.


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