Internal Stress in Nitrogen Doped Diamond-Like a-C:H Films

1992 ◽  
Vol 270 ◽  
Author(s):  
D. Franceschini ◽  
C. Achete ◽  
F. Freire ◽  
G. Mariotto
Keyword(s):  
Infrared Spectroscopy ◽  
Internal Stress ◽  
Carbon Films ◽  
Elastic Recoil ◽  
Hard Carbon ◽  
Rutherford Back Scattering ◽  
Elastic Recoil Detection ◽  
Nitrogen Doped ◽  
Back Scattering ◽  
Ir And Raman

ABSTRACTResults of a study on internal stress, hardness and structure of nitrogen doped amorphous hydrogenated hard carbon films deposited by r.f. glow discharge on silicon are presented. Films obtained for different bias voltage (Vb), N2 partial pressure and total gas pressure were characterized by Nuclear Reaction (NR), Elastic Recoil Detection (ERD), Rutherford Back-Scattering (RBS), Infrared Spectroscopy (IR) and Raman Scattering. The elemental composition, density and structure are correlated with Vickers hardness, and internal stress values obtained by the substrate bending method. It has been observed that internal stress considerably decreases with increasing nitrogen content, contrary to the behavior shown by hardness, structure and hydrogen concentration, which remain unchanged.

Mechanical and Tribological Properties of a-GeCx Films Deposited by DC-Magnetron Sputtering

1997 ◽  
Vol 505 ◽  
Author(s):  
L. G. Jacobsohn ◽  
D. C. Reigada ◽  
F. L. Freire ◽  
R. Prioli ◽  
S. I. Zanette ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Internal Stress ◽  
Rutherford Backscattering Spectrometry ◽  
Argon Plasma ◽  
Carbon Films ◽  
Elastic Recoil ◽  
Dc Magnetron Sputtering ◽  
Elastic Recoil Detection ◽  
Mechanical And Tribological Properties ◽  
Film Hardness

ABSTRACTAmorphous carbon-germanium films were grown by dc-magnetron sputtering at different argon plasma pressures ranging from 0.17 and 1.4 Pa. The water-cooled sample holder was grounded. The film thickness were typically 0.5 μm. The ratio between germanium and carbon atomic concentration ranges up to 2.8, as measured by Rutherford backscattering spectrometry (RBS). Elastic recoil detection technique was used to measure hydrogen contamination. The film hardness was measured by nanoindentation techniques and the internal stress was determined by the bending of the substrate. The incorporation of Ge reduces both the film hardness and the internal stress. Hardness and internal stress increases when the films are deposited in lower pressures. Atomic Force Microscopy (AFM) was used to measure the surface roughness, which was found to be insensitive to the pressure and to the Ge content. A possible influence of the thickness on the morphology of pure carbon films is discussed. The friction coefficient measured by AFM is independent on the film composition within experimental errors.

ERRATA: PHOTOLUMINESCENCE PROPERTIES AND LOCAL STRUCTURE OF POLYMER-LIKE a-C:H FILMS

2000 ◽  
Vol 14 (16) ◽  
pp. 1701-1717 ◽  
Author(s):  
C. GODET ◽  
T. HEITZ ◽  
B. DRAVILLON ◽  
J. E. BOURÉE
Keyword(s):  
Local Structure ◽  
Carbon Films ◽  
Dissociation Rate ◽  
Photoluminescence Properties ◽  
Elastic Recoil ◽  
Electron Hole ◽  
Elastic Recoil Detection ◽  
Bonded Materials ◽  
Infrared Ellipsometry

In order to understand better the electronic properties of π-bonded materials, some optical and photoluminescence properties of amorphous carbon films have been investigated as a function of film density (0.9 to 1.7 g·cm-3). This study gives an overview of the radiative recombination properties in relation with local structure characterizations (in situ infrared ellipsometry and Raman spectroscopies) for a series of dual-plasma deposited polymer-like a-C:H films. Medium range topology has consequences in the hyperconjugation effects seen on infrared bands, as well as in optical and resonant Raman characteristics. Photoluminescence (PL) excitation spectroscopy reveals resonance features which are attributed to exciton-like electron-hole pairs in close Coulomb interaction. The PL efficiency shows a sharp quenching for densities above 1.3 g·cm-3 where a clear transition also occurs in the Raman "fingerprint". In addition, quantitative analysis of IR ellipsometry and Elastic Recoil Detection give evidence of a strong decrease of both the effective dynamical charge e*(C-H) and the bandwidth of sp3 C-H vibrations; this is interpreted as being a result of the increase of local strains in the carbon skeleton, meaning that matrix distortions already appear at H content values as high as 46 H at.% due to film densification. An expected consequence is the mixing between π and σ molecular orbitals and the enhancement of the dissociation rate of confined electron-hole pairs. PL quenching would thus result from both a decrease of exciton confinement and an increase of the density of accessible nonradiative centers.

PHOTOLUMINESCENE PROPERTIES AND LOCAL STRUCTURE OF POLYMER-LIKE A-C:H FILMS

2000 ◽  
Vol 14 (02n03) ◽  
pp. 274-287
Author(s):  
C. GODET ◽  
T. HEITZ ◽  
J. E. BOURÉE
Keyword(s):  
Local Structure ◽  
Carbon Films ◽  
Dissociation Rate ◽  
Elastic Recoil ◽  
Electron Hole ◽  
Elastic Recoil Detection ◽  
Bonded Materials ◽  
Infrared Ellipsometry ◽  
Quantiative Analysis

In order to understand better the electronic properties of π-bonded materials, some optical and photoluminescence properties of amorphous carbon films have been investigated as a function of film density (0.9 to 1.7 g.cm-3). This study gives an overview of the radiative recombination properties in relation with local structure characterizations (in situ infrared ellipsometry and Raman spectroscopies) for a series of dual-plasma deposited polymer-like a-C:H films. Medium range topology has consequences in the hyperconjugation effects seen on infrared bands, as well as in optical and resonant Raman characteristics. Photoluminescence (PL) excitation spectroscopy reveals resonance features which are attributed to exciton-like electron-hole pairs in close Coulomb interaction. The PL efficiency shows a sharp quenching for densities above 1.3 g.cm -3 where a clear transition also occurs in the Raman "fingerprint". In addition, quantiative analysis of IR ellipsometry and Elastic Recoil Detection give evidence of a strong decrease of both the effective dynamical charge e*(C-H) and the bandwidth of sp 3 C-H vibrations; this is interpreted as being a result of the increase of local strains in the carbon skeleton, meaning that matrix distortions already appear at H content values as high as 46 H at .% due to film densification. An expected consequence is the mixing between π and σ molecular orbitals and the enhancement of the dissociation rate of confined electron-hole pairs. PL quenching would thus result form both a decrease of exciton confinement and an increase of the density of accessible nonradiative centers.

Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique

1999 ◽  
Vol 593 ◽  
Author(s):  
M. Hakovirta ◽  
D. H. Lee ◽  
X. M. He ◽  
M. Nastasi
Keyword(s):  
High Hardness ◽  
Processing Technique ◽  
Carbon Films ◽  
Glow Discharge Plasma ◽  
Diamond Like Carbon ◽  
Elastic Recoil ◽  
Dlc Coatings ◽  
Elastic Recoil Detection ◽  
Wetting Properties ◽  
Detection Analysis

ABSTRACTFluorinated diamond-like carbon (F-DLC) coatings were deposited on polished silicon substrates with plasma immersion ion processing (PIIP) technique. In the PIIP technique, pulsed glow discharge plasma from a mixture of acetylane and hexafluoroethane gases was used. Contact angle measurements were performed in order to see the un-wetting properties of the coatings. The film composition was measured with Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) and the hardness was measured with a Nanoindenter® II. The results clearly show that the un-wetting properties and hardness are strongly dependent on the fluorine incorporation in the F-DLC coatings. With optimized gas ratio of acetylane and hexafluoroethane gases, a combination of extremely good un-wetting properties and high hardness was achieved.

Calibration of infrared spectroscopy by elastic recoil detection analysis of H in synthetic olivine

2012 ◽  
Vol 334 ◽  
pp. 92-98 ◽  
Author(s):  
Anthony C. Withers ◽  
Hélène Bureau ◽  
Caroline Raepsaet ◽  
Marc M. Hirschmann
Keyword(s):  
Infrared Spectroscopy ◽  
Elastic Recoil ◽  
Elastic Recoil Detection Analysis ◽  
Elastic Recoil Detection ◽  
Detection Analysis

Yttrium Oxyhydrides for Photochromic Applications: Correlating Composition and Optical Response

2018 ◽  
Author(s):  
Dmitrii Moldarev ◽  
Elbruz M. Baba ◽  
Marcos V. Moro ◽  
Chang C. You ◽  
Smagul Zh. Karazhanov ◽  
...  
Keyword(s):  
Medical Devices ◽  
Ternary Diagram ◽  
Optical And Electrical Properties ◽  
Ambient Conditions ◽  
Elastic Recoil ◽  
Elastic Recoil Detection Analysis ◽  
Photochromic Properties ◽  
Smart Windows ◽  
Elastic Recoil Detection ◽  
Detection Analysis

It has been recently demonstrated that yttrium oxyhydride(YHO) films can exhibit reversible photochromic properties when exposed to illumination at ambient conditions. This switchable optical propertyenables their utilization in many technological applications, such as smart windows, sensors, goggles, medical devices, etc. However, how the composition of the films affects their optical properties is not fully clear and therefore demands a straightforward investigation. In this work, the composition of YHO films manufactured by reactive magnetron sputtering under different conditions is deduced in a ternary diagram from Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA). The results suggest that stable compounds are formed with a specificchemical formula – YH<sub>2-δ</sub>O<sub>δ</sub>. In addition, optical and electrical properties of the films are investigated, and a correlation with their compositions is established. The corresponding photochromic response is found in a specific oxygen concentration range (0.45 < δ < 1.5) with maximum and minimum of magnitude on the lower and higher border, respectively.

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