In-Situ Quality Control of the Production of Semiconductor Devices by Microwave Photoconductivity Measurements
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ABSTRACTThe application of transient photoconductivity measurements in the microwave frequency range to the characterization of semiconductors and semiconductor devices is analyzed. Quality control and in-situ optimization are discussed from a more general point of view and as a concrete example the optimization of the deposition of amorphous silicon films is presented.
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1991 ◽
pp. 1065-1068
2017 ◽
Vol 15
(5)
◽
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