Role of Kinetic Energy of Sputtered Particles in Thin Film Properties

1992 ◽  
Vol 268 ◽  
Author(s):  
Yasunori Taga
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Kinetic Energy ◽  
Materials Science ◽  
Sputter Deposition ◽  
Structure And Properties ◽  
Film Properties ◽  
Emission Effect ◽  
Exciting Area

ABSTRACTThe thin film processes of the sputter deposition method have been reviewed with special emphasis on the effects of kinetic energy of sputtered particles and ion bombardment during deposition on thin film properties. An overview is first given to describe the thin film process and ion-surface interactions, where the methods of measuring the energy distribution of sputtered ions and the anisotropic-emission-effect sputter deposition are presented. Experimental results for Cr, SiO2 and Ni-Si-B films are presented, and the correlation between the structure and properties of the thin films is discussed. Research in modification of thin films by energetic atoms and ions is an exciting area of materials science in the future.

scholarly journals Detection of nitroaromatic vapours with diketopyrrolopyrrole thin films: exploring the role of structural order and morphology on thin film properties and fluorescence quenching efficiency

2015 ◽  
Vol 51 (6) ◽  
pp. 1143-1146 ◽  
Author(s):  
Monika Warzecha ◽  
Jesus Calvo-Castro ◽  
Alan R. Kennedy ◽  
Alisdair N. Macpherson ◽  
Kenneth Shankland ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Fluorescence Quenching ◽  
Optical Detection ◽  
Film Properties ◽  
Structural Order ◽  
Quenching Efficiency ◽  
First Time

Sensitive optical detection of nitroaromatic vapours with diketopyrrolopyrrole thin films is reported for the first time.

Enhanced properties of metal–organic framework thin films fabricated via a coordination modulation-controlled layer-by-layer process

2017 ◽  
Vol 5 (26) ◽  
pp. 13665-13673 ◽  
Author(s):  
Suttipong Wannapaiboon ◽  
Kenji Sumida ◽  
Katharina Dilchert ◽  
Min Tu ◽  
Susumu Kitagawa ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Adsorption Capacity ◽  
Metal Organic Framework ◽  
Layer By Layer ◽  
Film Properties ◽  
Metal Organic ◽  
Enhanced Properties ◽  
P Addition ◽  
Organic Framework

Addition of a modulator in the LPE process enhances MOF thin film properties by boosting their crystallinity, orientation uniformity, and adsorption capacity.

The Use of BaF2 Buffer Layers for the Sputter-Deposition of Ticabacuo Thin-Film Superconductors

1989 ◽  
Vol 169 ◽  
Author(s):  
K.M. Hubbard ◽  
P.N. Arendt ◽  
D.R. Brown ◽  
D.W. Cooke ◽  
N.E. Elliott ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Sputter Deposition ◽  
Buffer Layers ◽  
X Ray Diffraction ◽  
Dc Magnetron Sputtering ◽  
X Ray ◽  
Film Substrate ◽  
Ion Backscattering ◽  
Scanning Electron

AbstractThin films of the Tl‐based superconductors often have relatively poor properties because of film/substrate interdiffusion which occurs during the anneal. We have therefore investigated the use of BaF2 as a diffusion barrier. TICaBaCuO thin films were deposited by dc magnetron sputtering onto MgO <100> substrates, both with and without an evaporation‐deposited BaF2 buffer layer, and post‐annealed in a Tl over‐pressure. Electrical properties of the films were determined by four‐point probe analysis, and compositions were measured by ion‐backscattering spectroscopy. Structural analysis was performed by X‐ray diffraction and scanning electron microscopy. The BaF2 buffer layers were found to significantly improve the properties of the TICaBaCuO thin films.

Characterization of Thin Organic and Polymeric Films by Spectroscopic Methods

MRS Bulletin ◽  
1987 ◽  
Vol 12 (8) ◽  
pp. 39-41 ◽  
Author(s):  
J.F. Rabolt
Keyword(s):  
Thin Films ◽  
Structural Integrity ◽  
Materials Science ◽  
Molecular Level ◽  
Polymeric Films ◽  
Organic Films ◽  
Semiconductor Films ◽  
Intimate Contact ◽  
The Individual

Much of the anisotropic mechanical and thermal behavior exhibited by materials can be attributed to anisotropic orientation at the molecular level. In self-supporting thin films (5–10 microns) and those (0.01–1.0 microns) deposited on solid substrates, the role of molecular orientation is even more important since it will critically determine their two-dimensional behavior and their structural integrity as well. These two aspects are extremely important because if thin organic and polymeric films are to be competitive with existing materials for such diverse applications1 as chemical sensors and integrated optics, they must be mechanically robust and, ideally, defect free. These stringent constraints dictate that sophisticated characterization techniques, which can interrogate at the molecular level, be developed or refined so as to have the sensitivity to address these critical issues.The development of nondestructive techniques for studying thin organic films has certainly lagged behind those developed for metallic and semiconductor films. Unfortunately, many of these same techniques cannot be simply applied to organic films because they are “invasive” and often alter the structure of the system they were designed to probe. This is especially so in organic and polymer films, and this awareness within the materials science community has led to the adaptation of many photon intensive techniques to the study of thin films. A number of these will be discussed in later sections with their relative merit put in perspective.Certainly the origins of anisotropic structure in bulk materials are manyfold, but the spatial constraints in 2-D can lead to even more complex causes of orientation. In thin films on substrates the role of the surface is important in determining the ordering and orientation of the individual molecular segments which come into intimate contact with it. The extent of this orientation and order is still somewhat controversial but there is general agreement that it probably differs depending on the nature of the substrate.

Physical Characterization of Zirconium Doped Zinc Oxide Thin Firms Deposited by Spray Pyrolysis

1998 ◽  
Vol 520 ◽  
Author(s):  
A. Maldonado ◽  
D.R. Acosta ◽  
M. De La Luz Olvera ◽  
R. Castanedo ◽  
G. Torres ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Zinc Oxide ◽  
Spray Pyrolysis ◽  
Doping Concentration ◽  
Film Properties ◽  
Preferential Growth ◽  
X Ray ◽  
Substrate Temperatures

ABSTRACTZinc oxide thin films doped with zirconium were prepared from solutions with doping material dispersed at several concentrations and using the spray pyrolysis technique.The films were deposited over sodocalcic glasses at different substrate temperatures. Effects of doping material concentration and substrate temperatures on electrical, optical, structural and morphological film properties are presented. Results show an evolution in morphology and grains size as the doping concentration is increased. Preferential growth in the (002) orientation was detected for each thin film from X ray diffractograms.

Sign in / Sign up

Export Citation Format

Share Document