Synthesis of Cupric Oxide Films using Mass-Separated Low-Energy O+ Beams
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ABSTRACTWe report the epitaxial growth of CuO thin films prepared by lowenergy and high-density O+ ion beams mass-separated from an oxygen plasma. We have successfully produced O+ beams of 50 μA/cm2 while maintaining an ambient pressure of 3×10−9 Torr during the growth. CuO grows on MgO(100) with epitaxial relationship of (111)CuO // (100)MgO and [110]CuO // [110]MgO at room temperature and even under conditions where the flux density of O+ beams is at least one order of magnitude lower than the minimum flux density of O2 required to form CuO.
1994 ◽
Vol 08
(01n02)
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pp. 183-205
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2004 ◽
Vol 19
(9)
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pp. 2725-2729
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1980 ◽
Vol 38
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pp. 412-413