Metastable Defects of Iron-Boron Pair in Silicon

ABSTRACTWe have found configuratlonally metastable Fe-B pairs in Si by using dark or photo capacitance-transient technique combined with minority-carrier injection. The metastable pairs are observed as four electron-trapping levels at Ec-0.43 eV, 0.46 eV, 0.52 eV, and 0.54 eV and as two hole-trapping levels at Ev+0.53 eV and 0.48 eV after the injection at 150 K. The production of each level is investigated under various injection conditions, and the annihilation process is studied by isochronal anneals.