Improved Properties of a-SiC:H Alloys with Reduced Density of CH3 Radicals
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ABSTRACTIn this paper we report on the properties of a-SiC:H alloys with reduced density of CH3 radicals obtained by hydrogen dilution of gases. A reduced density of voids, hydrogen content and density of carbon bonded hydrogen atoms, were obtained; while carbon content and density of Si-H bonds are not affected much. A reduction of the optical gap and an increase of the refractive index were observed and related to the reduced densities of CH3 groups and voids. Dark- and photo- conductivity measurements showed that a performance comparable to the best undiluted films may be easily achieved, associated with a shift of the dark Fermi level towards the conduction band.
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2004 ◽
Vol 40
(3)
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pp. 330-332
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2006 ◽
Vol 23
(1)
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pp. 121-137
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2011 ◽
Vol 406
(8)
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pp. 1488-1491
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