Influence of Carbon on Structural, Optical and Electrical Properties of Microcrystalline Silicon Carbide.

1992 ◽  
Vol 258 ◽  
Author(s):  
F. Demichelis ◽  
C.F. Pirri ◽  
E. Tresso ◽  
G. DellaMea ◽  
A. Quaranta ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Chemical Vapor Deposition ◽  
Electrical Properties ◽  
Elemental Composition ◽  
High Power ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
High Power Density ◽  
Optical And Electrical Properties ◽  
Microcrystalline Silicon

ABSTRACTMicrocrystalline films of SiC.H have been deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) of SiH4+CH4+H2 mixtures with high power density and high H2 dilution, at variable CH4/SiH4 ratios. Their elemental composition, structural, optical and electrical properties have been investigated in order to evidence the influence of hydrogen and carbon on microcrystallinity.

Physical Properties of Undoped and Doped Microcrystalline SiC:H Deposited by PECVD

1991 ◽  
Vol 219 ◽  
Author(s):  
F. Demichelis ◽  
C. F. Pirri ◽  
E. Tresso ◽  
G. Dellamea ◽  
V. Rigato ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Optical Properties ◽  
Electrical Properties ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Dark Conductivity ◽  
Systematic Investigation ◽  
Optical And Electrical Properties ◽  
Microcrystalline Silicon ◽  
Window Material

ABSTRACTExperimental results on a systematic investigation on the elemental composition, structural, optical and electrical properties of undoped and doped microcrystalline silicon carbide films deposited by Plasma Enhanced Chemical Vapor Deposition.The doped samples show high values of dark conductivity accompanied by good optical properties so to satisfy the requirements for heterojunction window material.

Structural, morphological, optical and electrical properties of Sb-doped SnO2 thin films obtained by aerosol assisted chemical vapor deposition

2017 ◽  
Vol 638 ◽  
pp. 22-27 ◽  
Author(s):  
A. Heiras-Trevizo ◽  
P. Amézaga-Madrid ◽  
L. Corral-Bustamante ◽  
W. Antúnez-Flores ◽  
P. Pizá Ruiz ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Electrical Properties ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical And Electrical Properties ◽  
Sno2 Thin Films
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