Large Area 2-Dimensional a-Si:H Imaging Arrays
Keyword(s):
X Rays
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ABSTRACTSix inch diagonal, two-dimensional amorphous silicon imaging arrays with 256×240 pixels of 450 micron pitch have been fabricated. Examples of images made under visible light and X-rays illustrate applications to electronic document input and medical imaging. The limits to the array performance are explored through studies of image lag due to deep trapping at dangling bond defects in the a-Si:H sensor, and through measurements of electronic noise.