Determination of Strain Distributions in Aluminum Thin Films as a Function of Temperature by the use of Synchrotron Grazing Incidence X-Ray Scattering

1991 ◽  
Vol 239 ◽  
Author(s):  
Ramnath Venkatraman ◽  
Paul R. Besser ◽  
Sean Brennan ◽  
John C. Bravman
Keyword(s):  
Thin Films ◽  
Room Temperature ◽  
Grazing Incidence ◽  
Surface Relaxation ◽  
Line Broadening ◽  
X Ray ◽  
Relaxation Effects ◽  
X Ray Scattering ◽  
Ray Scattering

ABSTRACTWe have measured elastic strain distributions with depth as a function of temperature in Al thin films of various thicknesses on oxidized silicon using synchrotron grazing incidence X-ray scattering (GIXS). Disregarding minor surface relaxation effects that depend on the film thickness, it is shown that there are no gross strain gradients in these films in the range of temperatures (between room temperature and 400°C) considered. We also observe X-ray line broadening effects, suggesting an accumulation of dislocations on cooling the films, and their annealing out as the films are reheated.

Determination Of The α-Al2O3(0001) Surface Relaxation and Termination by Measurements of Crystal Truncation Rods

1996 ◽  
Vol 437 ◽  
Author(s):  
P. Guenard ◽  
G. Renaud ◽  
A. Barbier ◽  
M. Gautier-Soyer
Keyword(s):  
Surface Structure ◽  
Chemical Nature ◽  
Theoretical Calculations ◽  
Grazing Incidence ◽  
Surface Relaxation ◽  
X Ray ◽  
X Ray Scattering ◽  
Α Al2o3 ◽  
Ray Scattering

AbstractWe have investigated the unreconstructed (0001) surface structure of sapphire (α-Al2O3) by Grazing Incidence X-ray Scattering. Modulations along the crystal truncation rods were analyzed in order to determine the chemical nature of the terminating plane, and the structural relaxations of the first few atomic planes below the surface. The most likely model yields a single Al layer termination with relaxations of the first four planes of -51%, +16%, -29% and +20% respectively. These results compare well with the most recent theoretical calculations on this surface.

Determination of the α-Ai2O3(0001) Surface Relaxation and Termination by Measurements of Crystal Truncation Rods

1998 ◽  
Vol 05 (01) ◽  
pp. 321-324 ◽  
Author(s):  
P. Guénard ◽  
G. Renaud ◽  
A. Barbier ◽  
M. Gautier-Soyer
Keyword(s):  
Surface Structure ◽  
Chemical Nature ◽  
Theoretical Calculations ◽  
Grazing Incidence ◽  
Surface Relaxation ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

We have investigated the unreconstructed (0001) surface structure of sapphire (α- Al 2 O 3) by grazing incidence X-ray scattering. Modulations along the crystal truncation rods were analyzed in order to determine the chemical nature of the terminating plane, and the structural relaxations of the first few atomic planes below the surfoce. The most likely model yields a single Al layer termination with relaxations of the first four planes of -51%, +16%, -29% and +20% respectively. These results compare well with the most recent theoretical calculations on this surface.

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

2009 ◽  
Vol 113 (38) ◽  
pp. 12623-12627 ◽  
Author(s):  
Hong-Ji Chen ◽  
Sheng-Ying Li ◽  
Xiao-Jun Liu ◽  
Rui-Peng Li ◽  
Detlef-M. Smilgies ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Structures ◽  
Organosilicate Thin Films ◽  
Ray Scattering

Grazing-incidence X-ray scattering of lamellar thin films

2019 ◽  
Vol 52 (2) ◽  
pp. 247-251
Author(s):  
Detlef-M. Smilgies
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Small Molecules ◽  
Film Studies ◽  
Grazing Incidence ◽  
Semicrystalline Polymers ◽  
X Ray ◽  
X Ray Scattering ◽  
Incident Plane ◽  
Ray Scattering

Recently, surface and thin-film studies using area detectors have become prevalent. An important class of such systems are lamellar thin films formed by small molecules, liquid crystals or semicrystalline polymers. Frequently, the lamellae align more or less parallel to the substrate. Such structures can be easily discerned by their characteristic X-ray scattering close to the incident plane. This paper describes how such patterns can be simulated, in order to extract morphological information about the thin film.

In-Situ Grazing Incidence Small-Angle X-ray Scattering Studies on Nanopore Evolution in Low-kOrganosilicate Dielectric Thin Films

2005 ◽  
Vol 38 (8) ◽  
pp. 3395-3405 ◽  
Author(s):  
Byeongdu Lee ◽  
Jinhwan Yoon ◽  
Weontae Oh ◽  
Yongtaek Hwang ◽  
Kyuyoung Heo ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
Dielectric Thin Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Synchrotron Grazing Incidence X-ray Scattering Study of the Morphological Structures in Thin Films of a Polymethacrylate Diblock Copolymer Bearing POSS Moieties

2010 ◽  
Vol 114 (24) ◽  
pp. 8033-8042 ◽  
Author(s):  
Sangwoo Jin ◽  
Tomoyasu Hirai ◽  
Byungcheol Ahn ◽  
Yecheol Rho ◽  
Kwang-Woo Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Diblock Copolymer ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Study ◽  
Ray Scattering

scholarly journals Structure of Glancing Incidence Deposited TiO2 Thin Films as Revealed by Grazing Incidence Small-Angle X-ray Scattering

ChemPhysChem ◽  
2010 ◽  
Vol 11 (10) ◽  
pp. 2205-2208 ◽  
Author(s):  
Lola González-García ◽  
Angel Barranco ◽  
Adela Muñoz Páez ◽  
Agustín R. González-Elipe ◽  
Mari-Cruz García-Gutiérrez ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
Tio2 Thin Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering
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