Excimer Laser-Induced Decomposition of Aluminum Nitride

1991 ◽  
Vol 236 ◽  
Author(s):  
H. Esrom ◽  
J-Y Zhang ◽  
A.J. Pedraza
Keyword(s):  
Aluminum Nitride ◽  
Excimer Laser ◽  
Photoelectron Spectroscopy ◽  
Laser Energy ◽  
Liquid Aluminum ◽  
Aluminum Film ◽  
Hole Drilling ◽  
Addition Line ◽  
Substrate Roughness ◽  
Direct Laser

AbstractA thin film of aluminum, detected by x-ray photoelectron spectroscopy, is left at the surface of aluminum nitride (AIN) substrates exposed to a high intensity excimer laser beam of UV radiation. Due to the presence of this film, there is a decrease in the surface resistivity of the substrate with increasing number of laser pulses. In addition, line profilometry shows a decrease of the surface roughness with the number of pulses.The thermal decomposition of AIN is assumed to take place in two stages. In the first, liquid aluminum is produced together with the evolution of gaseous nitrogen, and in the second, aluminum evaporates. Using a computer model to simulate the laser heating cycle, it is shown that the thickness of the aluminum film saturates at a given laser energy density. The saturation thickness is a strong function of the substrate absorption and reflectivity and, therefore, of the laser light frequency. The influence of the substrate roughness on the electrical resistivity of the aluminum film is discussed.The application of this process to direct laser writing in high density hybrid circuits is illustrated. During hole drilling by excimer laser, a thin aluminum film is continuously produced at the hole walls. This process can also be employed for substrate planarization.

Excimer Laser Direct Write Aluminum on Aluminum Nitride

1995 ◽  
Vol 390 ◽  
Author(s):  
Hua Li ◽  
Janet K. Lumpp
Keyword(s):  
Aluminum Nitride ◽  
Excimer Laser ◽  
Laser Energy ◽  
Laser Exposure ◽  
Direct Write ◽  
Electron Microscopies ◽  
Scan Speed ◽  
Krf Excimer Laser ◽  
Induced Decomposition ◽  
Made In

ABSTRACTFabrication of metal lines on aluminum nitride (AIN) ceramic is important for application of AIN as a microcircuit board. An Al line can be made directly from AIN by excimer laser exposure. All lines in this paper were written by pulsed KrF excimer laser (248 nm) in air and vacuum at different scan speeds with a constant laser energy. The morphology of the Al lines was observed by optical and scanning electron microscopies. The lines become more metallic when the scan speed decreases. Consequently the resistance, measured by the four-point probe technique, decreased to a minimum value in the scan speed range of 400 μm/s to 900 μm/s for the samples made in air. The resistance of Al lines written in air is greater than that in vacuum because of oxidation. The samples made in air with scan speed lower than 400 μm/s were heavily oxidized. SAXPS spectra showed a strong oxidation state and that the excimer laser exposure depletes nitrogen from AMN. The Al lines produced by laser-induced decomposition of AMN board are being evaluated as catalysts for laser assisted CVD and conventional electroless plating. The oxidation layer on the surface of Al lines may effect the adhesion between the Al lines and the deposited or plated metal.

scholarly journals Wear Resistance Improvement of Cemented Tungsten Carbide Deep-Hole Drills after Ion Implantation

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 239
Author(s):  
Dmitrij Morozow ◽  
Marek Barlak ◽  
Zbigniew Werner ◽  
Marcin Pisarek ◽  
Piotr Konarski ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Tungsten Carbide ◽  
Photoelectron Spectroscopy ◽  
Secondary Ion Mass Spectrometry ◽  
Carbon Layer ◽  
Hole Drilling ◽  
Deep Hole ◽  
Tungsten Nitrides ◽  
Lubrication Effect ◽  
Secondary Ion

The paper is dedicated to the lifetime prolongation of the tools designed for deep-hole drilling. Among available methods, an ion implantation process was used to improve the durability of tungsten carbide (WC)-Co guide pads. Nitrogen fluencies of 3 × 1017 cm−2, 4 × 1017 cm−2 and 5 × 1017 cm−2 were applied, and scanning electron microscope (SEM) observations, energy dispersive spectroscopy (EDS) analyses, X-ray photoelectron spectroscopy (XPS) and Secondary Ion Mass Spectrometry (SIMS) measurements were performed for both nonimplanted and implanted tools. The durability tests of nonimplanted and the modified tools were performed in industrial conditions. The durability of implanted guide pads was above 2.5 times more than nonimplanted ones in the best case, presumably due to the presence of a carbon-rich layer and extremely hard tungsten nitrides. The achieved effect may be attributed to the dissociation of tungsten carbide phase and to the lubrication effect. The latter was due to the presence of pure carbon layer with a thickness of a few dozen nanometers. Notably, this layer was formed at a temperature of 200 °C, much smaller than in previously reported research, which makes the findings even more valuable from economic and environmental perspectives.

Pressure Waves in Microscopic Simulations of Laser Ablation Leonid

1998 ◽  
Vol 538 ◽  
Author(s):  
V. Zhigilei ◽  
Barbara J. Garrison
Keyword(s):  
Boundary Condition ◽  
Laser Ablation ◽  
Laser Energy ◽  
Scale Up ◽  
Boundary Region ◽  
Dynamics Simulation ◽  
Pressure Waves ◽  
Absorption Region ◽  
Organic Solids ◽  
Direct Laser

AbstractLaser ablation of organic solids is a complex collective phenomenon that includes processes occurring at different length and time scales. A mesoscopic breathing sphere model developed recently for molecular dynamics simulation of laser ablation and damage of organic solids has significantly expanded the length-scale (up to hundreds of nanometers) and the time-scale (up to nanoseconds) of the simulations. The laser induced buildup of a high pressure within the absorbing volume and generation of the pressure waves propagating from the absorption region poses an additional challenge for molecular-level simulation. A new dynamic boundary condition is developed to minimize the effects of the reflection of the wave from the boundary of the computational cell. The boundary condition accounts for the laser induced pressure wave propagation as well as the direct laser energy deposition in the boundary region.

Cu-Direct Laser Drilling of Blind Via-Hole in Multi-Layer PWBs: Influence of Surface Treatment on Drilled Hole Quality

2009 ◽  
Author(s):  
Toshiki Hirogaki ◽  
Eiichi Aoyama ◽  
Keiji Ogawa ◽  
Tsukasa Ayuzawa
Keyword(s):  
Surface Treatment ◽  
Co2 Laser ◽  
Copper Foil ◽  
Laser Energy ◽  
Copper Surface ◽  
Laser Drilling ◽  
Hole Quality ◽  
Direct Laser ◽  
Overhang Length ◽  
Direct Drilling

This report describes the quality assessment of Blind Via Holes (BVHs) of Printed Wiring Boards (PWBs) drilled by a CO2 laser using Cu-direct drilling. In the Cu-direct drilling method, the copper foil and the build-up layer are melted at the same time, and the surface is treated to increase the laser energy absorbed by the copper foil since an untreated copper surface reflects most of the 10.6-μm-wavelength CO2 laser beam. However, there are few reports dealing with Cu-direct laser drilling of PWBs. In addition, when copper and resin with different processing thresholds are drilled at the same time, occurrences of a defect called overhang have been observed. So, in this report, first we propose a new method using thermography to measure the absorptance of a PWB surface for a CO2 laser. Moreover, we investigate how surface treatment of the outer copper foil influences the quality of a laser-drilled hole. Then, we observe the circumference of a point irradiated with the CO2 laser and explain how melting processes are different from surface treatment. Finally, based on the research we establish a method in order to cut down the overhang length as a parameter of drilled-hole quality. We also show that a high absorptance improves BVH quality.

scholarly journals Preparation and Properties of Superconducting thin Films by Excimer Laser Ablation

1990 ◽  
Vol 191 ◽  
Author(s):  
Michael E. Geusic ◽  
Alan F. Stewart ◽  
Larry R. Pederson ◽  
William J. Weber ◽  
Kenneth R. Marken ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Excimer Laser ◽  
Laser Energy ◽  
Substrate Surface ◽  
Xrd Analysis ◽  
Zero Field ◽  
Superconducting Transition ◽  
X Ray Diffraction ◽  
Excimer Laser Ablation

ABSTRACTExcimer laser ablation with an in situ heat treatment was used to prepare high quality superconducting YBa2Cu3O7−x thin films on (100)-SrTiO3 and (100)-LaAlO3 substrates. A pulsed excimer laser (XeCl; 308 nm) was used to ablate a rotating, bulk YBa2Cu3O7−x target at a laser energy density of 2–3 J/cm2. Based on four-probe dc resistance measurements, the films exhibited superconducting transition temperatures (Tc, midpoint) of 88 and 87K with 2K (90–10%) transition widths for SrTiO3 and LaAlO3, respectively. Transport critical current densities (Jc) measured at 77K were 2 × 106 and 1 × 106 A/cm2 in zero field for SrTiO3 and LaAlO3, respectively. X-ray diffraction (XRD) analysis showed the films to be highly oriented, with the c-axis perpendicular to the substrate surface.

Excimer laser treatment of aluminum nitride

1993 ◽  
Author(s):  
Athena Tsetsekou ◽  
Th. Zampetakis ◽  
C. J. Stournaras ◽  
A. Patentalaki ◽  
Elias I. Hontzopoulos
Keyword(s):  
Aluminum Nitride ◽  
Laser Treatment ◽  
Excimer Laser

Computer Simulation of Pulsed Laser Ablation for YBaCuO Superconducting Films

1990 ◽  
Vol 191 ◽  
Author(s):  
Toshiyuki Nakamiya ◽  
Kenji Ebihara ◽  
P. K. John ◽  
B. Y. Tong
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Laser Energy ◽  
Pulsed Laser ◽  
The Finite Element Method ◽  
High Tc ◽  
One Dimensional ◽  
Incident Laser Energy ◽  
Krf Excimer Laser ◽  
Pulsed Laser Irradiation

ABSTRACTThe dynamics of melting and ablation of high Tc YBa2Cu3O7-x superconducting thin films flashed by a pulsed KrF excimer laser(λ=248nm) or a pulsed Nd-YAG laser (λ =1.06μ m) were studied numerically. The fundamental model during a pulsed laser irradiation was a one-dimensional heat conduction equation. The finite element method was applied to solve the equation including the temperature dependence of the thermal conductivity of YBaCuO thin films. In addition, the microstructure of YBa2Cu3O7-x bulk(l.5mm thick) flashed by a pulsed XeCl excimer laser (λ =308nm) was investigated by scanning electron microscopy (SEM) in order to estimate the threshold incident laser energy density for surface melting and ablation. The good agreements between the numerical calculations and the experimental results were obtained.

One-Step Fabrication and Functionalization of Nanostructured Silicon Surfaces for Advanced Sensing Applications

2020 ◽  
Vol 312 ◽  
pp. 154-159
Author(s):  
Alexander Yuryevich Mironenko ◽  
Mikhail Tutov ◽  
Alexander Konstantinovich Chepak ◽  
Eugeny Mitsai ◽  
Alexander A. Sergeev ◽  
...  
Keyword(s):  
Laser Processing ◽  
Laser Energy ◽  
High Spatial Frequency ◽  
Laser Pulses ◽  
Successful Implementation ◽  
Experimental Conditions ◽  
Sensing Applications ◽  
Direct Laser ◽  
Fs Laser ◽  
One Step

Direct laser processing of various materials with nano- and femtosecond (fs) laser pulses is known to be a facile and inexpensive technology for fabrication of various surface morphologies. Since ultrafast deposition of the laser energy to target material typically creates unique experimental conditions with extremely high pressure and temperature, we hypothesized that carrying out this process in anhydrous non-oxidizing environment containing functionalizing agent (fluorophore with vinyl functional group) will allow one-step fabrication and subsequent functionalization of the surface of high-n material. In this paper, we demonstrate successful implementation of this idea by fabricating high-spatial-frequency laser-induced periodic surface structures (LIPSS) via direct fs-pulse ablation of bulk crystalline Si wafer immersed in solution of N-vinylcarbazole in toluene. Laser processing with linearly polarized fs-laser pulses was found to produce LIPSS with a characteristic period around 100 nm functionalized with N-vinylcarbazole molecules via photo-activated hydrosililation reaction. The unique LIPSS with hierarchical roughness and remarkable light trapping performance functionalized with sensory fluorophore show high sensitivity due to implementation of surface enhanced fluorescence effect. By using N-vinylcarbazole as functionalizing agent we demonstrate one-step fabrication of high-performance sensor for detecting nitrobenzene in water with a detection limit of 40 nM.

scholarly journals Femtosecond Laser Fabrication of Engineered Functional Surfaces based on Biodegradable Polymer and Biopolymer/Ceramic Composite Thin Films

Polymers ◽  
2019 ◽  
Vol 11 (2) ◽  
pp. 378 ◽  
Author(s):  
Albena Daskalova ◽  
Irina Bliznakova ◽  
Liliya Angelova ◽  
Anton Trifonov ◽  
Heidi Declercq ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Femtosecond Laser ◽  
Surface Functionalization ◽  
Biodegradable Polymer ◽  
Photoelectron Spectroscopy ◽  
Laser Energy ◽  
Surface Characteristics ◽  
Laser Pulses ◽  
Xrd Analysis

Surface functionalization introduced by precisely-defined surface structures depended on the surface texture and quality. Laser treatment is an advanced, non-contact technique for improving the biomaterials surface characteristics. In this study, femtosecond laser modification was applied to fabricate diverse structures on biodegradable polymer thin films and their ceramic blends. The influences of key laser processing parameters like laser energy and a number of applied laser pulses (N) over laser-treated surfaces were investigated. The modification of surface roughness was determined by atomic force microscopy (AFM). The surface roughness (Rrms) increased from approximately 0.5 to nearly 3 µm. The roughness changed with increasing laser energy and a number of applied laser pulses (N). The induced morphologies with different laser parameters were compared via Scanning electron microscopy (SEM) and confocal microscopy analysis. The chemical composition of exposed surfaces was examined by FTIR, X-ray photoelectron spectroscopy (XPS), and XRD analysis. This work illustrates the capacity of the laser microstructuring method for surface functionalization with possible applications in improvement of cellular attachment and orientation. Cells exhibited an extended shape along laser-modified surface zones compared to non-structured areas and demonstrated parallel alignment to the created structures. We examined laser-material interaction, microstructural outgrowth, and surface-treatment effect. By comparing the experimental results, it can be summarized that considerable processing quality can be obtained with femtosecond laser structuring.

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