Effects of Fluorine Implantation into Hydrogenated Amorphous Silicon

1991 ◽  
Vol 235 ◽  
Author(s):  
S. P. Wong ◽  
Shaoqi Peng ◽  
Ning Ke ◽  
Jingxi Liu
Keyword(s):  
Amorphous Silicon ◽  
Spin Density ◽  
Hydrogenated Amorphous Silicon ◽  
Dark Conductivity ◽  
Fluorine Concentration ◽  
Electrical Measurements ◽  
Large Shift ◽  
Before And After ◽  
Order Of Magnitude ◽  
Hydrogenated Amorphous

ABSTRACTMultiple-energy implantation of fluorine into rf glow discharge deposited hydrogenated amorphous silicon (a-Si:H) thin films has been performed. It is found that the optical gap decreases with the implanted fluorine concentration CF from 1.56 eV for the unimplanted sample to 1.40 eV for the sample with CF of 3×1021 cm−3. Results of the Staebler-Wronski experiment show that the ratio between the electrical conductivity before and after illumination, as well as the ratio between the photo- and dark conductivity, decrease also with Cp. Electrical measurements show that there is significant decrease in the conductivity activation energy Ea with CF for samples annealed at or below the substrate temperature TS during deposition. But for samples annealed at temperatures higher than TS, Ea was found to change back to values close to that of the unimplanted sample. A large shift to higher energy for one peak in the photoluminescence spectra at 77K has been observed, from 1.34 eV of the unimplanted sample to around 1.6 eV for the implanted samples, though with almost one order of magnitude weakening in intensity. It is also observed that ESR splitting has been induced in the fluorine implanted samples. The g-factors of the two resonances are determined to be 2.003 and 2.006, respectively. For the g=2.006 resonance, the spin density increases markedly after implantation but is essentially independent on CF before annealing and effectively reduced or eliminated after annealing. For the g=2.003 resonance, the spin density increases rapidly with CFp especially in the range from CF = 1×1020 to 1×1021 cm−3 before annealing and reduces only slightly after annealing.

Stability of hydrogenated amorphous silicon prepared by reactive evaporation

1991 ◽  
Vol 69 (6) ◽  
pp. 679-683
Author(s):  
D. C. Craigen ◽  
R. D. Audas ◽  
D. E. Brodie
Keyword(s):  
Activation Energy ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Dark Conductivity ◽  
Time Curve ◽  
Switching Model ◽  
Order Of Magnitude ◽  
Reactive Gases ◽  
Staebler Wronski Effect ◽  
Hydrogenated Amorphous

Hydrogenated amorphous silicon (a-Si:H) was prepared by evaporating Si in a controlled ambient of reactive gases. Contamination of the samples by exposure to air affects both the dark conductivity and the photoconductivity. Some of the contamination effects can be removed by annealing, but some changes are not reversible. The irreversible changes are mainly due to the chemisorption of oxygen obtained from water vapour when the samples are stored in air. The Staebler–Wronski effect is observed in all samples whose photoconductivity is at least an order of magnitude higher than the dark conductivity. The photoconductivity versus time curve displays at t−1/3 dependence, typical of the Staebler–Wronski effect, but the degradation is much slower than that reported for glow discharge a-Si:H. The activation energy for the effect is 0.12 eV, which is larger than the 0.04 eV expected for the bond-switching model.

Local structures of Ga atoms in amorphous silicon and hydrogenated amorphous silicon before and after synchrotron x-ray irradiation

1999 ◽  
Vol 75 (21) ◽  
pp. 3282-3284 ◽  
Author(s):  
Kin Man Yu ◽  
W. Walukiewicz ◽  
S. Muto ◽  
H.-C. Jin ◽  
J. R. Abelson ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
X Ray ◽  
Local Structures ◽  
Before And After ◽  
Hydrogenated Amorphous

Improved Light Soaking Stability of R.F. Sputter Deposited Amorphous Silicon

1991 ◽  
Vol 219 ◽  
Author(s):  
A. Wynveen ◽  
J. Fan ◽  
J. Kakalios ◽  
J. Shinar
Keyword(s):  
Amorphous Silicon ◽  
Hydrogen Content ◽  
Defect Density ◽  
Hydrogenated Amorphous Silicon ◽  
Dark Conductivity ◽  
Initial Defect ◽  
Optical Gap ◽  
Sputter Deposited ◽  
Staebler Wronski Effect ◽  
Hydrogenated Amorphous

ABSTRACTStudies of r.f. sputter deposited hydrogenated amorphous silicon (a-Si:H) find that the light induced decrease in the dark conductivity and photoconductivity (the Staebler-Wronski effect) is reduced when the r.f. power used during deposition is increased. The slower Staebler-Wronski effect is not due to an increase in the initial defect density in the high r.f. power samples, but may result from either the lower hydrogen content or the smaller optical gap found in these films.

Defect States in Hydrogenated Amorphous Silicon-Sulphur Alloys by ESR and PAS

1991 ◽  
Vol 219 ◽  
Author(s):  
Gaorong Han ◽  
Jianmin Qiao ◽  
Piyi Du ◽  
Zhonghua Jiang ◽  
Zishang Ding
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Spin Density ◽  
Molecular Hydrogen ◽  
Annealing Temperature ◽  
Hydrogenated Amorphous Silicon ◽  
Sulphur Content ◽  
Defect States ◽  
Hydrogenated Amorphous

ABSTRACTWe have presented ESR and PAS measurements for a series of a-SiS:H and a-Si: H films deposited by glow discharge at different parameters. The spin density in a-SiS:H alloys measured by ESR is essentially independent of the sulphur content, while the density of defects measured by PAS increases significantly with the increasing of sulphur content. The ESR signals in a-SiS:H alloys strongly depend on both annealing and illumination. The spin density increases up to 540°C and then decreases with raising annealing temperature for a-SiS:H and a-Si:H alloys. The results suggest that some new defects such as molecular hydrogen and microvoids are appeared when addition of sulphur to a-Si:H films.

Boron doping in a-SiO:H,

2014 ◽  
Vol 92 (7/8) ◽  
pp. 586-588 ◽  
Author(s):  
Y. Kitani ◽  
T. Maeda ◽  
S. Kakimoto ◽  
K. Tanaka ◽  
R. Okumoto ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Hole Mobility ◽  
Boron Doping ◽  
Type A ◽  
Dark Conductivity ◽  
Wide Range ◽  
P Type ◽  
Hydrogenated Amorphous ◽  
Silicon Oxygen

Boron-doping characteristics in hydrogenated amorphous silicon–oxygen alloys (a-SiO:H) have been studied in contrast to those in hydrogenated amorphous silicon (a-Si:H). Although the boron-incorporation efficiency shows almost the same value between a-SiO:H and a-Si:H, p-type a-SiO:H (p-a-SiO:H) exhibits lower dark conductivity by one or two orders of magnitude as compared to p-type a-Si:H (p-a-Si:H) in a wide range of doping levels. We have found that p-a-SiO:H exhibits low dark conductivity as compared to p-a-Si:H even when we choose samples showing the same activation energy from a variety of as-deposited and thermally annealed samples. We have concluded from the different Urbach-energy values between high quality intrinsic a-SiO:H and a-Si:H that the origin of low dark conductivity in p-a-SiO:H is due to low hole mobility.

Effect of stress on the aluminum-induced crystallization of hydrogenated amorphous silicon films

2006 ◽  
Vol 21 (10) ◽  
pp. 2582-2586 ◽  
Author(s):  
Maruf Hossain ◽  
Husam H. Abu-Safe ◽  
Hameed Naseem ◽  
William D. Brown
Keyword(s):  
Amorphous Silicon ◽  
Initial Stress ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Radius Of Curvature ◽  
Si Substrates ◽  
Before And After ◽  
Hydrogenated Amorphous ◽  
Induced Crystallization ◽  
Aluminum Induced Crystallization

The effect of stress, resulting from the presence of hydrogen, on the aluminum-induced crystallization of hydrogenated amorphous silicon films was studied. Layered thin films of hydrogenated and unhydrogenated amorphous silicon and aluminum, deposited by sputtering, were used to study this effect. The stress of the deposited films was determined by measuring the radius of curvature of c-Si substrates before and after deposition of the films. It was observed that unhydrogenated amorphous silicon films exhibit a high compressive stress compared with hydrogenated ones. The amount of stress is shown to decrease with increasing hydrogen content. It was also observed that aluminum always provides tensile stress. After the initial stress measurements, all the samples were annealed for 30 min at temperatures between 200 °C and 400 °C. X-ray diffraction was used to determine the crystallinity of the silicon films. The results of the study show that the temperature at which crystallization of amorphous silicon is initiated is lower for films with a lower initial stress.

Stability Studies of Hydrogenated Amorphous Silicon Alloy Solar Cells Prepared with Hydrogen Dilution

1994 ◽  
Vol 336 ◽  
Author(s):  
J. Yang ◽  
X. Xu ◽  
S. Guha
Keyword(s):  
Solar Cells ◽  
Amorphous Silicon ◽  
Deposition Temperature ◽  
Hydrogenated Amorphous Silicon ◽  
Open Circuit ◽  
Solar Cell Performance ◽  
Silicon Alloy ◽  
Before And After ◽  
Photovoltaic Characteristics ◽  
Hydrogenated Amorphous

ABSTRACTWe have fabricated hydrogenated amorphous silicon alloy solar cells using hydrogen dilutions at 175 °C and 300 °C, and obtained improved photovoltaic characteristics in both the initial and degraded states for the highly diluted cells; both the fill factor and the open-circuit voltage exhibit higher values before and after light soaking. Infrared analyses reveal that for a given deposition temperature the amount of bonded hydrogen has similar concentrations between the high and low hydrogen diluted samples. Optical Modelling shows a 20 MeV difference in their optical bandgap. Defect densities obtained from constant photocurrent measurements give similar values for a given deposition temperature both before and after light soaking, inconsistent with solar cell performance.

Hydrogenated Amorphous Silicon Alloys Prepared by CVD of Higher Silanes

1986 ◽  
Vol 70 ◽  
Author(s):  
Masud Akhtar ◽  
Herbert A. Weaklie
Keyword(s):  
Amorphous Silicon ◽  
Band Gap ◽  
Plasma Deposition ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
Wide Band ◽  
Dark Conductivity ◽  
Attractive Alternative ◽  
Silicon Alloys ◽  
Hydrogenated Amorphous

ABSTRACTHydrogenated amorphous silicon may be deposited at relatively low temperatures, where the density of defects may be expected to be low, by the chemical vapor deposition (CVD) of higher silanes. This method is an attractive alternative to plasma deposition techniques. We describe here the preparation of a-Si:H and related alloys incorporating carbon, germanium, and fluorine. a-Si:H films were deposited on heated substrates in the range 365°C-445°C by CVD of Si2H6 and Si3H8. The optical gap (Eg) ranged from 1.4 to 1.7 eV and the properties of films deposited from either Si2 H6 or Si3 H8 were quite similar. Wide band gap (Eg=2 eV) alloys of a-SiC:H doped with boron were prepared by CVD of disilane, methyl silane, and diborane. We also prepared variable band gap a-SiC:H alloys by substituting F2C= CFH for methylsilane, and these films were found to have approximately 1–2% fluorine incorporated. The dark conductivity of the boron doped a-SiC:H alloys dep~sited from either carbon source ranged from ix10-7 to 6x10-7 (ohm-cm)-1. We also prepared low band aap alloys of Si and Ge by CVD of trisilane and germane. The band gap of a film containing 20% Ge was 1.5 eV; however, the photoconductivity of the film was relatively low.

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