The Effect of Line Geometry on Void Growth in Thin, Narrow Aluminum Lines
ABSTRACTThe stress induced growth of individual voids in passivated Al-lines at room temperature was monitored in-situ, without removing the passivation. The kinetics was strongly influenced by variations in line geometry, even over distances of many μm, indicating variations in the stress relaxation as well.
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1994 ◽
Vol 52
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pp. 42-43
1996 ◽
Vol 54
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pp. 32-33
2020 ◽
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