The Role of Carbon in Amorphous Silicon Nip Photodiode Sensors
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ABSTRACTWe have been investigating the dark current and quantum efficiency of nip and pin photodiodes for document scanning applications. Alloying the top doped layer with carbon or making it microcrystalline was found to enhance the spectral response without causing significant deleterious effects to dark current. We also observed lower dark currents in both pin and nip(μc-Si:C:H) sensors compared to nip(a-Si:C:H) sensors, which we attribute to a more graded p-i interface in the former devices.
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2007 ◽
Vol 556-557
◽
pp. 953-956