Structural and Elastic Properties of HF/ZR Multilayer Thin Films
Keyword(s):
X Ray
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AbstractWe have investigated structural and elastic properties of Hf/Zr multilayer thin films by x-ray diffraction and transient piezoreflectance measurements. Similar structural and elastic behaviors have been observed in two series of samples grown at different deposition rates (1 – 10Å/sec). Our measurements suggest different (˜ 10%) effective elastic constants between multilayers with coherent and incoherent interfaces.
1996 ◽
Vol 54
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pp. 1020-1021