High Resolution Study of CoSi2/Si (111) Interfaces
Keyword(s):
AbstractThe atomic structure of A- and B-type CoSi2/Si (111) interfaces has been investigated by observations of samples in cross-section using a 400 kV high-resolution electron microscope. The samples were prepared by UHV e–beam evaporation of Co layers followed by annealing at temperatures between 300°C and 500°C. Based upon image simulations for various interface bonding models we have found evidence for 7–fold Co coordination at the A–type CoSi2/Si interfaces and for 7– and 8–fold coordination at the B-type interfaces.
1991 ◽
Vol 49
◽
pp. 696-697
1973 ◽
Vol 31
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pp. 486-487
1990 ◽
Vol 48
(1)
◽
pp. 532-533
1991 ◽
pp. 847-852