High Performance Polysilicon Thin Film Transistors

1990 ◽  
Vol 182 ◽  
Author(s):  
U. Mitra ◽  
B.A. Khan ◽  
M. Venkatesan ◽  
A. Carlson ◽  
M. Vaez-Iravani
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Thin Film Transistors ◽  
High Performance ◽  
Fabrication Process ◽  
Subthreshold Slope ◽  
Polysilicon Film ◽  
Polysilicon Tft ◽  
Plasma Hydrogenation

AbstractPolysilicon TFT characteristics are shown to be dependent on the nature of the polysilicon film used as well as the TFT fabrication process. Best results were obtained when silicon self-implant and regrowth techniques were used together with plasma hydrogenation. TFTs exhibiting a mobility of 115 cm2/V-sec, subthreshold slope of 0.27 V/decade, leakage current below 0.01 pA/μ;m, and an on-off ratio of 10 orders of magnitude have been fabricated.

High performance polysilicon thin film transistors by H2O plasma hydrogenation

1997 ◽  
Vol 305 (1-2) ◽  
pp. 327-329 ◽  
Author(s):  
Kan Yuan Lee ◽  
Yean Kuen Fang ◽  
Chii Wen Chen ◽  
Mong Song Liang ◽  
Sou Gow Wuu
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Performance ◽  
Plasma Hydrogenation

Polysilicon Thin Film Transistors with Cobalt amd Nickel Silicide Source and Drain Contacts

1996 ◽  
Vol 424 ◽  
Author(s):  
G. T. Sarcona ◽  
M. K. Hatalis
Keyword(s):  
Thin Film ◽  
Contact Resistance ◽  
Sheet Resistance ◽  
Leakage Current ◽  
Thin Film Transistors ◽  
Nickel Silicide ◽  
Polysilicon Films ◽  
Polysilicon Tft ◽  
Extrinsic Resistance ◽  
Cobalt And Nickel

AbstractPolysilicon n-type thin film transistors have been fabricated with self-aligned cobalt and nickel silicide contacts to the source and drain regions. The sheet resistance of the source and drain without silicide is above 200 Ω/‪. The cobalt and nickel silicide films have sheet resistance below 30 Ω/‪. The contact resistance of the silicided devices is also much lower. The reduced extrinsic resistance is shown to improve the current in the “on” state, without increasing the leakage current. This study includes examination of cobalt and nickel silicidation on thin polysilicon films at temperatures compatible with polysilicon TFT-LCD processes.

A Proposal of High Performance Organic Thin Film Transistors

2010 ◽  
Vol 130 (2) ◽  
pp. 161-166
Author(s):  
Yoshinori Ishikawa ◽  
Yasuo Wada ◽  
Toru Toyabe ◽  
Ken Tsutsui
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Performance ◽  
Organic Thin Film Transistors ◽  
Organic Thin Film

Organic Electronics

2020 ◽  
Author(s):  
Stephen R. Forrest
Keyword(s):  
Thin Film ◽  
Organic Electronics ◽  
Thin Film Transistors ◽  
High Performance ◽  
Electronic Devices ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Organic Thin Film ◽  
Graduate Studies ◽  
Organic Light

Organic electronics is a platform for very low cost and high performance optoelectronic and electronic devices that cover large areas, are lightweight, and can be both flexible and conformable to irregularly shaped surfaces such as foldable smart phones. Organics are at the core of the global organic light emitting device (OLED) display industry, and also having use in efficient lighting sources, solar cells, and thin film transistors useful in medical and a range of other sensing, memory and logic applications. This book introduces the theoretical foundations and practical realization of devices in organic electronics. It is a product of both one and two semester courses that have been taught over a period of more than two decades. The target audiences are students at all levels of graduate studies, highly motivated senior undergraduates, and practicing engineers and scientists. The book is divided into two sections. Part I, Foundations, lays down the fundamental principles of the field of organic electronics. It is assumed that the reader has an elementary knowledge of quantum mechanics, and electricity and magnetism. Background knowledge of organic chemistry is not required. Part II, Applications, focuses on organic electronic devices. It begins with a discussion of organic thin film deposition and patterning, followed by chapters on organic light emitters, detectors, and thin film transistors. The last chapter describes several devices and phenomena that are not covered in the previous chapters, since they lie outside of the current mainstream of the field, but are nevertheless important.

scholarly journals High-performance organic semiconductors for thin-film transistors based on 2,7-divinyl[1]benzothieno[3,2-b]benzothiophene

2008 ◽  
Vol 18 (39) ◽  
pp. 4698 ◽  
Author(s):  
Myoung-Chul Um ◽  
Jeonghun Kwak ◽  
Jung-Pyo Hong ◽  
Jihoon Kang ◽  
Do Yeung Yoon ◽  
...  
Keyword(s):  
Thin Film ◽  
Organic Semiconductors ◽  
Thin Film Transistors ◽  
High Performance
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