scholarly journals Inorganic-Organic Composites (Ormocers) as Structured Layers for Microelectronics

1990 ◽  
Vol 180 ◽  
Author(s):  
Michael Popall ◽  
Henning Meyer ◽  
Helmut Schmidt ◽  
Jochen Schulz

ABSTRACTEnhanced integration, faster signal transmission and reduced size of mounting devices in components for microelectronics requires new patternable materials. Inorganic-organic copolymers (ORMOCERs = ORganically MOdified CERamics), prepared by sol-gel techniques have been developed for interconnection technologies in microelectronics. Photopolymerization is enabled by unsaturated hydrocarbon or epoxide substituents and UV-sensitive initiators. Using a frequency doubled Argonion laser at 257 nm for direct laser writing, patterned layers with high edge quality have been realized. In combination with high breakthrough voltages, low permittivity constants and high bulk resistivities they open interesting aspects for very large system integration techniques (VLSI).

1992 ◽  
Vol 264 ◽  
Author(s):  
Michael Popall ◽  
Jürgen Kappel ◽  
Monika Pilz ◽  
Jochen Schulz

AbstractNew inorganic-organic copolymers (ORMOCERs – ORganically MOdified CERamics) were developed as protective coatings for electronic and optical devices, as patternable insulation and passivation layers for electronics, e. g. MCM's, and as possible interconnects and waveguides for micro optics.Depending on the chemical composition and the processing parameters, their important features are low permittivity constants (eR ≤ 3.2), high bulk resistance (RD > 1016 Ωcm), high dielectric strength (ED ≤ 400 V/μm), refractive index around 1.48, optical transparency in the range of 400 – 1300 nm, and good adhesion to numerous substrates, such as Al2O3, glass, silicon, copper, aluminum, steel, polyimides, polyesters and epoxides.The materials can be applied using standard technology. They are patterned by laser direct writing, photolithographic, screen printing or embossing technologies.


Author(s):  
R. T. Chen ◽  
R.A. Norwood

Sol-gel processing has been used to control the structure of a material on a nanometer scale in preparing advanced ceramics and glasses. Film coating using the sol-gel process was also found to be a viable process technology in applications such as optical, porous, antireflection and hard coatings. In this study, organically modified silicate (Ormosil) coatings are applied to PET films for various industrial applications. Sol-gel materials are known to exhibit nanometer scale structures which havepreviously been characterized by small-angle X-ray scattering (SAXS), neutron scattering and light scattering. Imaging of the ultrafine sol-gel structures has also been performed using an ultrahigh resolution replica/TEM technique. The objective of this study was to evaluate the ultrafine structures inthe sol gel coatings using a direct imaging technique: atomic force microscopy (AFM). In addition, correlation of microstructures with processing parameters, coating density and other physical properties will be discussed.The materials evaluated are organically modified silicate coatings on PET film substrates. Refractive index measurement by the prism coupling method was used to assess density of the sol-gel coating.AFM imaging was performed on a Nanoscope III AFM (by Digital Instruments) using constant force mode. Solgel coating samples coated with a thin layer of Ft (by ion beam sputtering) were also examined by STM in order to confirm the structures observed in the contact type AFM. In addition, to compare the previous results, sol-gel powder samples were also prepared by ultrasonication followed by Pt/Au shadowing and examined using a JEOL 100CX TEM.


2021 ◽  
Vol 73 (1) ◽  
Author(s):  
Chunyu Ding ◽  
Zhiyong Xiao ◽  
Yan Su

AbstractIn the radargram obtained by the high-frequency lunar penetrating radar onboard the Chang’E-3 mission, we notice a potential subsurface cavity that has a smaller permittivity compared to the surrounding materials. The two-way travel time between the top and bottom boundaries of the potential cavity is ~ 21 ns, and the entire zone is located within the continuous ejecta deposits of the Ziwei crater, which generally have similar physical properties to typical lunar regolith. We carried out numerical simulations for electromagnetic wave propagation to investigate the nature of this low-permittivity zone. Assuming different shapes for this zone, a comprehensive comparison between our model results and the observed radargram suggests that the roof of this zone is convex and slightly inclined to the south. Modeling subsurface materials with different relative permittivities suggests that the low-permittivity zone is most likely formed due to a subsurface cavity. The maximum vertical dimension of this potential cavity is ~ 3.1 m. While the continuous ejecta deposits of Ziwei crater are largely composed of pre-impact regolith, competent mare basalts were also excavated, which is evident by the abundant meter-scale boulders on the wall and rim of Ziwei crater. We infer that the subsurface cavity is supported by excavated large boulders, which were stacked during the energetic emplacement of the continuous ejecta deposits. However, the exact geometry of this cavity (e.g., the width) cannot be constrained using the single two-dimensional radar profile. This discovery indicates that large voids formed during the emplacement of impact ejecta should be abundant on the Moon, which contributes to the high bulk porosity of the lunar shallow crust, as discovered by the GRAIL mission. Our results further suggest that ground penetrating radar is capable of detecting and deciphering subsurface cavities such as lava tubes, which can be applied in future lunar and deep space explorations.


2007 ◽  
Vol 330-332 ◽  
pp. 1177-1180 ◽  
Author(s):  
Kanji Tsuru ◽  
Satoshi Hayakawa ◽  
Yuki Shirosaki ◽  
T. Okayama ◽  
K. Kataoka ◽  
...  

Porous & rubbery organic-inorganic hybrids were synthesized from tetraethoxysilane (TEOS) and polydimethylsiloxane (PDMS) through a sol-gel route using sieved sucrose granules as a porogen. The porous hybrids with a high content of PDMS behaved like polymer sponge. The porosity was over 90% irrespective of the hybrid composition and the pore diameter ranged from 100 to 500 μm. In the three-dimensional cell culture, mammalian cells were well cultured in the porous hybrids. The present results indicate that the hybrids may be a promising scaffold for developing such functional culture methods.


2019 ◽  
Author(s):  
Ασημίνα-Ελένη Καμπουράκη

Η απευθείας εγγραφή με λέιζερ μέσω του πολυφωτονικού πολυμερισμού αποτελεί την μοναδική τεχνική κατασκευής τρισδιάστατων μίκρο- και νάνο- δομών. Στην απευθείας εγγραφή με λέιζερ, η δέσμη ενός λέιζερ υπερταχέων παλμών εστιάζετε στον όγκο ενός φωτοευαίσθητου υλικού, εκκινώντας μία διαδικασία πολυφωτονικού πολυμερισμού, αποκλειστικά στην περιοχή εστίασης της δέσμης. Μετακινώντας την δέσμη στις τρείς διαστάσεις, δίνεται η δυνατότητα της κατασκευής τρισδιάστατων δομών μεγάλης ακρίβειας. Τα υλικά που αναπτύχθηκαν σε αυτήν τη εργασία είναι φωτοδομήσιμα υβριδικά υλικά τα οποία συντέθηκαν με την τεχνική sol-gel. Σε αυτήν την εργασία, παρουσιάζουμε για πρώτη φορά την κατασκευή τρισδιάστατων δομών με την χρήση του πολυφωτονικού πολυμερισμού χωρίς την χρήση φωτοεκκινητη. Η διαδικασία αυτή βασίζεται στην σύνθεση ενός καινοτόμου υβριδικού υλικού που περιέχει ένα αλκοξείδιο του βαναδίου, το οποίο παράγει ελεύθερες ρίζες μέσω μίας οξειδοαναγωγικής αντίδρασης η οποία εκκινείται με φώς. Στο δεύτερο μέρος της εργασίας, υβριδικά οργανικά-ανόργανα υλικά τροποποιήθηκαν με την προσθήκη ενός μορίου που δρα ως πρόδρομο μόριο δημιουργίας κβαντικών τελειών. Το μόριο αυτό προσδένεται χημικά στην οργανική μήτρα των τρισδιάστατων δομών κατά την διαδικασία του πολυφωτονικού πολυμερισμού. Στην συνέχεια οι τρισδιάστατες δομές βυθίζονται σε ένα διάλυμα Na2S (θειούχου νατρίου) οπού δημιουργούνται κβαντικές τελείες CdS (θειούχου καδμίου). Στο τελευταίο τμήμα της παρούσας εργασίας, συντέθηκαν κβαντικές τελείες CdSe-CdS. Ακολουθώντας χημική επεξεργασία της επιφανείας τους, προστέθηκαν λειτουργικές ομάδες οι οποίες οδήγησαν στην ομοιοπολική σύνδεση των κβαντικών τελειών με την επιφάνεια των τρισδιάστατων δομών. Στην συνέχεια κατασκευάστηκαν τρισδιάστατες δομές φωτονικών κρυστάλλων με περίοδο 550 nm με την μέθοδο του πολυφωτονικού πολυμερισμού. Στην συνέχεια η επιφάνεια των τρισδιάστατων δομών καλύφθηκε με τις κβαντικές τελείες δημιουργώντας μια συσκευή που μπορεί να δράσει σαν λέιζερ φωτονικού κρυστάλλου.


Polymers ◽  
2021 ◽  
Vol 13 (22) ◽  
pp. 4006
Author(s):  
Qinlong Wang ◽  
Hao Wang ◽  
Caixia Zhang ◽  
Qilong Zhang ◽  
Hui Yang

High-frequency communication equipment urgently needs substrate materials with lower dielectric loss, better heat dissipation, and higher stability, to ensure real-time low-loss and high-speed signal transmission. The core-shell structure of Sr2CeO4@SiO2 was prepared by the sol-gel method, and the modified powders with different volume contents were introduced into the cyclic olefin copolymer (COC) to prepare hydrocarbon resin-based composites. Due to the protective effect of the SiO2 shell, the stability of the powders is significantly improved, and the moisture barrier and corrosion resistance of the composites are enhanced, which is conducive to the normal operation of electronic equipment in harsh and complex environments. When the filler content is 20 vol%, the composite has a dielectric loss of 0.0023 at 10 GHz, a dielectric constant of 3.5, a thermal conductivity of 0.9 W·m−1·K−1, a water absorption of 0.32% and a coefficient of thermal expansion of 37.7 ppm/℃. The COC/Sr2CeO4@SiO2 composites exhibit excellent dielectric properties and thermal conductivity, while maintaining good moisture resistance and dimensional stability, which shows potential application prospects in the field of high-frequency substrates.


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