Laser Chemical Etching of Conducting and Semiconducting Materials

1982 ◽  
Vol 17 ◽  
Author(s):  
T. J. Chuang
Keyword(s):  
Material Processing ◽  
Laser Radiation ◽  
Reaction Mechanisms ◽  
Chemical Etching ◽  
Surface Reaction ◽  
Semiconducting Materials ◽  
Laser Method ◽  
Experimental Approaches ◽  
Product Species ◽  
Insight Into

ABSTRACTThe purpose of the paper is to examine the basic processes involved in the laser-enhanced chemical etching of solids. Specifically, the process of chemisorption, the reaction between the adsorbate and substrate atoms and the vaporization of product species affected by the laser radiation are discussed. It is shown that the laser method can provide important insight into the gas-surface reaction mechanisms. In addition, a number of examples are given to demonstrate the potential of the technique for applications to material processing. Some current studies on the laser-induced chemical etching of materials relevant to microelectronics are reviewed. Certain practical experimental approaches are also considered.

Surface Reaction Mechanisms Governing the Selective Area Growth of III-V Compound Semiconductors by Chemical Beam Epitaxy

1992 ◽  
Vol 282 ◽  
Author(s):  
G J Davies ◽  
P J Skevington ◽  
C L Levoguer ◽  
C L French ◽  
J S Foord
Keyword(s):  
Reaction Mechanisms ◽  
Surface Reaction ◽  
Sticking Probability ◽  
Chemical Beam Epitaxy ◽  
Adsorbed Species ◽  
Selective Area Epitaxy ◽  
Selective Area ◽  
Adsorbed Phase ◽  
Underlying Mechanisms ◽  
Insight Into

ABSTRACTPrevious studies have helped elucidate the underlying mechanisms for selective area epitaxy in chemical beam epitaxy by investigating the reactions of triethylgallium (TEG) on a silicon nitride surface. However no explanation was produced as to why selective growth is lost at low temperatures or high Gp V beam fluxes. This question is addressed in this paper which examines the interaction between TEG and As2 on the silicon nitridesurface. In the absence of arsenic, TEG adsorbs with a low sticking probability on the dielectric. Adsorbed species mainly desorb rather than decompose, and any Ga produced on the surface becomes converted to a nitride form; no free Ga is produced hence GaAs growth cannot occur. Arsenic is found to form a weakly adsorbed phase on the nitride surface. Reaction with co-adsorbed TEG results in the formation of GaAs. Adsorbed As also is efficient in increasing the reactive sticking probability of TEG.The results provide further insight into the reaction mechanisms governing selected area epitaxy.

The emerging molecular structure of the nitrogen cycle: an introduction to the proceedings of the 10th annual N-cycle meeting

2005 ◽  
Vol 33 (1) ◽  
pp. 113-118 ◽  
Author(s):  
C.S. Butler ◽  
D.J. Richardson
Keyword(s):  
Structural Biology ◽  
Nitrogen Cycle ◽  
Reaction Mechanisms ◽  
Spectroscopic Analysis ◽  
Three Dimensional ◽  
Chemical Transformations ◽  
Redox Active ◽  
Active Metal ◽  
Insight Into ◽  
Redox Active Metal

Over the last 10 years, during the lifetime of the nitrogen cycle meetings, structural biology, coupled with spectroscopy, has had a major impact of our understanding enzymology of the nitrogen cycle. The three-dimensional structures for many of the key enzymes have now been resolved and have provided a wealth of information regarding the architecture of redox active metal sites, as well as revealing novel structural folds. Coupled with structure-based spectroscopic analysis, this has led to new insight into the reaction mechanisms of the diverse chemical transformations that together cycle nitrogen in the biosphere. An overview of the some of the key developments in field over the last decade is presented.

Community standards of deception: Deception is perceived to be ethical when it prevents unnecessary harm

2021 ◽  
Author(s):  
Emma Levine
Keyword(s):  
Everyday Life ◽  
Causal Effect ◽  
Future Research ◽  
Implicit Rule ◽  
Experimental Approaches ◽  
Community Standards ◽  
Everyday Communication ◽  
Insight Into ◽  
The Way

We frequently claim that lying is wrong, despite modeling that it is often right. The present research sheds light on this tension by unearthing systematic cases in which people believe lying is ethical in everyday communication and by proposing and testing a theory to explain these cases. Using both inductive and experimental approaches, I find that deception is perceived to be ethical, and individuals want to be deceived, when deception is perceived to prevent unnecessary harm. I identify eight implicit rules – pertaining to the targets of deception and the topic and timing of a conversation – that clarify systematic circumstances in which deception is perceived to prevent unnecessary harm, and I document the causal effect of each implicit rule on the endorsement of deception. I also explore how perceptions of unnecessary harm influence communicators’ use of deception in everyday life, above and beyond other moral concerns. This research provides insight into when and why people value honesty and paves the way for future research on when and why people embrace deception.

scholarly journals Arenium cation or radical cation? An insight into the cyclodehydrogenation reaction of 2-substituted binaphthyls mediated by Lewis acids

RSC Advances ◽  
2020 ◽  
Vol 10 (37) ◽  
pp. 21974-21985
Author(s):  
Patricia Camargo Solórzano ◽  
María T. Baumgartner ◽  
Marcelo Puiatti ◽  
Liliana B. Jimenez
Keyword(s):  
Radical Cation ◽  
Lewis Acid ◽  
Reaction Mechanisms ◽  
Lewis Acids ◽  
Acid Synthesis ◽  
Theoretical Studies ◽  
Insight Into

Cyclodehydrogenation reactions of 2-substituted binaphthyls induced by a Lewis acid. Synthesis and theoretical studies of the reaction mechanisms.

Plasma-chemical promotion of catalysis for CH4 dry reforming: unveiling plasma-enabled reaction mechanisms

2020 ◽  
Vol 22 (34) ◽  
pp. 19349-19358
Author(s):  
Zunrong Sheng ◽  
Hyun-Ha Kim ◽  
Shuiliang Yao ◽  
Tomohiro Nozaki
Keyword(s):  
Reaction Mechanisms ◽  
Surface Reaction ◽  
Dry Reforming ◽  
Adsorbed Oxygen ◽  
Oxygen Species ◽  
Plasma Chemical ◽  
Vibrationally Excited ◽  
Adsorbed Oxygen Species ◽  
Carbonate Species

Abundant carbonate species are generated over lanthanum by vibrationally excited CO2, which increase adsorbed oxygen species fixation for surface reaction.

scholarly journals Material processing with pulsed radially and azimuthally polarized laser radiation

2006 ◽  
Vol 86 (3) ◽  
pp. 329-334 ◽  
Author(s):  
M. Meier ◽  
V. Romano ◽  
T. Feurer
Keyword(s):  
Material Processing ◽  
Laser Radiation
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