Deposition and Characterization of Carbon Films Produced by Nitrogen/Argon Mixture RF Sputtering

1989 ◽  
Vol 162 ◽  
Author(s):  
C. J. Tomg ◽  
T. Yeh ◽  
J. M. Sivertsen ◽  
J. H. Judy
Keyword(s):  
Partial Pressure ◽  
Energy Gap ◽  
Rf Sputtering ◽  
Argon Plasma ◽  
Nitrogen Plasma ◽  
Carbon Films ◽  
Nitrogen Partial Pressure ◽  
Optical Energy Gap ◽  
Thin Carbon ◽  
Argon Mixture

ABSTRACTThin carbon films were prepared by RF diode sputtering of a graphite target in a mixed nitrogen/argon plasma. A series of carbon films were deposited as a function of nitrogen partial pressure. We have observed a systematic variation of the properties of the carbon films with an increase of the nitrogen partial pressure. AES, XPS and energy gap studies showed that nitrogen will enhance the diamond sp3 bonding. Consistent with this the optical energy gap of our C:N films shows an increase from 1.1 eV to 1.4 eV using, respectively, 25 to 100 % nitrogen plasma. The mechanical properties also are shown to be enhanced for certain applications.

Structure and bonding studies of the C:N thin films produced by rf sputtering method

1990 ◽  
Vol 5 (11) ◽  
pp. 2490-2496 ◽  
Author(s):  
C. J. Torng ◽  
J. M. Sivertsen ◽  
J. H. Judy ◽  
C. Chang
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Partial Pressure ◽  
Energy Gap ◽  
Rf Sputtering ◽  
Nitrogen Plasma ◽  
Systematic Variation ◽  
Nitrogen Partial Pressure ◽  
Graphite Target ◽  
Structure And Bonding

Thin C:N films were prepared by rf diode sputtering of a graphite target in a mixed argon/nitrogen plasma. We have observed a systematic variation of the properties of these C:N films with an increase in the nitrogen partial pressure. XPS, AES, and TEM studies show that nitrogen will stabilize the diamond sp3 bonding. From XPS studies, we found that the density of our C:N films is increased from 1.37 × 1023 atoms/cm3 to 1.63 × 1023 atoms/cm3 using a 100% nitrogen plasma. The energy gap of our nitrogen carbon also shows an increase from 1.1 eV to 1.4 eV using a 100% nitrogen plasma. The mechanical properties also are shown to be enhanced for certain applications. By using the same method, we can also show that it can produce 100% amorphous C:N films which are more diamond-like as compared with other methods.

A Comparative Study of Hydrogenated Amorphous Silicon Films Prepared by RF Sputtering in He/H2, Ar/H2 and Xe/H2 Mixtures

1986 ◽  
Vol 70 ◽  
Author(s):  
Mark L. Albers ◽  
H. R. Shanks ◽  
J. Shinar
Keyword(s):  
Comparative Study ◽  
Energy Gap ◽  
Rf Sputtering ◽  
Dangling Bond ◽  
Rf Power ◽  
Optical Energy Gap ◽  
Sputtered Films ◽  
Optical Gap ◽  
Hydrogenated Amorphous ◽  
Spin Densities

ABSTRACTPreliminary results of a comparative study of some optical and ESR properties of aSi:H films prepared by rf sputtering on a cold substrate in 10 mtorr of either He, Ar, or Xe and 0.5 mtorr H2 are presented. In all cases the concentration of Si-H and Si-H2 bonds, the optical gap and the dangling bond spin density all generally increase as the rf power is decreased from 3.3 to 0.27 W/cm2. However, whereas the optical energy gap of He/H2 sputtered films ranges from 1.26 eV to 2.13 eV, the gap of Ar/H2 and Xe/H2 films sputtered under these conditions only changes from 1.54 to 1.94 and 1.41 to 1.71 eV, respectively. The dangling bond spin densities are lowest (~1017 cm-3) in the Ar/H2 sputtered films at high rf power and highest (~5x1018 cm-3) in Xe/H2 sputtered films at low power.

Spectroscopic characterization of annealed Si1−xCx films synthesized by ion implantation

1996 ◽  
Vol 11 (9) ◽  
pp. 2269-2273 ◽  
Author(s):  
G. Compagnini ◽  
L. Calcagno ◽  
G. Foti ◽  
G. Baratta
Keyword(s):  
Energy Gap ◽  
Stoichiometric Composition ◽  
Fundamental Absorption Edge ◽  
Spectroscopic Characterization ◽  
Carbon Films ◽  
Optical Energy Gap ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon ◽  
Silicon Carbon ◽  
Carbon Excess

Amorphous hydrogenated silicon carbon alloys were synthesized by C2H2 ions implantation in a silicon substrate at different fluences to obtain samples with different carbon atomic concentrations (10−50 at. %). As-implanted and subsequently annealed samples were investigated by using Rutherford backscattering, infrared, and Raman spectroscopies in order to follow the crystallization process. It was found that crystallization of stoichiometric SiC phase starts at 1000 °C both in low and high containing carbon films, while at the stoichiometric composition silicon (or carbon) was found to clusterize into homonuclear islands even at lower temperatures. The analysis of the fundamental absorption edge reveals the presence of an optical energy gap of about 1.3 eV independently on the film composition in the as-implanted samples, while after the thermal process at 1000 °C it increases to 2 eV for a carbon concentration below 0.5 and up to 1.8 eV for all those samples with a carbon excess.

The Effects of Deposition Pressure on the Optical and Structural Properties of d.c. PECVD Hydrogenated Amorphous Carbon Films

2006 ◽  
Vol 517 ◽  
pp. 81-84
Author(s):  
Rozidawati Awang ◽  
Goh Boon Tong ◽  
Siti Meriam Ab. Gani ◽  
Richard Ritikos ◽  
Saadah Abdul Rahman
Keyword(s):  
Thin Films ◽  
Deposition Rate ◽  
Amorphous Carbon ◽  
Energy Gap ◽  
Chemical Vapour ◽  
Carbon Films ◽  
Deposition Pressure ◽  
Optical Energy Gap ◽  
Hydrogenated Amorphous Carbon ◽  
Hydrogenated Amorphous

A direct-current plasma enhanced chemical vapour deposition (PECVD) system was designed and built in-house for the deposition of hydrogenated amorphous carbon(a-C:H) thin films. In this work, a-C:H thin films prepared using this system at different deposition pressures were studied. The influence of deposition pressure on the deposition rate, energy gap, bonded hydrogen content and structure of the film has been investigated. The characterization techniques were determined from optical transmission spectroscopy, Fourier transform infrared spectroscopy and Xray diffraction measurements. The results demonstrated that the deposition pressure had strong influence on the deposition rate, optical energy gap and the bonded H content in the film. Evidence of crystallinity was observed in films prepared at low deposition pressure.

Object Wave Determination by Single-Sideband Methods

1973 ◽  
Vol 31 ◽  
pp. 266-267
Author(s):  
Kenneth H. Downing ◽  
Benjamin M. Siegel
Keyword(s):  
Phase Shift ◽  
Carbon Films ◽  
Object Wave ◽  
Electron Wave ◽  
Phase Object ◽  
Heavy Atoms ◽  
Single Sideband ◽  
Thin Carbon ◽  
Additional Phase Shift ◽  
Additional Phase

Under the “weak phase object” approximation, the component of the electron wave scattered by an object is phase shifted by π/2 with respect to the unscattered component. This phase shift has been confirmed for thin carbon films by many experiments dealing with image contrast and the contrast transfer theory. There is also an additional phase shift which is a function of the atomic number of the scattering atom. This shift is negligible for light atoms such as carbon, but becomes significant for heavy atoms as used for stains for biological specimens. The light elements are imaged as phase objects, while those atoms scattering with a larger phase shift may be imaged as amplitude objects. There is a great deal of interest in determining the complete object wave, i.e., both the phase and amplitude components of the electron wave leaving the object.

Interpretation of irradiation-induced changes in electron diffractograms and images of extinction contours at low temperatures

1984 ◽  
Vol 42 ◽  
pp. 268-269
Author(s):  
E. Knapek ◽  
H. Formanek ◽  
G. Lefranc ◽  
I. Dietrich
Keyword(s):  
Low Temperatures ◽  
Carbon Films ◽  
Organic Crystals ◽  
Wide Spread ◽  
Lens System ◽  
Preparation Conditions ◽  
Thin Carbon ◽  
Electron Diffractograms ◽  
Diffraction Patterns ◽  
Induced Changes

A few years ago results on cryoprotection of L-valine were reported, where the values of the critical fluence De i.e, the electron exposure which decreases the intensity of the diffraction reflections by a factor e, amounted to the order of 2000 + 1000 e/nm2. In the meantime a discrepancy arose, since several groups published De values between 100 e/nm2 and 1200 e/nm2 /1 - 4/. This disagreement and particularly the wide spread of the results induced us to investigate more thoroughly the behaviour of organic crystals at very low temperatures during electron irradiation.For this purpose large L-valine crystals with homogenuous thickness were deposited on holey carbon films, thin carbon films or Au-coated holey carbon films. These specimens were cooled down to nearly liquid helium temperature in an electron microscope with a superconducting lens system and irradiated with 200 keU-electrons. The progress of radiation damage under different preparation conditions has been observed with series of electron diffraction patterns and direct images of extinction contours.

Scanning Secondary Electron Microscopy of Myofibrils Using Transmission Techniques

1975 ◽  
Vol 33 ◽  
pp. 556-557
Author(s):  
M. K. Lamvik
Keyword(s):  
Electron Microscopy ◽  
Electron Microscope ◽  
Carbon Films ◽  
Photographic Recording ◽  
Transmission Electron ◽  
Thin Carbon ◽  
The Common ◽  
Scanning Electron ◽  
Better Than ◽  
Cellular Organelles

When observing small objects such as cellular organelles by scanning electron microscopy, it is often valuable to use the techniques of transmission electron microscopy. The common practice of mounting and coating for SEM may not always be necessary. These possibilities are illustrated using vertebrate skeletal muscle myofibrils.Micrographs for this study were made using a Hitachi HFS-2 scanning electron microscope, with photographic recording usually done at 60 seconds per frame. The instrument was operated at 25 kV, with a specimen chamber vacuum usually better than 10-7 torr. Myofibrils were obtained from rabbit back muscle using the method of Zak et al. To show the component filaments of this contractile organelle, the myofibrils were partially disrupted by agitation in a relaxing medium. A brief centrifugation was done to clear the solution of most of the undisrupted myofibrils before a drop was placed on the grid. Standard 3 mm transmission electron microscope grids covered with thin carbon films were used in this study.

Effect of the structural changes on the mechanical properties of the sintered films

2016 ◽  
Vol 12 (1) ◽  
pp. 4141-4144
Author(s):  
Garima Jain
Keyword(s):  
Crystallite Size ◽  
Lattice Constant ◽  
Structural Changes ◽  
Structural Investigation ◽  
Energy Gap ◽  
Lattice Parameter ◽  
Metal Chalcogenides ◽  
Optical Energy Gap ◽  
Tin Telluride ◽  
Physical Quantities

Polycrystalline films of tin telluride were prepared by sintering technique. The structural investigation of the films with different thicknesses enables to determine lattice parameter, crystallite size and strain existing in the films. The XRD traces showed that strain was tensile in nature. The crystallite size increases with thickness while strain decreases. Higher the value of tensile strain, larger is the lattice constant. The optical energy gap shows a descending nature with increasing strain and so with the lattice constant. Such an attempt made to delve into interdependence of basic physical quantities helps to explore the properties of SnTe and utilize it as an alternative to heavy metal chalcogenides in various technological applications.  

scholarly journals Effect of Low-Pressure Plasma Treatment Parameters on Wrinkle Features

Materials ◽  
2020 ◽  
Vol 13 (17) ◽  
pp. 3852
Author(s):  
Bongjun Gu ◽  
Dongwook Ko ◽  
Sungjin Jo ◽  
Dong Choon Hyun ◽  
Hyeon-Ju Oh ◽  
...  
Keyword(s):  
Power Flow ◽  
Treatment Time ◽  
Argon Plasma ◽  
Negative Ions ◽  
Low Pressure ◽  
Nitrogen Plasma ◽  
Pressure Plasma ◽  
Positive Ions ◽  
Low Pressure Plasma ◽  
Optical Adhesive

Wrinkles attract significant attention due to their ability to enhance the mechanical and optical characteristics of various optoelectronic devices. We report the effect of the plasma gas type, power, flow rate, and treatment time on the wrinkle features. When an optical adhesive was treated using a low-pressure plasma of oxygen, argon, and nitrogen, the oxygen and argon plasma generated wrinkles with the lowest and highest wavelengths, respectively. The increase in the power of the nitrogen and oxygen plasma increased the wavelengths and heights of the wrinkles; however, the increase in the power of the argon plasma increased the wavelengths and decreased the heights of the wrinkles. Argon molecules are heavier and smaller than nitrogen and oxygen molecules that have similar weights and sizes; moreover, the argon plasma comprises positive ions while the oxygen and nitrogen plasma comprise negative ions. This resulted in differences in the wrinkle features. It was concluded that a combination of different plasma gases could achieve exclusive control over either the wavelength or the height and allow a thorough analysis of the correlation between the wrinkle features and the characteristics of the electronic devices.

scholarly journals Exo⇔Endo Isomerism, MEP/DFT, XRD/HSA-Interactions of 2,5-Dimethoxybenzaldehyde: Thermal, 1BNA-Docking, Optical, and TD-DFT Studies

Molecules ◽  
2020 ◽  
Vol 25 (24) ◽  
pp. 5970
Author(s):  
Nabil Al-Zaqri ◽  
Mohammed Suleiman ◽  
Anas Al-Ali ◽  
Khaled Alkanad ◽  
Karthik Kumara ◽  
...  
Keyword(s):  
Density Functional ◽  
Energy Gap ◽  
Structural Parameters ◽  
Population Analysis ◽  
Xrd Analysis ◽  
X Ray Diffraction ◽  
Optical Energy Gap ◽  
Functional Theory ◽  
Reactivity Descriptors ◽  
Td Dft

The exo⇔endo isomerization of 2,5-dimethoxybenzaldehyde was theoretically studied by density functional theory (DFT) to examine its favored conformers via sp2–sp2 single rotation. Both isomers were docked against 1BNA DNA to elucidate their binding ability, and the DFT-computed structural parameters results were matched with the X-ray diffraction (XRD) crystallographic parameters. XRD analysis showed that the exo-isomer was structurally favored and was also considered as the kinetically preferred isomer, while several hydrogen-bonding interactions detected in the crystal lattice by XRD were in good agreement with the Hirshfeld surface analysis calculations. The molecular electrostatic potential, Mulliken and natural population analysis charges, frontier molecular orbitals (HOMO/LUMO), and global reactivity descriptors quantum parameters were also determined at the B3LYP/6-311G(d,p) level of theory. The computed electronic calculations, i.e., TD-SCF/DFT, B3LYP-IR, NMR-DB, and GIAO-NMR, were compared to the experimental UV–Vis., optical energy gap, FTIR, and 1H-NMR, respectively. The thermal behavior of 2,5-dimethoxybenzaldehyde was also evaluated in an open atmosphere by a thermogravimetric–derivative thermogravimetric analysis, indicating its stability up to 95 °C.

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