Uv Laser-Induced Etching of the First-Row Transition Metals

1989 ◽  
Vol 158 ◽  
Author(s):  
George W. Tyndall

ABSTRACTThe 248 nm excimer laser-induced etching of Ti, Cr, Fe, Co, Ni, and Cu by Br2 has been studied. The experiment consists of focusing the pulsed UV laser beam at normal incidence onto the surface of a quartz crystal microbalance (QCM) coated with 1μm of polycrystalline metal. Absolute etch rates are determined as a function of the Br2 pressure and the laser fluence. On the basis of the kinetic information, four mechanisms are proposed to explain the etching of these transition metals.

1988 ◽  
Vol 129 ◽  
Author(s):  
George W. Tyndall ◽  
Christopher R. Moylan

ABSTRACTA quartz crystal microbalance (QCM) has been used to study the 248 nm laser-induced etching of nickel by Br2. The experiment consists of focusing a pulsed UV laser beam at normal incidence onto the surface of a quartz crystal coated with 1μm of polycrystalline nickel. Absolute etch rates of nickel, in terms of mass removed per unit time, are determined from the integrated sensitivity function of the 6Mhz crystals used in this work. The dependence of the etch rate on Br2 pressure and laser fluence was measured. The kinetic data obtained from these measurements show that the mechanism of the etching process is dominated by the formation and the subsequent removal of a NixBry monolayer.


2019 ◽  
Vol 37 (01) ◽  
pp. 128-140 ◽  
Author(s):  
Syed Muhammad Abouzar Sarfraz ◽  
Shazia Bashir ◽  
Khaliq Mahmood

AbstractThe effect of laser fluence and nature of ambient environments on the sputtering yield, surface modifications, crater depth, UV-visible absorption spectra, chemical composition, and micro hardness of Zr has been investigated. Nd: YAG laser (532 nm, 10 Hz, 6 ns) at different fluences varying from 16 to 60.8 Jcm−2 was employed as an irradiation source. All measurements are performed under two ambient environments of Ar and O2 at a constant pressure of 10 Torr. Quartz crystal microbalance has been employed for the measurement of sputtering yield of laser irradiated Zr. It is revealed that sputtering yield increases monotonically with increasing fluence under both environments however, it is higher in Ar as compared to O2 environment. Scanning electron microscope (SEM) has been used to explore the surface morphology. SEM analysis exhibits the formation of cones, ridges, and cracks at the central ablated areas whereas, laser-induced periodic surface structures, periodic ridges and sharp cones are observed at inner boundaries in both environments of Ar and O2. Sharp spikes are observed in both environments, however, their height and distinctness are more pronounced in Ar as compared to O2. Cones are characteristic features in Ar, whereas, cavities and channels are dominant features in O2 environment at outer boundaries. The formation and growth of surface structures are dependent upon laser fluence and ambient gas nature. The depth profilometry has been used to measure the crater depth of irradiated Zr target by using an optical microscope. UV visible spectroscopy and energy-dispersive X-ray analyses reveal the oxide formation in the case of Zr irradiation in O2 environment. The Vicker Micro-hardness tester has been employed to measure the hardness. The higher observed values of sputtering yield, crater depth and hardness of laser ablated Zr in Ar as compared to O2 are well correlated with distinct surface structures.


1987 ◽  
Vol 101 ◽  
Author(s):  
Robert L. Jackson ◽  
George W. Tyndall

ABSTRACTA quartz crystal microbalance has been used to measure the rates of focused uv laser-induced deposition from the Group 6 hexacarbonyls in real time. The experimental configuration employs acwuv laser beam focused onto the microbalance crystal surface at normal incidence to deposit material by decomposition of a metal complex vapor. Simple equations are given for determining absolute deposition rates in terms of the total mass deposited per unit time. Kinetic data obtained with this system have been used to study the mechanism of laser photodeposition from Cr(CO)e, Mo(CO)6, and W(CO)é induced by a frequency-doubled argon ion laser. The rate-determining deposition step involves condensation of products formed upon single-photon dissociation of the metal carbonyls in the gas phase. Additional observations indicate that the adsorbed photoproducts undergo further photo-initiated dissociation on the substrate surface.


1996 ◽  
Vol 451 ◽  
Author(s):  
T. Shimizu ◽  
M. Murahara

ABSTRACTA Fluorocarbon resin surface was selectively modified by irradiation with a ArF laser beam through a thin layer of NaAlO2, B(OH)3, or H2O solution to give a hydrophilic property. As a result, with low fluence, the surface was most effectively modified with the NaAlO2 solution among the three solutions. However, the contact angle in this case changed by 10 degrees as the fluence changed only 1mJ/cm2. When modifying a large area of the surface, high resolution displacement could not be achieved because the laser beam was not uniform in displacing functional groups. Thus, the laser fluence was successfully made uniform by homogenizing the laser beam; the functional groups were replaced on the fluorocarbon resin surface with high resolution, which was successfully modified to be hydrophilic by distributing the laser fluence uniformly.


2019 ◽  
Vol 25 (6) ◽  
pp. 879-884
Author(s):  
Takahiro Sakai ◽  
Hayato Seki ◽  
Shogo Yoshida ◽  
Hayato Hori ◽  
Hisashi Suzuki ◽  
...  

1998 ◽  
Vol 145 (2) ◽  
pp. 492-497 ◽  
Author(s):  
James J. Kelly ◽  
K. M. Anisur Rahman ◽  
Christopher J. Durning ◽  
Alan C. West

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