Hydrogen-Plasma Reactive Flushing for a-Si:H P-I-N Solar Cell Fabrication
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ABSTRACTWe have studied the effects of a hydrogen-plasma reactive flush between the pand i-layer depositions in fabricating solar cells of glass/TCO/p(a-SiC:H)-i(a-Si:H)-n(a-Si:H)/metal in a single-chamber, glow-discharge deposition system. Spectral response, photoluminescence, and photovoltaic conversion efficiency measurements show that the hydrogen-plasma reactive flush is effective in reducing the p-i interface recombination of charge carriers and in improving solar cell performance.
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2021 ◽
Vol 2086
(1)
◽
pp. 012088
Keyword(s):
2021 ◽
Vol 1853
(1)
◽
pp. 012021
2014 ◽
Vol 4
(14)
◽
pp. 1400421
◽
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2013 ◽