Study of MBE ZnSe Growth Using Rheed Oscillations

1989 ◽  
Vol 145 ◽  
Author(s):  
Francoise S. Turco ◽  
M.C. Tamargo
Keyword(s):  
Growth Rate ◽  
Quantitative Study ◽  
Growth Parameters ◽  
Growth Conditions ◽  
High Energy ◽  
Growth Mechanisms ◽  
Mbe Growth ◽  
Wide Range ◽  
Main Growth

AbstractReflection high energy electron diffraction (RHEED) intensity oscillations are often used to investigate in situ the growth of III-V materials by molecular beam epitaxy (MBE). In this work, we have used RHEED oscillations to perform a quantitative study of the growth mechanisms of ZnSe, a II-VI semiconductor.Our experiments illustrate that the RHEED pattern of ZnSe is far less intense than that of III-V materials grown by MBE, and no specular spot is observed over a wide range of growth conditions. We have, however, been able to record up to 25 oscillations allowing a quantitative study of the growth of ZnSe by MBE. Thus we have used RHEED oscillations to make an in situ systematic study of the influence of the three main growth parameters (substrate temperature and Zn or Se impinging fluxes) on the ZnSe growth rate. We observed that the variation of the ZnSe growth rate is due to a non unity sticking coefficient of both Zn and Se species at the interface in the standard growth conditions used. Our observations can be described using a thermodynamic model and enable us to control the desired growth conditions. Our work demonstrates the utility of RHEED oscillations to understand the MBE growth mechanisms of II-VI compounds.

EuTe/PbTe Superlattices: Mbe Growth and Optical Characterization

1993 ◽  
Vol 301 ◽  
Author(s):  
G. Springholz ◽  
Shu Yuan ◽  
G. Bauer ◽  
M. Kriechbaum ◽  
H. Krenn
Keyword(s):  
Quantum Wells ◽  
Band Gap ◽  
Growth Parameters ◽  
Energy Levels ◽  
Wide Band ◽  
Growth Conditions ◽  
High Energy ◽  
Layer By Layer ◽  
Heteroepitaxial Growth ◽  
Mbe Growth

ABSTRACTThe heteroepitaxial growth of EuTe on PbTe (111) by molecular beam epitaxy (MBE) was investigated using in situ reflection high energy electron diffraction (RHEED). As a function of substrate temperature and Te2 flux rate, the resulting EuTe (111) surfaces exhibit several different surface reconstructions corresponding to Te-stabilized or Eu-stabilized surfaces. The Eustabilized surface shows a (2√3 × 2√3)R30° surface reconstruction. Because of the strain induced tendency for 3D islanding, only in a narrow window of MBE growth parameters perfect 2D layer-by-layer heteroepitaxial growth exists. Using such optimized MBE growth conditions, we have fabricated a series of PbTe/EuTe superlattices. In such superlattices the wide band gap EuTe layers act as barriers and the narrow band gap PbTe as quantum wells. The superlattices were investigated by high resolution x-ray diffraction, showing their high structural perfection. Modulated low temperature Fourier transform infrared reflection measurements were performed in order to determine the confined energy levels in the PbTe quantum wells. The measurements indicate that mini-subbands are formed in the PbTe quantum wells with a mini-band width of 22 meV in agreement with envelope function calculations.

Growth of Epitaxial IrSi3 Layers on Si(111)

1989 ◽  
Vol 160 ◽  
Author(s):  
T. L. Lin ◽  
C. W. Nieh
Keyword(s):  
Surface Morphology ◽  
Molecular Beam ◽  
Solid Phase ◽  
Single Mode ◽  
Growth Conditions ◽  
Tem Analysis ◽  
Mbe Growth ◽  
Good Surface ◽  
Transmission Electron

AbstractEpitaxial IrSi3 films have been grown on Si (111) by molecular beam epitaxy (MBE) at temperatures ranging from 630 to 800 °C and by solid phase epitaxy (SPE) at 500 °C. Good surface morphology was observed for IrSi3 layers grown by MBE at temperatures below 680 °C, and an increasing tendency to form islands is noted in samples grown at higher temperatures. Transmission electron microscopy (TEM) analysis reveals that the IrSi3 layers grow epitaxially on Si(111) with three epitaxial modes depending on the growth conditions. For IrSi3 layers grown by MBE at 630 °C, two epitaxial modes were observed with ~ 50% area coverage for each mode. Single mode epitaxial growth was achieved at a higher MBE growth temperature, but with island formation in the IrSi3 layer. A template technique was used with MBE to improve the IrSi3 surface morphology at higher growth temperatures. Furthermore, single-crystal IrSi3 was grown on Si(111) at 500 °C by SPE, with annealing performed in-situ in a TEM chamber.

Temperature Dependent Quasi-Periodic Facetting of AlAs Grown by MBE on (100) GaAs Substrates

1993 ◽  
Vol 312 ◽  
Author(s):  
Richard Mirin ◽  
Mohan Krishnamurthy ◽  
James Ibbetson ◽  
Arthur Gossard ◽  
John English ◽  
...  
Keyword(s):  
Growth Conditions ◽  
High Energy ◽  
High Energy Electron ◽  
Temperature Dependent ◽  
Cross Sectional ◽  
Mbe Growth ◽  
Atomic Force ◽  
Gaas Substrates ◽  
Transmission Electron ◽  
Facet Formation

AbstractHigh temperature (≥ 650°C) MBE growth of AlAs and AlAs/GaAs superlattices on (100) GaAs is shown to lead to quasi-periodic facetting. We demonstrate that the facetting is only due to the AlAs layers, and growth of GaAs on top of the facets replanarizes the surface. We show that the roughness between the AlAs and GaAs layers increases with increasing number of periods in the superlattice. The roughness increases to form distinct facets, which rapidly grow at the expense of the (100) surface. Within a few periods of the initial facet formation, the (100) surface has disappeared and only the facet planes are visible in cross-sectional transmission electron micrographs. At this point, the reflection high-energy electron diffraction pattern is spotty, and the specular spot is a distinct chevron. We also show that the facetting becomes more pronounced as the substrate temperature is increased from 620°C to 710°C. Atomic force micrographs show that the valleys enclosed by the facets can be several microns long, but they may also be only several nanometers long, depending on the growth conditions.

Real-Time Analysis Of In-Situ Spectroscopic Ellipsometric Data During Mbe Growth Of III-V Semiconductors

1991 ◽  
Vol 222 ◽  
Author(s):  
B. Johs ◽  
J. L. Edwards ◽  
K. T. Shiralagi ◽  
R. Droopad ◽  
K. Y. Choi ◽  
...  
Keyword(s):  
Real Time ◽  
Optical Constants ◽  
Growth Parameters ◽  
Ex Situ ◽  
Time Analysis ◽  
Mbe Growth ◽  
In Situ Data ◽  
Real Time Analysis

ABSTRACTA modular spectroscopic ellipsometer, capable of both in-situ and ex-situ operation, has been used to measure important growth parameters of GaAs/AIGaAs structures. The ex-situ measurements provided layer thicknesses and compositions of the grown structures. In-situ ellipsometric measurements allowed the determination of growth rates, layer thicknesses, and high temperature optical constants. By performing a regression analysis of the in-situ data in real-time, the thickness and composition of an AIGaAs layer were extracted during the MBE growth of the structure.

In Situ Monitoring of the Smear-Out of the Ge Profile in GAS Source SiGe MBE Using Rheed Intensity Oscillations

1992 ◽  
Vol 263 ◽  
Author(s):  
K. Werner ◽  
S. Butzke ◽  
J.W. Maes ◽  
O.F.Z. Schannen ◽  
J. Trommel ◽  
...  
Keyword(s):  
Growth Rate ◽  
Molecular Beam ◽  
Surface Segregation ◽  
Catalytic Effect ◽  
Growth Conditions ◽  
In Situ Monitoring ◽  
Marked Contrast ◽  
Si Substrates ◽  
Gas Source

ABSTRACTWe have studied the deposition of GexSi1−x layers on (100) Si substrates by gas source molecular beam epitaxy (GSMBE) using disilane and germane.The investigation of RHEED intensity oscillations during growth reveals the well known rate enhancement obtained when adding a small amount of germane to the disilane flux. However, when exposing a previously deposited Ge layer to a pure disilane flux the growth rate during the first few monolayers remains at an enhanced value but returns to its homoepitaxial value after about 10 to 15 monolayers. This behaviour was observed under a variety of growth conditions. It is in marked contrast to the experience obtained in conventional Si/Ge MBE and suggests a catalytic effect of the particular surface present during GSMBE growth. We propose that this effect is caused by the surface segregation of Ge species and leads to a smear-out of the Ge profile in the layer.

A RHEED Study of MBE Growth of ZnSe on GaAs (111) A-(2 × 2)

2003 ◽  
Vol 10 (04) ◽  
pp. 669-675
Author(s):  
F. S. Gard ◽  
J. D. Riley ◽  
R. Leckey ◽  
B. F. Usher
Keyword(s):  
Growth Rate ◽  
Electron Diffraction ◽  
Substrate Temperature ◽  
Three Dimensional ◽  
High Energy ◽  
Growth Mode ◽  
Two Dimensional ◽  
High Energy Electron ◽  
Mbe Growth ◽  
Atomic Flux

ZnSe epilayers have been grown under various Se/Zn atomic flux ratios in the range of 0.22–2.45 at a substrate temperature of 350°C on Zn pre-exposed GaAs (111) A surfaces. Real time reflection high energy electron diffraction (RHEED) observations have shown a transition from a two-dimensional (2D) to a three-dimensional (3D) growth mode. The transition time depends directly upon the growth rate. A detailed discussion is presented to explore the cause of this change in the growth mode.

Application of In Situ 3D Computed Tomography during PVT Growth of 4H-SiC for the Study of Source Material Consumption under Varying Growth Conditions

2016 ◽  
Vol 858 ◽  
pp. 49-52 ◽  
Author(s):  
P.J. Wellmann ◽  
Lars Fahlbusch ◽  
Michael Salamon ◽  
Norman Uhlmann
Keyword(s):  
Growth Parameters ◽  
Growth Conditions ◽  
Source Material ◽  
Gas Pressure ◽  
Inert Gas ◽  
Material Surface ◽  
Growth Interface ◽  
Axial Temperature ◽  
The Stability

2D and 3D in-situ X-ray visualization was applied to study the behavior of the SiC source material during PVT growth under various growth conditions. Experiments were carried out in two growth chambers for the growth of 3 inch and 4 inch crystals. Growth parameters were varied in the gas room in terms of axial temperature and inert gas pressure. The study addresses the stability of the SiC source material surface. It is shown that a higher inert gas pressure (e.g. 25 mbar) inhibits an unintentional upward evolution of the SiC feedstock that interferes with the crystal growth interface. The latter is related to a suppression of a pronounced recrystallization inside the SiC source. For a low inert gas pressure (e.g. 10 mbar) it is concluded that the axial temperature gradient inside the source material needs to be decreased to less than ca. 10 K/cm.

AES and EELFS Studies of Initial Stages of Growth of GaAs/InAs/GaAs Heterostructures.

1988 ◽  
Vol 144 ◽  
Author(s):  
F. D. Schowengerdt ◽  
F. J. Grunthaner ◽  
John K. Liu
Keyword(s):  
Quantum Well ◽  
Quantum Wells ◽  
Growth Parameters ◽  
High Energy ◽  
Model Calculations ◽  
Mbe Growth ◽  
Quantum Well Structures ◽  
Stages Of Growth ◽  
Double Heterostructures ◽  
Composition And Structure

ABSTRACTWe report on a systematic study of the composition and structure of GaAs/InAs/GaAs quantum wells using Auger Electron Spectroscopy (AES), Extended Energy Loss Fine Structure (EELFS), and Reflection High Energy Electron Diffraction (RHEED) techniques. Double heterostructures with InAs thickness ranging from 2 to 10 monolayers, capped by 2 to 10 monolayers of GaAs, were grown by MBE using a variety of techniques, including those employing sequential, interrupted, and delayed shutter timing sequences. AES peak ratios are compared with model calculations to monitor compositional development of the multilayers. The AES results are correlated with RHEED measurements to determine MBE growth parameters for optimal control of the stoichiometry and surface morphology. EELFS was used to monitor strain in the buried InAs layers. The AES results show departure from smooth laminar growth of layers of stoichiometric InAs on GaAs at temperatures below 420 C and above 470 C. AES results on the quantum well structures suggest floating InAs layers on top of the GaAs and/or facet formation in the GaAs layers. The EELFS results, when compared to bulk InAs, indicate the presence of strain in the buried InAs quantum well.

Transport and Chemical Mechanisms in GaN Hydride Vapor Phase Epitaxy

2002 ◽  
Vol 743 ◽  
Author(s):  
Sergey Yu. Karpov ◽  
Alexander S. Segal ◽  
Darya V. Zimina ◽  
Sergey A. Smirnov ◽  
Alexander P. Sid'ko ◽  
...  
Keyword(s):  
Growth Rate ◽  
Vapor Phase ◽  
Growth Conditions ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Surface Kinetics ◽  
Chemical Mechanisms ◽  
Horizontal Reactor ◽  
Wide Range ◽  
Transport Effects

ABSTRACTOn the basis of both experimental and theoretical studies, a simple quasi-thermodynamic model of surface kinetics is suggested for Hydride Vapor Phase Epitaxy (HVPE) of GaN, working in a wide range of growth conditions. Coupled with detailed 3D modeling of species transport in a horizontal reactor, the model provides quantitative predictions for the GaN growth rate as a function of process parameters. Significance of transport effects on growth rate uniformity is demonstrated.

Epitaxial Growth of Silicon on CoSi2 (001)/Si (001)

1991 ◽  
Vol 220 ◽  
Author(s):  
Q. F. Xiao ◽  
J. R. Jimenez ◽  
L. J. Schowalter ◽  
L. Luo ◽  
T. E. Mitchell ◽  
...  
Keyword(s):  
Growth Conditions ◽  
High Energy ◽  
Thin Layers ◽  
Ex Situ ◽  
High Crystalline Quality ◽  
Cross Sectional ◽  
Ion Channeling ◽  
Transmission Electron ◽  
Reconstructed Surface

ABSTRACTEpitaxial Si layers have been grown under a variety of growth conditions on CoSi2 (001) by molecular beam epitaxy (MBE). The structural properties of the Si overgrowth were studied by in-situ Reflection High Energy Electron Diffraction (RHEED), as well as ex-situ MeV4He+ ion channeling and High Resolution Transmission Electron Microscopy (HRTEM). Strong influences of the CoSi2 surface reconstruction on the Si overgrowth have been observed. RHEED studies show islanding growth of Si on the CoSi2 (001) (3/√2 × √2)R45 reconstructed surface, but smooth growth of Si on the CoSi2 (001) {√2 × √2)R45 reconstructed surface, under the same growth conditions. The growth of Si on thin layers of CoSi2 (2nm-6nm) with (√2 × √2)R45 reconstructed surface at 460°C results in high crystalline quality for the Si top layer, as indicated by good channeling minimum yield (Xmin < 6%), but cross-sectional TEM shows that the CoSi2 layers are discontinuous. We also report preliminary results on Si grown on a 2 × 2 reconstructed CoSi2 (001) surface.

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