Near Surface Structure of Ion Implanted Si Studied by Grazing Incidence X-Ray Scattering

1988 ◽  
Vol 143 ◽  
Author(s):  
G. Wallner ◽  
E. Burkel ◽  
H. Metzger ◽  
J. Peisl ◽  
S. Rugel

AbstractX-rays incident on a surface under grazing angle may undergo total external reflection and excite an interior wave field damped exponentially into the bulk. These evanescent waves are a sensitive probe for the study the real structure in the near surface region. We report results on the influence of implantation defects on Bragg diffracted and on diffuse intensities. By detailed comparison of Bragg intensities with predictions of dynamical scattering theory we detect the presence of amorphous layers and determine their thickness. For the first time defect induced diffuse scattering underconditions of grazing incidence andexit is observed and compared to recent theoretical results. Strength and symmetry of implantation induced defects can be determined as well as their depth distribution which is compared to results of a TRIM simulation: the defect distribution is found to agree with that of the deposited collisional energy.

2002 ◽  
Vol 16 (11n12) ◽  
pp. 1633-1640 ◽  
Author(s):  
P. D. HATTON ◽  
M. E. GHAZI ◽  
S. B. WILKINS ◽  
P. D. SPENCER ◽  
D. MANNIX ◽  
...  

The La 2-x Sr x NiO 4 system is isostructural with the high T C superconducting cuprate La 2-x Sr x CuO 4 and is a prototypical system for the understanding of strongly correlated electron-phonon coupling, and the resultant effects on material properties. X-ray scattering studies have been performed on La5/3Sr1/3NiO4 that demonstrate the two-dimensional nature of these charge stripes. Such studies, demonstrate the very high correlation length of the stripes (~ 2000 Å) at low temperatures. We have undertaken a series of experiments measuring the wavevector and charge stripe correlation length on a variety of crystals with the compositions La 2-x Sr x NiO 4 (x=0.20, 0.25, 0.275, 0.30 and 0.33) using ~10 keV X-rays. The results demonstrate that for x=0.275, and above, the charge stripes are highly correlated in a well-ordered crystalline lattice. Measurements of the incommensurability, ε, as a function of temperature for the series revealed that it is commensurate and temperature independent for the x=0.33 sample. For other compositions it is incommensurate and also temperature dependent. However for the x=0.20 and 0.25 crystals a much reduced correlation length was observed suggestive of a charge stripe glass. However, such experiments are sensitive to such charge ordering only in the near (top few micron) surface region. High energy X-rays however can probe the charge stripe ordering within the bulk of the single crystal by utilising the dramatic increase in penetration depth. We have used 130 keV X-rays and demonstrate that in La5/3Sr1/3NiO4 the charge stripes are far less correlated in the bulk than in the near surface region. This reduced correlation length (~300 Å), consistent with neutron scattering measurements, is indicative of a charge stripe glass, reminiscent of that observed below x=0.25, in the near surface region.


2018 ◽  
Vol 51 (3) ◽  
pp. 732-745 ◽  
Author(s):  
Marianna Marciszko ◽  
Andrzej Baczmański ◽  
Manuela Klaus ◽  
Christoph Genzel ◽  
Adrian Oponowicz ◽  
...  

The main focus of the presented work was the investigation of structure and residual stress gradients in the near-surface region of materials studied by X-ray diffraction. The multireflection method was used to measure depth-dependent stress variation in near-surface layers of a Ti sample (grade 2) subjected to different mechanical treatments. First, the multireflection grazing incidence diffraction method was applied on a classical diffractometer with Cu Kα radiation. The applicability of the method was then extended by using a white synchrotron beam during an energy dispersive (ED) diffraction experiment. An advantage of this method was the possibility of using not only more than one reflection but also different wavelengths of radiation. This approach was successfully applied to analysis of data obtained in the ED experiment. There was good agreement between the measurements performed using synchrotron radiation and those with Cu Kα radiation on the classical diffractometer. A great advantage of high-energy synchrotron radiation was the possibility to measure stresses as well as thea0parameter andc0/a0ratio for much larger depths in comparison with laboratory X-rays.


1996 ◽  
Vol 11 (5) ◽  
pp. 1169-1178 ◽  
Author(s):  
Kentaro Suzuya ◽  
Michihiro Furusaka ◽  
Noboru Watanabe ◽  
Makoto Osawa ◽  
Kiyohito Okamura ◽  
...  

Mesoscopic structures of SiC fibers produced from polycarbosilane by different methods were studied by diffraction and small-angle scattering of neutrons and x-rays. Microvoids of a size of 4–10 Å in diameter have been observed for the first time by neutron scattering in a medium momentum transfer range (Q = 0.1–1.0 Å−1). The size and the volume fraction of β–SiC particles were determined for fibers prepared at different heat-treatment temperatures. The results show that wide-angle neutron scattering measurements are especially useful for the study of the mesoscopic structure of multicomponent materials.


1999 ◽  
Vol 602 ◽  
Author(s):  
M. Petit ◽  
L. J. Martinez-Miranda ◽  
M. Rajeswari ◽  
A. Biswas ◽  
D. J. Kang ◽  
...  

AbstractWe have performed depth profile analyses of the lattice parameters in epitaxial thin films of La1−xCaxMno3 (LCMO), where x = 0.33 or 0.3, to understand the evolution of strain relaxation processes in these materials. The analyses were done using Grazing Incidence X-ray Scattering (GIXS) on films of different thicnesses on two different substrates, (100) oriented LaAlO3 (LAO), with a lattice mismatch of ∼2% and (110) oriented NGO, with a lattice mismatch of less than 0.1%. Films grown on LAO can exhibit up to three in-plane strained lattice constants, corresponding to a slight orthorhombic distortion of the crystal, as well as near-surface and columnar lattice relaxation. As a function of film thickness, a crossover from a strained film to a mixture of strained and relaxed regions in the film occurs in the range of 700 Å. The structural evolution at this thickness coincides with a change in the resistivity curve near the metalinsulator transition. The in-plane compressive strain has a range of 0.2 – 1.5%, depending on the film thickness for filsm in the range of 400 - 1500 A.


1992 ◽  
Vol 280 ◽  
Author(s):  
Z. H. Ming ◽  
A. Krol ◽  
Y. L. Soo ◽  
Y. H. Kao ◽  
J. S. Park ◽  
...  

ABSTRACTAngular dependence of grazing incidence x-ray scattering and Ge fluorescence yield were measured for the heterostructures of Si1-xGex/Si and the inverted bilayer Si/Si1-xGex as well as two 10-period superlattices. Interfacial roughness, correlation of height fluctuations between interfaces and Ge density profiles in the multilayers were investigated.


Materials ◽  
2019 ◽  
Vol 12 (3) ◽  
pp. 427 ◽  
Author(s):  
Jie Jin ◽  
Wei Wang ◽  
Xinchun Chen

In this study, Ti + N ion implantation was used as a surface modification method for surface hardening and friction-reducing properties of Cronidur30 bearing steel. The structural modification and newly-formed ceramic phases induced by the ion implantation processes were investigated by transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), and grazing incidence X-ray diffraction (GIXRD). The mechanical properties of the samples were tested by nanoindentation and friction experiments. The surface nanohardness was also improved significantly, changing from ~10.5 GPa (pristine substrate) to ~14.2 GPa (Ti + N implanted sample). The friction coefficient of Ti + N ion implanted samples was greatly reduced before failure, which is less than one third of pristine samples. Furthermore, the TEM analyses confirmed a trilamellar structure at the near-surface region, in which amorphous/ceramic nanocrystalline phases were embedded into the implanted layers. The combined structural modification and hardening ceramic phases played a crucial role in improving surface properties, and the variations in these two factors determined the differences in the mechanical properties of the samples.


2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Neelima Paul ◽  
Jean-Francóis Moulin ◽  
Gaetano Mangiapia ◽  
Armin Kriele ◽  
Peter Müller-Buschbaum ◽  
...  

AbstractPhysical properties of nanoclusters, nanostructures and self-assembled nanodots, which in turn are concomitantly dependent upon the morphological properties, can be modulated for functional purposes. Here, in this article, magnetic nanodots of Fe on semiconductor TiO2 nanotubes (TNTs) are investigated with time-of-flight grazing incidence small-angle neutron scattering (TOF-GISANS) as a function of wavelength, chosen from a set of three TNT templates with different correlation lengths. The results are found corroborating with the localized scanning electron microscopy (SEM) images. As we probe the inside and the near-surface region of the Fe-dotted TNTs with respect to their homogeneity, surface distortion and long-range order using TOF-GISANS, gradual aberrations at the top of the near-surface region are identified. Magnetization measurements as a function of temperature and field do not show a typical ferromagnetic behavior but rather a supermagnetic one that is expected from a nonhomogeneous distribution of Fe–dots in the intertubular crevasses.


2020 ◽  
Vol 11 (28) ◽  
pp. 4630-4638 ◽  
Author(s):  
Li Xiang ◽  
Wonyeong Ryu ◽  
Jehan Kim ◽  
Moonhor Ree

Quantitative grazing incidence X-ray scattering analysis combined with X-ray reflectivity using synchrotron radiation sources was explored for the first time cyclic topology effects on the nanoscale film morphology of poly(ε-caprolactone).


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