Spin-on Silicon Oxide (SOX): Physical Properties of the Sol

1988 ◽  
Vol 131 ◽  
Author(s):  
Vivian Ryan ◽  
Gerald Smolinsky
Keyword(s):  
Physical Properties ◽  
Silicon Oxide ◽  
Particle Density ◽  
Etching Rate ◽  
Particle Diameter ◽  
Particle Growth ◽  
Wet Etching ◽  
Aggregation Kinetics ◽  
Average Particle ◽  
Concentration Changes

ABSTRACTThis paper describes an analysis of the physical properties of the sol using several complementary light scattering techniques. Polymerization and aggregation kinetics were followed through time-dependent changes in the size, shape, and density of the sol particles. The sot growth rate was controlled by choice of solvent and silicon concentration. Changes in viscosity and pH were small during the reaction period. Three different particle-growth regimes exist in which either the particle density increased, decreased, or remained the same. The addition of boron, hydrofluoric acid, or water accelerated the reaction. The sol experimental data correlate with the density and wet-etching rate of the cured films. After curing, high-density films were obtained from sols with three common characteristics: an average particle diameter >450 Å, a relatively high polydispersity, and a low particle density. These criteria were generally satisfied by solutions one to two days old.

Effect of Electrochemical Reaction Enviroment on the Surface Morphology and Photoluminescence of Porous Silicon

2013 ◽  
Vol 737 ◽  
pp. 60-66
Author(s):  
Ali Syari’ati ◽  
Veinardi Suendo
Keyword(s):  
Porous Silicon ◽  
Surface Morphology ◽  
Silicon Oxide ◽  
Quantum Confinement Effect ◽  
Etching Rate ◽  
Green Emission ◽  
Wet Etching ◽  
Electrochemical Anodization ◽  
Etching Method ◽  
Silicon Based

Porous silicon (p-Si) is a well-known silicon based material that can emit visible light at room temperature. The radiative recombination that originated from quantum confinement effect shows photoluminescence (PL) in red, while the defect on silicon oxide at the surface of p-Si shows in blue-green region. Porous silicon can be synthesized through two methods; wet-etching and electrochemical anodization using hydrofluoric acid as the main electrolyte. The electrochemical anodization is more favorable due to faster etching rate at the surface than the conventional wet-etching method. The objective of this research is to show that both of porous silicons can be synthesized using the same main electrolyte but by varying the reaction environment during anodization/etching process. Here, we shows the wet-etching method that enhanced by polarization concentration will produce porous silicon with silicon oxide defects by means blue-green emission, while direct electrochemical anodization will produce samples that emit red PL signal. The effect of introducing KOH into the electrolyte was also studied in the case of enhanced-wet-etching method. Surface morphology of porous silicon and their photoluminescence were observed by Scanning Electron Microscope and PL spectroscopy, respectively.

Spin-on Silicon Oxide (Sox): Deposition and Properties

1988 ◽  
Vol 131 ◽  
Author(s):  
Gerald Smolinsky ◽  
Vivian Ryan
Keyword(s):  
Refractive Index ◽  
Infrared Spectrum ◽  
Silicon Oxide ◽  
Etching Rate ◽  
Sol Gel ◽  
Solvent System ◽  
Wet Etching ◽  
Curing Temperature ◽  
Rutherford Back Scattering ◽  
Free Films

ABSTRACTHigh quality SiO2 films are obtained by spin-coating wafers with a sol/gel of silicic acid in either a 2, 3, or 4-carbon linear-aliphatic alcohol. Some properties of the deposited film depend upon the solvent: such as density, tensile stress, and infrared spectrum. However, Rutherford-back-scattering analysis indicates the O:Si ratio (2.00±05) to be independent of the solvent. The infrared spectrum of the oxide exhibits Si-OSi absorption in the range 1070–1080 cm.−1 depending on the curing temperature and solvent system. (The weaker Si-OSi band is found at 804–810 cm.−1) In addition, low-temperature-cured (<500 °C) films show Si–OH absorption. Films hot-plate baked at 150–350 °C are stable but not fully cured. Films from propanol baked at 400 °C have a refractive index of 1.41–1.42 and a wet-etching rate in 30:1 BOE of ˜1250 Å/min. Films cured at 900 °C have a refractive index of 1.42–1.43, a wet-etching rate of ˜430 A/min, and are more dense by a factor of ˜1.25. Dry-etching with CHF3/O2 occurs at rates comparable to those of CVD oxides. Multiple applications lead to crack-free films as thick as 0.6–0.8 μ m. Deposition over aluminum-patterned topography results in a smoothing of the surface and suppression of hillock growth in the aluminum even after a 450 °C cure. SOX adheres to silicon, aluminum, and silicon dioxide. A boron-doped SOX is readily prepared.

Fabrication of PLA incorporated chitosan nanoparticles to create enhanced functional properties of cotton fabric

2019 ◽  
Vol 48 (2) ◽  
pp. 169-177 ◽  
Author(s):  
Zulfiqar Ali Raza ◽  
Faiza Anwar ◽  
Irshad Hussain ◽  
Sharjeel Abid ◽  
Rashid Masood ◽  
...  
Keyword(s):  
Antibacterial Activity ◽  
Physical Properties ◽  
Cotton Fabric ◽  
Chitosan Nanoparticles ◽  
Particle Diameter ◽  
Poly Lactic Acid ◽  
Size Analysis ◽  
Average Particle ◽  
Content Type ◽  
Functional Textiles

PurposeThis study aimed to present fabrication of novel poly(lactic acid) (PLA) mediated chitosan nanoparticles (CNPs) and their impregnation on cotton fabric for enhanced antibacterial and physical properties.Design/methodology/approachThe PLA-CNPs were characterized using scanning electron microscopy, energy dispersive x-ray spectroscopy, Fourier transform infrared (FTIR) spectroscopy and zeta size analysis. The prepared PLA-CNPs were impregnated on cotton fabric via pad-dry-cure method. The finished cotton fabric was then characterized for its antibacterial activity, functional and other physical textile properties.FindingsThe spectral and optical properties demonstrate that the NPs expressed spherical morphologies with an average particle diameter of 88.02 nm. The antibacterial activity of treated fabrics ranged between 75 and 90 per cent depending on the concentration of PLA-CNPs.Practical implicationsBecause of enhanced awareness and desire for ecofriendly products, the use of sustainable and functional textiles is increasing day by day. For the said purpose, industries are using different chemical treatments to achieve desired end functionality. Currently, different synthetic antibacterial agents are in practice, but they lack sustainable approach to save the environment. In this study, the researchers have developed PLA mediated CNPs for sustainable antibacterial and physical properties of treated cotton fabric.Originality/valueTo the best of the authors’ knowledge, this is first attempt to fabricate PLA-incorporated CNPs for application on cotton fabric followed by a detailed characterization.

Nanoparticulate and Interfacial Mechanics in Confined Geometries Typical of Chemical-Mechanical Planarization

2003 ◽  
Author(s):  
S. H. Ng ◽  
C. M. Zettner ◽  
C. Zhou ◽  
I.-H. Yoon ◽  
S. Danyluk ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Silicon Oxide ◽  
Particle Density ◽  
Chemical Mechanical Planarization ◽  
Particle Diameter ◽  
Surface Preparation ◽  
Fluid Phase ◽  
Wafer Surface ◽  
Exact Nature ◽  
Interfacial Mechanics

Chemical-mechanical planarization (CMP), a surface preparation process used widely in integrated circuits manufacture, is currently the leading nanoscale manufacturing process worldwide, with an annual economic impact well in excess of $1 billion. Originally developed for glass polishing, CMP is used by the microelectronics industry to create silicon, silicon oxide, tungsten and copper surfaces with average roughnesses of O(10 mm). The process typically involves shearing a dilute abrasive silica or ceria nanoparticle-laden “slurry” between a compliant rough surface (the “pad”) and the surface to be polished (the “wafer”). The composition of the slurry can greatly affect material removal rates. Despite its importance, however, a lot still remains to be discovered about the fundamental mechanisms involved in this process. A multidisciplinary effort at Georgia Tech has focused upon the interfacial mechanics of this process and how nanoparticles chemomechanically wear SiO2, Si and Cu surfaces. It has been found, for example, that the wear rate of dielectric varies approximately as the particle diameter. The entrapment of particles at the asperity/dielectric interface is thought to produce the polishing, but the exact nature of this interaction is still unknown. An evanescent-wave visualization technique has therefore been developed to visualize the dynamics of fluorescent 300–500 nm diameter colloidal silica and polystyrene particles within a particle diameter of the “wafer” surface in a simplified model pad-wafer geometry. The technique has been used for the first time to the authors’ knowledge to directly measure the velocity and concentration of the interfacial particles—which presumably interact with and wear the wafer. Although the pad speeds in these studies are much lower than those encountered in the actual CMP process, the initial results suggest that there is negligible “slip” between the particle and fluid phase velocities at the wafer surface. The number of particles at the wafer surface appears, however, to be strongly affected by particle properties, including particle density and size.

Adsorption of safranine T from aqueous medium by nano mesoporous MCM-41: adsorption equilibrium, kinetics, and thermodynamics

2020 ◽  
Vol 10 ◽  
Author(s):  
Xiao-Dong Li ◽  
Qing-Zhou Zhai
Keyword(s):  
Electron Microscopy ◽  
Ph Value ◽  
Particle Diameter ◽  
Spherical Particles ◽  
Practical Significance ◽  
Average Particle ◽  
Average Pore ◽  
Kinetics And Thermodynamics ◽  
Safranine T ◽  
Mcm 41

Introduction: In industrial production, a small amount of saffron T emissions will cause increase of water color and increase of chemical oxygen consumption, so study of the decolorization of saffron T wastewater has an important practical significance. Methods: MCM (Mobil Composition of Matter)-41 molecular sieve was synthesized by hydrothermal method. Power Xray diffraction and scanning electron microscopy were used to characterize the sample. Safranine T dye was adsorbed from water by the MCM-41 prepared. Kinetics and thermodynamics of the adsorption were studied. Results: The MCM-41 sample presented spherical particles and regular. The BET (Brunner-Emmett-Teller) specific surface area of the sample determined by 77 K low temperature nitrogen adsorption-desorption isotherm was 932 m2 /g. Its average particle diameter was 110 nm. TEM (transmission electron microscopy) results showed that the sample structure presented a honeycomb pore structure and the average pore diameter was 3.0 nm. The results showed that when room temperature was 20 ± 1 ℃, adsorbate safranine T: adsorbent MCM-41 = 20 : 1，the optimum pH value of adsorption was 4.0 and contact time was 20 min, the adsorption rate reached 98.29% and the adsorption capacity was 19.66 mg/g. The entropy change and enthalpy change of the adsorption system are respectively ΔS0 = 157.5 J/(mol·K); ΔH0 = 21.544 kJ/mol. When temperature was 277.15, 293.15, 303.15 K，the free energy change was respectively △G1 0 = -22.107 kJ/mol, △G2 0 = -24.627 kJ/mol, △G3 0 = -26.202 kJ/mol. Conclusion: The adsorption of safranine T by MCM-41 belongs to a pseudo-second-order adsorption. This adsorption accords with the Freundlich equation and belongs to a heterogeneous adsorption. The adsorption is an endothermic reaction of entropy increase, being spontaneous.

scholarly journals A Comparative Evaluation of Nanohydroxyapatite-Enriched Hydrogen Peroxide Home Bleaching System on Color, Hardness and Microstructure of Dental Enamel

Materials ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 3072
Author(s):  
Riccardo Monterubbianesi ◽  
Vincenzo Tosco ◽  
Tiziano Bellezze ◽  
Giampaolo Giuliani ◽  
Mutlu Özcan ◽  
...  
Keyword(s):  
Hydrogen Peroxide ◽  
Particle Diameter ◽  
Dental Enamel ◽  
Sem Analysis ◽  
Control Group ◽  
Average Particle ◽  
Color Analysis ◽  
Enamel Microstructure ◽  
Prismatic Structure ◽  
20 Nm

This study aimed to evaluate two hydrogen peroxide (HP)-based at-home bleaching systems in order to analyze whether nano-hydroxyapatite (nHA) addition may represent a reliable and safe solution for tooth whitening without altering dental microstructure and hardness. Human third molars (N = 15) were treated with two bleaching agents, one containing 6%HP (6HP) and the other 6% HP nHA-enriched (6HP-nHA) with average particle diameter ranging from 5–20 nm. Their effects on enamel were assessed using a spectrophotometer, Vickers microhardness (VMH) test and Scanning Electron Microscopy (SEM), comparing the treated groups with the non-treated control group (CTR). Color analysis revealed improvement in whiteness in both groups compared to CTR. VMH test results showed no differences among the groups. SEM analysis highlighted no evident changes in the enamel microstructure of tested groups compared to CTR. At high magnification, in 6HP group, a slight increase in irregularities of enamel surface morphology was observed, while 6HP-nHA group displayed removal of the aprismatic layer but preservation of the intact prismatic structure. These results suggest that the 6HP-nHA agent may be recommended to provide reliable whitening treatment, without damaging the enamel micromorphology and hardness.

Barrier and Copper Seedlayer Wet Etching

2005 ◽  
Vol 103-104 ◽  
pp. 361-364 ◽  
Author(s):  
Claire Therese Richard ◽  
M.M. Frank ◽  
Pascal Besson ◽  
E. Serret ◽  
N. Hotellier ◽  
...  
Keyword(s):  
Process Development ◽  
Wet Etching ◽  
Copper Level ◽  
Bicmos Technology ◽  
Substantial Concentration ◽  
Concentration Changes ◽  
Ph Level ◽  
Robust Process ◽  
Industrial Context ◽  
High Decomposition Rate

This paper summarizes the process development of TiN barrier etching in presence of copper, for a thick copper level in BICMOS technology. In an industrial context, we have chosen to use a SC1 chemistry in a spin etch single wafer tool. The SC1 composition and therefore the pH level allows - the barrier to be etched with no metallic residues, ( if not clear this can be a source for shorts) - control of the selectivity between copper and TiN - control of lateral etching under copper lines, the possible source of open chains by W attack during TiN etch. The electrical results show a robust process according to current specifications, in terms of leakage and via resistance with a fresh chemistry approach. In fact, the recirculation of SC1 is not possible due to substantial concentration changes during processing, high evaporation rate of Ammonia and high decomposition rate of Peroxide in the presence of copper on surface wafer.

scholarly journals Thermal, Structural, and Physical Properties of Freeze Dried Tropical Fruit Powder

2014 ◽  
Vol 2014 ◽  
pp. 1-10 ◽  
Author(s):  
K. A. Athmaselvi ◽  
C. Kumar ◽  
M. Balasubramanian ◽  
Ishita Roy
Keyword(s):  
Particle Size ◽  
Physical Properties ◽  
Average Particle Size ◽  
Average Particle ◽  
X Ray Diffraction ◽  
Tropical Fruit ◽  
X Ray ◽  
Freeze Dried ◽  
Fruit Powder ◽  
Lcr Meter

This study evaluates the physical properties of freeze dried tropical (guava, sapota, and papaya) fruit powders. Thermal stability and weight loss were evaluated using TGA-DSC and IR, which showed pectin as the main solid constituent. LCR meter measured electrical conductivity, dielectric constant, and dielectric loss factor. Functional groups assessed by FTIR showed presence of chlorides, and O–H and N–H bonds in guava, chloride and C–H bond in papaya, and chlorides, and C=O and C–H bonds in sapota. Particle size and type of starch were evaluated by X-ray diffraction and microstructure through scanning electronic microscopy. A semicrystalline profile and average particle size of the fruit powders were evidenced by X-ray diffraction and lamellar/spherical morphologies by SEM. Presence of A-type starch was observed in all three fruits. Dependence of electric and dielectric properties on frequency and temperature was observed.

An Efficient Immersed Boundary Method Based on Penalized Direct Forcing for Simulating Flows Through Real Porous Media

2012 ◽  
Author(s):  
Wim-Paul Breugem ◽  
Vincent van Dijk ◽  
René Delfos
Keyword(s):  
Porous Medium ◽  
Ct Scan ◽  
Immersed Boundary Method ◽  
Volume Fraction ◽  
Solid Volume Fraction ◽  
Particle Diameter ◽  
Immersed Boundary ◽  
Average Particle ◽  
Boundary Method ◽  
Direct Forcing

A computationally efficient Immersed Boundary Method (IBM) based on penalized direct forcing was employed to determine the permeability of a real porous medium. The porous medium was composed of about 9000 glass beads with an average particle diameter of 1.93 mm and a porosity of 0.367. The forcing of the IBM depends on the local solid volume fraction within a computational grid cell. The latter could be obtained from a high-resolution X-ray Computed Tomography (CT) scan of the packing. An experimental facility was built to determine the permeability of the packing experimentally. Numerical simulations were performed for the same packing based on the data from the CT scan. For a scan resolution of 0.1 mm the numerical value for the permeability was nearly 70% larger than the experimental value. An error analysis indicated that the scan resolution of 0.1 mm was too coarse for this packing.

scholarly journals Preparation of Polyetherimide Nanoparticles by a Droplet Evaporation-Assisted Thermally Induced Phase-Separation Method

Polymers ◽  
2021 ◽  
Vol 13 (10) ◽  
pp. 1548
Author(s):  
Peng Zhu ◽  
Huapeng Zhang ◽  
Hongwei Lu
Keyword(s):  
Particle Size ◽  
Electron Microscope ◽  
Phase Separation ◽  
Average Particle Size ◽  
Particle Diameter ◽  
Droplet Evaporation ◽  
Average Particle ◽  
Thermally Induced Phase Separation ◽  
Thermally Induced ◽  
Pei Nanoparticles

The droplet evaporation effect on the preparation of polyetherimide (PEI) nanoparticles by thermally induced phase separation (TIPS) was studied. PEI nanoparticles were prepared in two routes. In route I, the droplet evaporation process was carried out after TIPS. In route II, the droplet evaporation and TIPS processes were carried out simultaneously. The surface tension and shape parameters of samples were measured via a drop shape analyzer. The Z-average particle diameter of PEI nanoparticles in the PEI/dimethyl sulfoxide solution (DMSO) suspension at different time points was tested by dynamic light scattering, the data from which was used to determine the TIPS time of the PEI/DMSO solution. The natural properties of the products from both routes were studied by optical microscope, scanning electron microscope and transmission electron microscope. The results show that PEI nanoparticles prepared from route II are much smaller and more uniform than that prepared from route I. Circulation flows in the droplet evaporation were indirectly proved to suppress the growth of particles. At 30 °C, PEI solid nanoparticles with 193 nm average particle size, good uniformity, good separation and good roundness were obtained. Route I is less sensitive to temperature than route II. Samples in route I were still the accumulations of micro and nanoparticles until 40 °C instead of 30 °C in route II, although the particle size distribution was not uniform. In addition, a film structure would appear instead of particles when the evaporation temperature exceeds a certain value in both routes. This work will contribute to the preparation of polymer nanoparticles with small and uniform particle size by TIPS process from preformed polymers.

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