Ion Channeling Studies of CdTe Films on GaAs

1988 ◽  
Vol 130 ◽  
Author(s):  
Barry Wilkens
Keyword(s):  
Thin Films ◽  
Lattice Mismatch ◽  
Ion Channeling ◽  
Model Based ◽  
Gaas Substrates ◽  
Cdte Films ◽  
Minimum Yield

AbstractThin films of [111] oriented CdTe have been MOCVD grown onto [111] GaAs substrates. When thicknesses exceed 1000Å the epitaxy is quite good (backscattering minimum yield of approximately 15%) in spite of a 14% lattice mismatch. A narrowing of the Cd angular scan suggests a displacement of some of the Cd atoms in the lattice. A model based on a Te vacancy is presented to describe the data.

MeV ion channeling studies of (111) CdTe films on (111) GaAs substrates

1989 ◽  
Vol 66 (10) ◽  
pp. 5096-5098
Author(s):  
B. J. Wilkens ◽  
H. H. Farrell ◽  
K. Pollard ◽  
A. Erbil
Keyword(s):  
Ion Channeling ◽  
Gaas Substrates ◽  
Cdte Films

Electron Channeling Analysis of Elastic Strains in InGaAs Thin Films

1989 ◽  
Vol 160 ◽  
Author(s):  
R. Keller ◽  
W. Zielinski ◽  
W.W. Gerberich ◽  
J.A. Kozubowski
Keyword(s):  
Thin Films ◽  
Elastic Strain ◽  
Lattice Mismatch ◽  
Electron Channeling ◽  
Gaas Substrates ◽  
Strain Determination ◽  
Film Substrate ◽  
Line Positions ◽  
Elastic Strain Field ◽  
Elastic Strains

AbstractInx Ga1-x As thin films were grown by MBE on (001) GaAs substrates. The associated 1% lattice mismatch resulted in the development of an elastic strain field in the systems. Electron channeling patterns (ECP) were then obtained from these samples in an SEM at different accelerating voltages, allowing data to be obtained over various information depths within the samples while keeping them intact. The ECPs showed sensitivity to the elastic strains both parallel and perpendicular to the film/substrate interface. Certain high order Laue zone (HOLZ) line positions showed good sensitivity to the Poisson strain in the films due to a rotation of atomic planes. These line positions varied with film thickness and distance from the interface. The technique shows promise as a tool for relatively easy elastic strain determination. Its limitations will also be discussed.

Transmission Electron Microscopy studies of the vacancy ordering in YSI2-X thin films

1991 ◽  
Vol 49 ◽  
pp. 562-563
Author(s):  
F.-R. Chen ◽  
T. L. Lee ◽  
L. J. Chen
Keyword(s):  
Crystal Structure ◽  
Electron Microscopy ◽  
Thin Films ◽  
Diffraction Pattern ◽  
Annealing Temperature ◽  
Lattice Mismatch ◽  
Si Substrate ◽  
Metal Thin Films ◽  
Transmission Electron ◽  
Vacancy Ordering

YSi2-x thin films were grown by depositing the yttrium metal thin films on (111)Si substrate followed by a rapid thermal annealing (RTA) at 450 to 1100°C. The x value of the YSi2-x films ranges from 0 to 0.3. The (0001) plane of the YSi2-x films have an ideal zero lattice mismatch relative to (111)Si surface lattice. The YSi2 has the hexagonal AlB2 crystal structure. The orientation relationship with Si was determined from the diffraction pattern shown in figure 1(a) to be and . The diffraction pattern in figure 1(a) was taken from a specimen annealed at 500°C for 15 second. As the annealing temperature was increased to 600°C, superlattice diffraction spots appear at position as seen in figure 1(b) which may be due to vacancy ordering in the YSi2-x films. The ordered vacancies in YSi2-x form a mesh in Si plane suggested by a LEED experiment.

Defects in β-SiC thin films grown on α-SiC substrates

1988 ◽  
Vol 46 ◽  
pp. 568-569
Author(s):  
Karren L. More
Keyword(s):  
Thin Films ◽  
Semiconductor Device ◽  
Lattice Mismatch ◽  
Chemical Vapor ◽  
Substrate Material ◽  
Growth Interface ◽  
Si Substrates ◽  
Thermal Expansion Coefficients ◽  
Device Applications ◽  
Expansion Coefficients

Beta-SiC is an ideal candidate material for use in semiconductor device applications. Currently, monocrystalline β-SiC thin films are epitaxially grown on {100} Si substrates by chemical vapor deposition (CVD). These films, however, contain a high density of defects such as stacking faults, microtwins, and antiphase boundaries (APBs) as a result of the 20% lattice mismatch across the growth interface and an 8% difference in thermal expansion coefficients between Si and SiC. An ideal substrate material for the growth of β-SiC is α-SiC. Unfortunately, high purity, bulk α-SiC single crystals are very difficult to grow. The major source of SiC suitable for use as a substrate material is the random growth of {0001} 6H α-SiC crystals in an Acheson furnace used to make SiC grit for abrasive applications. To prepare clean, atomically smooth surfaces, the substrates are oxidized at 1473 K in flowing 02 for 1.5 h which removes ∽50 nm of the as-grown surface. The natural {0001} surface can terminate as either a Si (0001) layer or as a C (0001) layer.

Structural properties of GaAs/InGaAs/GaAs (001) and InGaAs/GaAs (001) heterostructures and correlation with electronic properties

1990 ◽  
Vol 48 (4) ◽  
pp. 602-603
Author(s):  
J.M. Bonar ◽  
R. Hull ◽  
R. Malik ◽  
R. Ryan ◽  
J.F. Walker
Keyword(s):  
Band Gap ◽  
Electronic Properties ◽  
Gaas Substrate ◽  
Critical Thickness ◽  
Lattice Mismatch ◽  
Band Offset ◽  
Misfit Dislocations ◽  
Gaas Substrates ◽  
Gaas Structure ◽  
Low X

In this study we have examined a series of strained heteropeitaxial GaAs/InGaAs/GaAs and InGaAs/GaAs structures, both on (001) GaAs substrates. These heterostructures are potentially very interesting from a device standpoint because of improved band gap properties (InAs has a much smaller band gap than GaAs so there is a large band offset at the InGaAs/GaAs interface), and because of the much higher mobility of InAs. However, there is a 7.2% lattice mismatch between InAs and GaAs, so an InxGa1-xAs layer in a GaAs structure with even relatively low x will have a large amount of strain, and misfit dislocations are expected to form above some critical thickness. We attempt here to correlate the effect of misfit dislocations on the electronic properties of this material.The samples we examined consisted of 200Å InxGa1-xAs layered in a hetero-junction bipolar transistor (HBT) structure (InxGa1-xAs on top of a (001) GaAs buffer, followed by more GaAs, then a layer of AlGaAs and a GaAs cap), and a series consisting of a 200Å layer of InxGa1-xAs on a (001) GaAs substrate.

The effect of deposition mechanism on the properties of epitaxial PbS films grown from acidic bath

2021 ◽  
Vol 5 (6) ◽  
pp. 2860-2866
Author(s):  
Maayan Perez ◽  
Michael Shandalov ◽  
Yuval Golan ◽  
Tzvi Templeman ◽  
Vladimir Ezersky ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Deposition Mechanism ◽  
Gaas Substrates ◽  
Acidic Bath

Monocrystalline, epitaxial PbS thin films were deposited from acidic bath on GaAs substrates. The effect of deposition mechanism on the optical properties of the films was analyzed using the Urbach theory.

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