Flashlamp-Pumped Dye and Excimer Laser Planarization of Thin Metal Films

1988 ◽  
Vol 129 ◽  
Author(s):  
Paul F. Marella ◽  
David B. Tuckerman ◽  
R. Fabian Pease
Keyword(s):  
Laser Pulse ◽  
Surface Topography ◽  
Linear Model ◽  
Time Evolution ◽  
Pulse Duration ◽  
Excimer Laser ◽  
Metal Films ◽  
Gold Films ◽  
Thin Metal Films ◽  
Pulse Excimer Laser

ABSTRACTThe fundamental differences between excimer (≈ 30 ns pulse duration) and flashlamp-pumped dye (≈ 500 ns pulse duration) laser planarization are examined for 1.5-2 µm thick gold films over SiO2 layers. Test structures containing bar patterns (square waves) of 5000 Å peak-to-trough amplitude with spatial periods ranging from 10 µm to 100 µm were prepared and laser-irradiated. A linear model is presented which describes the time-evolution of the film's surface topography when melted with a dye laser pulse. Excimer laser planarization is found to be susceptible to evaporative recoil effects which may cause undesired pattern amplification.

Threshold for Single Excimer Laser Pulse Backside Removal of Thin Metal Films from Optical Quartz

1988 ◽  
Vol 100 ◽  
Author(s):  
R. J. Baseman ◽  
J. C. Andreshak
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Boiling Point ◽  
Laser Energy ◽  
Minimum Energy ◽  
Gold Surface ◽  
Metal Films ◽  
Gold Films ◽  
Element Calculation ◽  
Excimer Laser Pulse

ABSTRACTThe minimum energy in a 248 nm, 25 ns long excimer laser pulse required to remove thin Au and Cr films from optical quartz has been measured. Heating of the films by the laser has been modelled with a finite element calculation. Assuming that at threshold, all of the laser energy contributes to film removal, the calculations show that the gold films are removed when the heated gold surface reaches the atmospheric boiling point, and that temperatures well in excess of the atmospheric boiling point are required to remove the Cr films, with the required temperatures increasing with film thickness.

scholarly journals Femtosecond Laser Pulse Train Effect on Optical Characteristics and Nonequilibrium Heat Transfer in Thin Metal Films

2010 ◽  
Vol 51 (6) ◽  
pp. 1156-1162 ◽  
Author(s):  
Hyung Sub Sim ◽  
Seungho Park ◽  
Tae-Hyoung Kim ◽  
Young Ki Choi ◽  
Joon Sik Lee ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Laser Pulse ◽  
Femtosecond Laser ◽  
Femtosecond Laser Pulse ◽  
Pulse Train ◽  
Metal Films ◽  
Thin Metal ◽  
Optical Characteristics ◽  
Thin Metal Films

scholarly journals Excimer laser plasma to control laser pulse duration

1997 ◽  
Vol 15 (2) ◽  
pp. 235-240 ◽  
Author(s):  
Qihong Lou
Keyword(s):  
Laser Pulse ◽  
Laser Beam ◽  
Pulse Duration ◽  
Excimer Laser ◽  
Laser Plasma ◽  
Injection Locking ◽  
Laser Pulse Duration ◽  
Control Laser

An injection-locking excimer laser beam with a pulse duration of 25 ns is focused on the surface of a polymide film. The laser beam that passes through the etching film is shorter than the original one. By optimizing the thickness of the film and the beam powerdensity, a pulse with a 3-ns pulse duration can be obtained using this switch technology.

Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers

2010 ◽  
Vol 108 (11) ◽  
pp. 114514 ◽  
Author(s):  
Sonja Hermann ◽  
Tara Dezhdar ◽  
Nils-Peter Harder ◽  
Rolf Brendel ◽  
Michael Seibt ◽  
...  
Keyword(s):  
Solar Cell ◽  
Laser Ablation ◽  
Laser Pulse ◽  
Surface Topography ◽  
Pulse Duration ◽  
Laser Pulse Duration ◽  
Front Side ◽  
Cell Front

scholarly journals UV excimer laser produced plasma and it's application to laser plasma switching

1988 ◽  
Vol 6 (2) ◽  
pp. 335-341 ◽  
Author(s):  
Qihong Lou
Keyword(s):  
Laser Pulse ◽  
Pulse Duration ◽  
Excimer Laser ◽  
Laser Plasma ◽  
Laser Pulse Duration ◽  
Excimer Lasers ◽  
Xecl Laser ◽  
Uv Laser ◽  
X Ray ◽  
First Time

The characteristics of a laser plasma created by a high intensity UV excimer laser were investigated. The UV laser plasma was used as a switch for control of the laser pulse duration for the first time. An X-ray preionized XeCl laser pulse duration can be changed from 10 to 85 ns. This technique is useful for many applications of excimer lasers requiring various pulse durations.

The thermo-mechanical behavior of thin metal films under nanosecond laser pulse excitation above the thermoelastic regime

2014 ◽  
Vol 118 (2) ◽  
pp. 739-748 ◽  
Author(s):  
Vasilis Dimitriou ◽  
Evaggelos Kaselouris ◽  
Yannis Orphanos ◽  
Makis Bakarezos ◽  
Nikolaos Vainos ◽  
...  
Keyword(s):  
Laser Pulse ◽  
Mechanical Behavior ◽  
Metal Films ◽  
Thin Metal ◽  
Pulse Excitation ◽  
Nanosecond Laser Pulse ◽  
Nanosecond Laser ◽  
Thin Metal Films ◽  
Laser Pulse Excitation
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