Photogenerated Carrier Confinement During the Laser-Controlled Aqueous Etching of GaAs/AlGaAs Nultilayers
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ABSTRACTThe sensitivity of the laser-controlled aqueous etching to the optical and electrical properties of semiconductors was utilized during the etching of n-GaAs/n-AlGaAs multilayers to produce novel microstructures. Since this process is controlled by the transport of photogenerated holes to the semiconductor/solution interface, we found that the morphology of etched features is dependent on the bandgap and hole diffusion length of each layer within the heterostructure.
2017 ◽
Vol 91
(13)
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pp. 2613-2620
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2003 ◽
Vol 14
(0)
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pp. 149-153
2019 ◽
Vol 11
(5)
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pp. 05025-1-05025-6
2019 ◽
pp. 1255-1265
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