Ion Implanted Strip Optical Waveguides in GaAs/GaAl as MQW Material
Keyword(s):
ABSTRACTThis paper is the first report of the use of Si+ implantation into GaAs/GaAlAs MQW material to form optical waveguides operating at a wavelength of 1.15μm. Lateral confinement is achieved by mixing of the MQW material which is produced by the implantation of Si+ and subsequent annealing at 750°C. The properties of these waveguides are compared with those of chemically etched rib waveguides and are shown to have reasonably low losses.
2009 ◽
Vol 55
(6(1))
◽
pp. 2701-2704
◽
1992 ◽
Vol 10
(4)
◽
pp. 426-431
◽
2001 ◽
Vol 190
(1-6)
◽
pp. 153-157
◽
2007 ◽
Vol 29
(11)
◽
pp. 1523-1542
◽
Keyword(s):
Keyword(s):