Real-time Control System for Improved CMP Pad Profiles

2010 ◽  
Vol 1249 ◽  
Author(s):  
Gregory E Menk ◽  
Sivakumar Dhandapani ◽  
Charles Chad Garretson ◽  
Shou-Sung Chang ◽  
Christopher Cocca ◽  
...  
Keyword(s):  
Real Time ◽  
Chemical Mechanical Planarization ◽  
Groove Depth ◽  
Real Time Control ◽  
New Approach ◽  
Loop Control ◽  
Time Control ◽  
Slurry Transport ◽  
Uniform Reduction

AbstractChemical mechanical planarization (CMP) pads require conditioning to maintain the surfaces yielding optimal performance. However, conditioning not only regenerates the pad surface but also wears away the pad material and slurry transport grooves. Non-optimized conditioning may result in non-uniform pad profiles, limiting the productive lifetimes of pads. A new approach to conditioning uses closed-loop control (CLC) of conditioning sweep to enable uniform groove depth removal across the pad, throughout pad life. A sensor integrated into the conditioning arm enables the pad stack thickness to be monitored in situ and in real time. Feedback from the thickness sensor is used to modify pad conditioner dwell times across the pad surface, correcting for drifts in the pad profile that may arise as the pad and disk age. Pad profile CLC enables uniform reduction in groove depth with continued conditioning, providing longer consumables lifetimes and reduced operating costs.

Closed-Loop Control of MBE Using an Integrated Multi-Sensor System

1997 ◽  
Vol 502 ◽  
Author(s):  
John A. Roth
Keyword(s):  
Substrate Temperature ◽  
Real Time ◽  
Epitaxial Layer ◽  
Control Algorithms ◽  
Effusion Cell ◽  
Real Time Control ◽  
Loop Control ◽  
Time Control ◽  
Layer Composition

ABSTRACTThe use of in situ sensors to achieve real-time control of molecular beam epitaxy (MBE) is a rapidly evolving technology that promises to revolutionize MBE in terms of process repeatability and first-pass success, and consequently to improve the overall yield and reduce the cost of the process. To achieve robust real-time control of MBE, we have constructed a multiple-sensor control system comprising in situ sensors for substrate temperature, for effusion cell fluxes, and for the epitaxial layer composition and thickness, along with advanced software to manage the sensor information and execute sensor-feedback control algorithms. This system has been used to grow a number of different III-V semiconductor materials and device structures, including heterojunction bipolar transistors, resonant tunneling devices, and mid-IR lasers. In the present paper, we present results demonstrating control and regulation of substrate temperature and epitaxial layer composition during the growth of lattice-matched InGaAs and InA1As on InP. The control algorithms and software used in the system are described, and we discuss how the synergistic application of multiple sensors allows the regime of composition control to be expanded beyond what would be possible with only a single composition sensor.

scholarly journals Real-Time Control of a Catalytic Solid in a Fixed-Bed Reactor Based on In Situ Spectroscopy

2007 ◽  
Vol 46 (28) ◽  
pp. 5412-5416 ◽  
Author(s):  
Simona M. Bennici ◽  
Bas M. Vogelaar ◽  
T. Alexander Nijhuis ◽  
Bert M. Weckhuysen
Keyword(s):  
Real Time ◽  
Fixed Bed ◽  
Fixed Bed Reactor ◽  
In Situ Spectroscopy ◽  
Real Time Control ◽  
Time Control

IN-SITU NUTRIENT SENSORS FOR REAL-TIME CONTROL OF BIOLOGICAL NUTRIENT REMOVAL

2003 ◽  
Vol 2003 (9) ◽  
pp. 255-276
Author(s):  
Anders Lynggaard-Jensen ◽  
Ida Rasmussen ◽  
Niels H. Eisum ◽  
Jørgen Steen-Pedersen
Keyword(s):  
Real Time ◽  
Nutrient Removal ◽  
Biological Nutrient Removal ◽  
Real Time Control ◽  
Time Control

scholarly journals Real-Time Control of a Catalytic Solid in a Fixed-Bed Reactor Based on In Situ Spectroscopy

2007 ◽  
Vol 119 (28) ◽  
pp. 5508-5512 ◽  
Author(s):  
Simona M. Bennici ◽  
Bas M. Vogelaar ◽  
T. Alexander Nijhuis ◽  
Bert M. Weckhuysen
Keyword(s):  
Real Time ◽  
Fixed Bed ◽  
Fixed Bed Reactor ◽  
In Situ Spectroscopy ◽  
Real Time Control ◽  
Time Control

Design and Implementation of a Kind of Intelligent Electric Blanket Temperature Control System

2013 ◽  
Vol 432 ◽  
pp. 447-452
Author(s):  
Rong Li ◽  
Zhe Ming Duan ◽  
Wei Zhou ◽  
Bing Chao Dong
Keyword(s):  
Real Time ◽  
Temperature Control ◽  
Temperature Control System ◽  
Single Chip ◽  
Real Time Control ◽  
Loop Control ◽  
Relay Control ◽  
Time Control ◽  
Control Relay ◽  
Design And Manufacture

Temperature control is the key problem in the design and manufacture of electric blankets. In order to solve current technological failure to real-time control of the temperature of electric blanket, this paper applies technical means of DS18B20 temperature acquisition and relay control temperature heating, together with key circuit, display circuit as well as other auxiliary circuit, and the system achieved electric blanket working temperature real-time intelligent control. Relay output controlled the temperature closed loop control by single-chip microcomputer, and a new type of intelligent temperature control technology of electric blanket is developed, real-time temperature control is enhanced, which improved the security and energy conservation of electric blanket.

A New Approach for Real-Time Control of Urban Traffic Networks

1983 ◽  
Vol 16 (4) ◽  
pp. 237-241 ◽  
Author(s):  
M. Drouin ◽  
H. Abou-Kandil ◽  
G. Dib ◽  
P. Bertrand
Keyword(s):  
Real Time ◽  
Urban Traffic ◽  
Traffic Networks ◽  
Real Time Control ◽  
New Approach ◽  
Time Control ◽  
Urban Traffic Networks

scholarly journals Real time control of curved laser welding processes by cellular neural networks (CNN): first results

2010 ◽  
Vol 8 ◽  
pp. 117-122 ◽  
Author(s):  
L. Nicolosi ◽  
R. Tetzlaff
Keyword(s):  
Control System ◽  
Laser Welding ◽  
Real Time ◽  
Laser Beam Welding ◽  
Recent Analysis ◽  
Feedback Signal ◽  
Real Time Control ◽  
Loop Control ◽  
Time Control ◽  
Welding Processes

Abstract. In the last decades the laser beam welding (LBW) has outclassed older welding techniques in the industrial scenario. Despite the improvement in welding technology, sophisticated methods of fault detection are not commonly used in commercially available equipments yet. A recent analysis of process images have revealed the possibility to build up a real time closed loop control system. By the use of image based quality features, a feedback signal can be provided to maintain the process in the desired state. The development of the presented visual control system has been focused on the adjustment of the laser power according to the detection of the so called full penetration hole. Due to the high dynamics of the laser welding, a fast real time image processing with controlling rates in the multi kilo Hertz range is necessary to have a robust feedback control. In this paper an algorithm for the real time control of welding processes is described. It has been implemented on the Eye-RIS v1.2, a visual system which mounts a cellular structure. By applying this algorithm in real time applications, controlling rates of about 7 kHz can be reached. In the following some real time control results are also described.

In Situ Monitoring and Real-Time Control of Gate Hardmask Etching in High-Volume Manufacturing of ICs

2008 ◽  
Vol 155 (11) ◽  
pp. D699 ◽  
Author(s):  
Lele Chen ◽  
Weinan Jiang ◽  
Todd Pao ◽  
Bill Lin ◽  
Linda Xu ◽  
...  
Keyword(s):  
Real Time ◽  
High Volume ◽  
In Situ Monitoring ◽  
Real Time Control ◽  
Time Control
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