Role of Hydrogen in Silicon Nitride Films Prepared by Various Deposition Techniques

1988 ◽  
Vol 118 ◽  
Author(s):  
J. Kanicki
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Deposition Techniques

scholarly journals DEPOSITION TECHNIQUES AND PROPERTIES OF STRAIN COMPENSATED LPCVD SILICON NITRIDE FILMS

1986 ◽  
Author(s):  
H. Guckel ◽  
D.K. Showers ◽  
D.W. Burns ◽  
C.K. Nesler ◽  
C.R. Rutigliano
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Deposition Techniques

Role of incorporated hydrogen in non-stoichiometric photo-deposited silicon nitride films

2002 ◽  
Vol 415 (1-2) ◽  
pp. 53-56 ◽  
Author(s):  
B.S Sahu ◽  
P Srivastava ◽  
H.K Sehgal ◽  
O.P Agnihotri
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films

The role of N-Si-O bonding configurations in tunable photoluminescence of oxygenated amorphous silicon nitride films

2015 ◽  
Vol 106 (23) ◽  
pp. 231103 ◽  
Author(s):  
Pengzhan Zhang ◽  
Kunji Chen ◽  
Zewen Lin ◽  
Hengping Dong ◽  
Wei Li ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Amorphous Silicon ◽  
Amorphous Silicon Nitride ◽  
Silicon Nitride Films
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