Microstructural and Electronic Properties of Hydrogenated Amorphous Silicon Films Deposited by Magnetron Reactive Sputtering.

1988 ◽  
Vol 118 ◽  
Author(s):  
Mustafa Pinarbasi ◽  
Nagi Maley ◽  
Alan Myers ◽  
Igor Szafranek ◽  
John R. Abelson ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Electronic Properties ◽  
Hydrogenated Amorphous Silicon ◽  
Reactive Sputtering ◽  
Silicon Films ◽  
Hydrogenated Amorphous

Hydrogenated amorphous silicon films deposited by DC planar magnetron reactive sputtering

1987 ◽  
Vol 3 (4) ◽  
pp. 331-340 ◽  
Author(s):  
Mustafa Pinarbasi ◽  
Lih Hsin Chou ◽  
Nagi Maley ◽  
Alan Myers ◽  
David Leet ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Reactive Sputtering ◽  
Silicon Films ◽  
Planar Magnetron ◽  
Hydrogenated Amorphous

Study of the electronic properties of hydrogenated amorphous silicon films by femtosecond spectroscopy

2013 ◽  
Vol 47 (10) ◽  
pp. 1358-1361
Author(s):  
M. G. Sevastyanov ◽  
V. S. Lobkov ◽  
A. G. Shmelev ◽  
A. V. Leontev ◽  
V. L. Matuhin ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Electronic Properties ◽  
Hydrogenated Amorphous Silicon ◽  
Femtosecond Spectroscopy ◽  
Silicon Films ◽  
Hydrogenated Amorphous
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