Optical and electronic properties of hydrogenated amorphous silicon films deposited by square-wave modulated RF discharges of silane-he mixtures
1994 ◽
Vol 58
(4)
◽
pp. 365-369
◽
1985 ◽
Vol 77-78
◽
pp. 257-260
◽
2001 ◽
Vol 120
(5-6)
◽
pp. 243-248
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