Optical and electronic properties of hydrogenated amorphous silicon films deposited by square-wave modulated RF discharges of silane-he mixtures

1994 ◽  
Vol 58 (4) ◽  
pp. 365-369 ◽  
Author(s):  
P. Roca i Cabarrocas ◽  
A. Loret
2013 ◽  
Vol 47 (10) ◽  
pp. 1358-1361
Author(s):  
M. G. Sevastyanov ◽  
V. S. Lobkov ◽  
A. G. Shmelev ◽  
A. V. Leontev ◽  
V. L. Matuhin ◽  
...  

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