Molecular Beam Epitaxial Growth of Gaas on Silicon with Buried Implanted Oxides
Keyword(s):
AbstractWe report the first results of direct growth of GaAs by molecular beam epitaxy on nominally (100) oriented silicon with buried implanted oxides. Rutherford backscattering and transmission electron microscopy techniques have been used to characterize these layers. The formation of hillocks and a uniform layer of GaAs in the intervening regions between hillocks have been observed. Microtwins, dislocations and antiphase domain boundaries are the predominant defects observed in these layers.
1994 ◽
Vol 138
(1-4)
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pp. 48-54
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1967 ◽
Vol 25
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pp. 312-313
1998 ◽
Vol 13
(12)
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pp. 3571-3579
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