Resonant Sensors for Microfluidic Applications

2006 ◽  
Vol 951 ◽  
Author(s):  
Florentina Niebelschütz ◽  
Katja Tonisch ◽  
Volker Cimalla ◽  
Klemens Brückner ◽  
Ralf Stephan ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Microfluidic Channels ◽  
Biological Cells ◽  
Ambient Conditions ◽  
Resonant Sensors ◽  
Sensing Applications ◽  
Resonance Shift ◽  
Active Layers ◽  
Physical Sensor

ABSTRACTIn this work we present both resonators working at ambient conditions and their first application as a biological and physical sensor. Singly- and doubly-clamped resonators of different geometries were realized using active layers of silicon carbide and aluminum nitride. The resonators were excited by magneto-motive actuation. The quality factor reached 350 and 50000 in air and in vacuum (2-5 10−5 mbar), respectively, which is sufficient for sensing applications in air. The resonance shift caused by mass loadings in the range of picograms and by single biological cells was measured at ambient conditions. Initial non-resonant measurements in liquids such as propanol were performed to investigate the possibility of viscosity measurements in small volumes such as microfluidic channels and droplets.

scholarly journals Sensing applications of micro- and nanoelectromechanical resonators

2007 ◽  
Vol 221 (2) ◽  
pp. 59-65 ◽  
Author(s):  
F Niebelschütz ◽  
V Cimalla ◽  
K Brückner ◽  
R Stephan ◽  
K Tonisch ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminium Nitride ◽  
Nanoelectromechanical Systems ◽  
Silicon Substrates ◽  
Mass Loading ◽  
Quality Factors ◽  
Ambient Conditions ◽  
Resonant Frequencies ◽  
Sensing Applications ◽  
Active Layers

The sensitivity of micro- and nanoscale resonator beams for sensing applications in ambient conditions was investigated. Micro-electromechanical (MEMS) and nanoelectromechanical systems (NEMS) were realized using silicon carbide (SiC) and polycrystalline aluminium nitride (AlN) as active layers on silicon substrates. Resonant frequencies and quality factors in vacuum as well as in air were measured. The sensitivity behaviour under ambient conditions with a mass loading in the range of picogram (pg) was verified and measurements with biological mass loading were performed. In addition, the sensitivity to pressure variations was analysed.

Synthesis of Aluminum Nitride-Silicon Carbide Solid Solutions by Combustion Nitridation

2004 ◽  
Vol 83 (5) ◽  
pp. 1108-1112 ◽  
Author(s):  
Manshi Ohyanagi ◽  
Kenshiro Shirai ◽  
Nadejda Balandina ◽  
Masaaki Hisa ◽  
Zuhair A. Munir
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Solid Solutions

Surface Characterization of Silicon Carbide Following Shallow Implantation of Palladium Ions

2005 ◽  
Vol 900 ◽  
Author(s):  
Claudiu I. Muntele ◽  
Sergey Sarkisov ◽  
Iulia Muntele ◽  
Daryush Ila
Keyword(s):  
Silicon Carbide ◽  
Surface Characterization ◽  
Wide Bandgap ◽  
Electrical Contacts ◽  
Temperature Dependent ◽  
Wide Bandgap Semiconductor ◽  
Hydrogen Sensing ◽  
Fast Switching ◽  
Sensing Applications

ABSTRACTSilicon carbide is a promising wide-bandgap semiconductor intended for use in fabrication of high temperature, high power, and fast switching microelectronics components running without cooling. For hydrogen sensing applications, silicon carbide is generally used in conjunction with either palladium or platinum, both of them being good catalysts for hydrogen. Here we are reporting on the temperature-dependent surface morphology and depth profile modifications of Au, Ti, and W electrical contacts deposited on silicon carbide substrates implanted with 20 keV Pd ions.

Crystal quality and growth evolution of aluminum nitride on silicon carbide

2006 ◽  
Vol 203 (7) ◽  
pp. 1708-1711 ◽  
Author(s):  
Craig G. Moe ◽  
Yuan Wu ◽  
Stacia Keller ◽  
James S. Speck ◽  
Steven P. DenBaars ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Crystal Quality ◽  
Growth Evolution

scholarly journals Cantilever-Droplet-Based Sensing of Magnetic Particle Concentrations in Liquids

Sensors ◽  
2019 ◽  
Vol 19 (21) ◽  
pp. 4758 ◽  
Author(s):  
Wilson Ombati Nyang’au ◽  
Andi Setiono ◽  
Maik Bertke ◽  
Harald Bosse ◽  
Erwin Peiner
Keyword(s):  
Water Droplet ◽  
Water Evaporation ◽  
Ambient Conditions ◽  
Evaporation Time ◽  
Particle Count ◽  
Microcantilever Sensors ◽  
Small Water ◽  
Monodispersed Particles ◽  
Sensing Applications ◽  
Cantilever Sensor

Cantilever-based sensors have attracted considerable attention in the recent past due to their enormous and endless potential and possibilities coupled with their dynamic and unprecedented sensitivity in sensing applications. In this paper, we present a technique that involves depositing and vaporizing (at ambient conditions) a particle-laden water droplet onto a defined sensing area on in-house fabricated and commercial-based silicon microcantilever sensors. This process entailed the optimization of dispensing pressure and time to generate and realize a small water droplet volume (Vd = 49.7 ± 1.9 pL). Moreover, we monitored the water evaporation trends on the sensing surface and observed total evaporation time per droplet of 39.0 ± 1.8 s against a theoretically determined value of about 37.14 s. By using monodispersed particles in water, i.e., magnetic polystyrene particles (MPS) and polymethyl methacrylate (PMMA), and adsorbing them on a dynamic cantilever sensor, the mass and number of these particles were measured and determined comparatively using resonant frequency response measurements and SEM particle count analysis, respectively. As a result, we observed and reported monolayer particles assembled on the sensor with the lowest MPS particles count of about 19 ± 2.

Seeded PVT Growth of Aluminum Nitride on Silicon Carbide

2003 ◽  
Vol 433-436 ◽  
pp. 983-986 ◽  
Author(s):  
Boris M. Epelbaum ◽  
Matthias Bickermann ◽  
Albrecht Winnacker
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride
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