Growths of AlInN Single Layers and Distributed Bragg Reflectors for VCSELs
Keyword(s):
ABSTRACTWe investigated MOVPE growth conditions for AlInN layers with high growth rates and obtained 0.5µm/h with smooth surfaces. We found that short gas mixing time, relatively high growth temperature, and very low In/Al supply ratio were key growth parameters in order to obtain the AlInN layers with high growth rate and smooth surface simultaneously. AlInN/GaN DBRs grown under such growth conditions showed smooth surfaces and a reflectivity of over 99%.
Keyword(s):
Keyword(s):
2000 ◽
Vol 214-215
◽
pp. 1019-1023
◽
Keyword(s):
2007 ◽
Vol 67
(2)
◽
pp. 293-297
◽
Keyword(s):
2006 ◽
Vol 527-529
◽
pp. 283-286
◽
Keyword(s):
1998 ◽
Vol 184-185
(1-2)
◽
pp. 777-782
◽