Silicon Platform for Mid-infrared Optofluidic Sensors
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ABSTRACTMid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 um (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.
2011 ◽
Vol 156
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pp. 994-1001
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2019 ◽
Vol 223
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pp. 441-446
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2006 ◽
pp. 2043-2048
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2018 ◽
Vol 144
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pp. 02025
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