Ultra Low-k Materials Based on Self-Assembled Organic Polymers

2011 ◽  
Vol 1335 ◽  
Author(s):  
M. Pantouvaki ◽  
L. Zhao ◽  
C. Huffman ◽  
K. Vanstreels ◽  
I. Ciofi ◽  
...  
Keyword(s):  
Pore Size ◽  
Material Properties ◽  
Open Porosity ◽  
Dielectric Breakdown ◽  
Organic Polymers ◽  
Plasma Damage ◽  
Small Pore Size ◽  
Small Pore ◽  
Lower Porosity ◽  
Low K

ABSTRACTThe material properties of two ultra low-k organic polymers are characterized for copper interconnect integration. The k-values are 2.2-2.3 for both. Compared to OSG materials of similar k-values, these polymers have lower porosity and smaller pore size, achieved using selfassembled chemistry. Both materials demonstrate excellent resistance to plasma damage: no water uptake was detected after exposure to selected etching plasmas. This characteristic, combined with the small pore size and low porosity, results in the successful integration of the organic low-ks in 80 nm spacing with no significant increase in the integrated k-values.It is found that higher open porosity in polymer A is accompanied by higher leakage current, which is not however linked to lower dielectric breakdown lifetimes.

Characterization and Integration in Cu Damascene Structures of AURORA, an Inorganic Low-k Dielectric

2000 ◽  
Vol 612 ◽  
Author(s):  
R. A. Donaton ◽  
B. Coenegrachts ◽  
E. Sleeckx ◽  
M. Schaekers ◽  
G. Sophie ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Pore Size ◽  
Carbon Concentration ◽  
Low Carbon ◽  
Small Pore Size ◽  
Damascene Process ◽  
Small Pore ◽  
Line Spacing ◽  
Low K

AbstractAURORA films, which have a Si-O-Si network with –CH3 terminations, were characterized and integrated into Cu single damascene structures. The relatively low carbon concentration (∼ 20%) and the very small pore size (∼ 0.6 nm) found could be advantageous during integration of AURORA. Integration of AURORA into Cu single damascene structures was successfully achieved. Suitable resist strip processes, which are critical for Si-O-C type materials, were developed, resulting in trenches with satisfactory profiles. After a complete single damascene process, a interline dielectric constant value of 2.7 was found for line spacing down to 0.25 µm.

ChemInform Abstract: C2-C4 OLEFINS BY REACTION OF METHANOL ON ZEOLITES OF SMALL PORE SIZE

1982 ◽  
Vol 13 (42) ◽  
Author(s):  
U. DETTMEIER ◽  
H. LITTERER ◽  
H. BALTES ◽  
W. HERZOG ◽  
E. I. LEUPOLD ◽  
...  
Keyword(s):  
Pore Size ◽  
Small Pore Size ◽  
Small Pore

Expanding Small Pore Size of the Bimodal Catalyst with Surfactant and Its Application in Slurry-phase Fischer-Tropsch Synthesis

2016 ◽  
Vol 1 (4) ◽  
pp. 778-783 ◽  
Author(s):  
Daisuke Ishihara ◽  
Jian Sun ◽  
Jie Li ◽  
Qinhong Wei ◽  
Noritatsu Tsubaki
Keyword(s):  
Pore Size ◽  
Tropsch Synthesis ◽  
Fischer Tropsch ◽  
Fischer Tropsch Synthesis ◽  
Small Pore Size ◽  
Slurry Phase ◽  
Small Pore

Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance

2011 ◽  
Vol 519 (11) ◽  
pp. 3619-3626 ◽  
Author(s):  
Premysl Marsik ◽  
Adam M. Urbanowicz ◽  
Patrick Verdonck ◽  
David De Roest ◽  
Hessel Sprey ◽  
...  
Keyword(s):  
Material Properties ◽  
Dielectric Material ◽  
Ultraviolet Curing ◽  
Plasma Damage ◽  
Damage Resistance ◽  
Low K

EVALUATION OF ANTI-AGING AND ANTI-ACNE EFFECT OF ANDALIMAN (ZANTHOXYLUM ACANTHOPODIUM DC.) ETHANOLIC EXTRACT PEEL OFF GEL MASK

2018 ◽  
Vol 11 (13) ◽  
pp. 90
Author(s):  
Ismanelly Hanum T ◽  
Lia Laila
Keyword(s):  
Polyvinyl Alcohol ◽  
Pore Size ◽  
Dosage Form ◽  
Black Spot ◽  
Ethanolic Extract ◽  
Distilled Water ◽  
Small Pore Size ◽  
Small Pore ◽  
Carbomer 940 ◽  
Skin Moisture

Objective: The study was conducted to evaluate the anti-aging and anti-acne effect of and aliman ethanolic extract (AEE) in the form of peel off gel mask (PGM) on human skin. Methods: The formulation of PGM base was consisted of polyvinyl alcohol, glycerine, methylparaben, propylparaben, Carbomer 940, and distilled water (blank). The AEE (30%) was formulated in the PGM base and labeled as F1. The anti-aging and anti-acne tests were conducted by comparing the blank and the F1. The evaluation of anti-aging activity was conducted using skin analyzer apparatus. The aging parameters were moisture, evenness, pore size, black spot, and wrinkle of the skin. The anti-acne evaluation was conducted on color, shape, volume, and number of acne. The data were collected for 4 weeks. Results: The anti-aging evaluation of andaliman PGM showed that the and AEE PGM could pretend the skin moisture, skin evenness, small pore size, and declined in number of black spot and wrinkle. The anti-acne evaluation showed the healing of acne after 4 weeks treatment. Conclusion: It is concluded that and AEE PGM can be used as an effective anti-aging and anti-acne dosage form.

A cobalt metal-organic framework with small pore size for adsorptive separation of CO2 over N2 and CH4

AIChE Journal ◽  
2017 ◽  
Vol 63 (10) ◽  
pp. 4532-4540 ◽  
Author(s):  
Bohan Shan ◽  
Jiuhao Yu ◽  
Mitchell R. Armstrong ◽  
Dingke Wang ◽  
Bin Mu ◽  
...  
Keyword(s):  
Pore Size ◽  
Metal Organic Framework ◽  
Cobalt Metal ◽  
Small Pore Size ◽  
Adsorptive Separation ◽  
Small Pore ◽  
Metal Organic ◽  
Separation Of Co2 ◽  
Organic Framework

The Study Based on LABVIEW of the Positioning Accuracy of Spinneret Microporous Fine Machine

2013 ◽  
Vol 712-715 ◽  
pp. 1347-1350
Author(s):  
Si Yu Liu ◽  
Pei Feng ◽  
Chong Chang Yang
Keyword(s):  
Pore Size ◽  
High Precision ◽  
Vital Role ◽  
Positioning System ◽  
Precision Positioning ◽  
Positioning Accuracy ◽  
Small Pore Size ◽  
Small Pore ◽  
Positioning Method

The microporous on spinneret has the characteristics of high precision, small pore size and large quantity. Spinneret microporous finishing operation is mainly used for removing the burr formed on the spinneret silk surface after micropores drilling and punching. The burrs seriously affect the quality of the spinning fibers. Micropore spinneret finishing plays a vital role in improving the quality of processing micropore. This paper introduces a system consisting of the spinneret micropore fine machine,then focuses on fine machine positioning system and proposes a high-precision positioning method of the microporous.

Effect of Blend Ratio on Morphology and Swelling Properties of PVA/Chitosan Nanofibers

2017 ◽  
Vol 901 ◽  
pp. 79-84 ◽  
Author(s):  
Nasikhudin ◽  
Intan Puspitasari ◽  
Markus Diantoro ◽  
Ahmad Kusumaatmaja ◽  
Kuwat Triyana
Keyword(s):  
Pore Size ◽  
Smooth Surface ◽  
Fiber Diameter ◽  
High Porosity ◽  
Swelling Properties ◽  
Blend Ratio ◽  
Small Pore Size ◽  
Small Pore ◽  
Electrospinning Method ◽  
Solution Increase

PVA/chitosan nanofibers have been prepared by electrospinning method. A novel nanofibers mat was prepared in a various blend ratio of PVA to chitosan. The structure of PVA/chitosan nanofibers was examined by FTIR and SEM. The results showed that PVA/chitosan nanofibers were successfully formed. The result of FTIR indicates that PVA and chitosan exist in PVA/chitosan Nanofibers. SEM observation showed that the fiber has several hundred nanometers with a smooth surface. It also observed that fibers diameters decreased by increase percentage of chitosan, this occurs because of the conductivity of electrospun solution increase and the viscosity decrease. Reduction of fiber diameter followed by a decrease in pore size, this is a very important property of a membrane having a small pore size with high porosity. PVA/chitosan nanofibers have pH sensitive of swelling properties and better-swelling properties in acid conditions.

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