scholarly journals Aluminum oxide free-standing thin films to enable nitrogen edge soft x-ray scattering

2018 ◽  
Vol 9 (01) ◽  
pp. 224-228 ◽  
Author(s):  
Dan Ye ◽  
Sintu Rongpipi ◽  
Joshua H. Litofsky ◽  
Youngmin Lee ◽  
Tyler E. Culp ◽  
...  
Keyword(s):  
Thin Films ◽  
Aluminum Oxide ◽  
Free Standing ◽  
X Ray ◽  
X Ray Scattering ◽  
Image Position ◽  
Ray Scattering

Abstract

Structural characterization of laser ablated epitaxial (Ba0.5Sr0.5)TiO3 thin films on MgO(001) by synchrotron x-ray scattering

1999 ◽  
Vol 14 (7) ◽  
pp. 2905-2911 ◽  
Author(s):  
Sangsub Kim ◽  
Tae Soo Kang ◽  
Jung Ho Je
Keyword(s):  
Thin Films ◽  
Early Stage ◽  
Lattice Parameter ◽  
Normal Direction ◽  
X Ray ◽  
X Ray Scattering ◽  
Surface Normal ◽  
Out Of Plane ◽  
Axis Parallel ◽  
Ray Scattering

Epitaxial (Ba0.5Sr0.5) TiO3 thin films of two different thickness (∼25 and ∼134 nm) on MgO(001) prepared by a pulsed laser deposition method were studied by synchrotron x-ray scattering measurements. The film grew initially with a cube-on-cube relationship, maintaining it during further growth. As the film grew, the surface of the film became significantly rougher, but the interface between the film and the substrate did not. In the early stage of growth, the film was highly strained in a tetragonal structure (c/a = 1.04) with the longer axis parallel to the surface normal direction. As the growth proceeded further, it relaxed to a cubic structure with the lattice parameter near the bulk value, and the mosaic distribution improved significantly in both in- and out-of-plane directions. The thinner film (∼25 nm) showed only one domain limited mainly by the film thickness, but the thicker film (∼134 nm) exhibited three domains along the surface normal direction.

Grazing incidence small angle x-ray scattering from free-standing nanostructures

1999 ◽  
Vol 86 (12) ◽  
pp. 6763-6769 ◽  
Author(s):  
Markus Rauscher ◽  
Rogerio Paniago ◽  
Hartmut Metzger ◽  
Zoltan Kovats ◽  
Jan Domke ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
Free Standing ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

A New X-Ray Scattering Method for Determining Pore-Size Distribution in Low-k Thin Films

2001 ◽  
Vol 714 ◽  
Author(s):  
Kazuhiko Omote ◽  
Shigeru Kawamura
Keyword(s):  
Thin Films ◽  
Pore Size Distribution ◽  
Pore Size ◽  
Gas Adsorption ◽  
Size Distributions ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Size Distributions ◽  
Scattering Technique ◽  
Ray Scattering

ABSTRACTWe have successively developed a new x-ray scattering technique for a non-destructive determination of pore-size distributions in porous low-κ thin films formed on thick substrates. The pore size distribution in a film is derived from x-ray diffuse scattering data, which are measured using offset θ/2θ scans to avoid strong specular reflections from the film surface and its substrate. Γ-distribution mode for the pores in the film is used in the calculation. The average diameter and the dispersion parameter of the Γ-distribution function are varied and refined by computer so that the calculated scattering pattern best matches to the experimental pattern. The technique has been used to analyze porous methyl silsesquioxane (MSQ) films. The pore size distributions determined by the x-ray scattering technique agree with that of the commonly used gas adsorption technique. The x-ray technique has been also used successfully determine small pores less than one nanometer in diameter, which is well below the lowest limit of the gas adsorption technique.

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

2009 ◽  
Vol 113 (38) ◽  
pp. 12623-12627 ◽  
Author(s):  
Hong-Ji Chen ◽  
Sheng-Ying Li ◽  
Xiao-Jun Liu ◽  
Rui-Peng Li ◽  
Detlef-M. Smilgies ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Structures ◽  
Organosilicate Thin Films ◽  
Ray Scattering

Resonant x-ray scattering method for measuring cation stoichiometry in BaSnO3 thin films

2022 ◽  
Vol 40 (1) ◽  
pp. 013411
Author(s):  
Claudia Lau ◽  
Nicholas G. Combs ◽  
Evguenia Karapetrova ◽  
Juan Jiang ◽  
Susanne Stemmer ◽  
...  
Keyword(s):  
Thin Films ◽  
Scattering Method ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

A Study of Structures in ZnO and ZnO:V2O5 Thin Films by In-Situ Synchrotron X-ray Scattering

2007 ◽  
Vol 51 (92) ◽  
pp. 862 ◽  
Author(s):  
S. W. Hwang ◽  
H. K. Kim ◽  
Yoon-Hwae Hwang ◽  
Kwang-Nak Koh
Keyword(s):  
Thin Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Grazing-incidence X-ray scattering of lamellar thin films

2019 ◽  
Vol 52 (2) ◽  
pp. 247-251
Author(s):  
Detlef-M. Smilgies
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Small Molecules ◽  
Film Studies ◽  
Grazing Incidence ◽  
Semicrystalline Polymers ◽  
X Ray ◽  
X Ray Scattering ◽  
Incident Plane ◽  
Ray Scattering

Recently, surface and thin-film studies using area detectors have become prevalent. An important class of such systems are lamellar thin films formed by small molecules, liquid crystals or semicrystalline polymers. Frequently, the lamellae align more or less parallel to the substrate. Such structures can be easily discerned by their characteristic X-ray scattering close to the incident plane. This paper describes how such patterns can be simulated, in order to extract morphological information about the thin film.

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